The foundations of vacuum coating technology

"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; V...
Ausführliche Beschreibung

"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Ausführliche Beschreibung