Hydrophobicity enhancement of Al2O3 thin films deposited on polymeric substrates by atomic layer deposition with perfluoropropane plasma treatment

• Good quality Al2O3 thin films are fabricated on PEN substrates through ALD. • Hydrophobicity of Al2O3 films has been enhanced greatly by C3F8 plasma treatment. • C3F8 plasma treated films have retained good surface morphology. • C3F8 plasma treated films have shown high optical transmittance of mo...
Ausführliche Beschreibung

• Good quality Al2O3 thin films are fabricated on PEN substrates through ALD. • Hydrophobicity of Al2O3 films has been enhanced greatly by C3F8 plasma treatment. • C3F8 plasma treated films have retained good surface morphology. • C3F8 plasma treated films have shown high optical transmittance of more than 90%. Ausführliche Beschreibung