Condition assessment and fault prognostics of microelectromechanical systems

• Review of microelectromechanical systems (MEMS) reliability and failure mechanisms. • Introduction to the Prognostics and Health Management (PHM) concept. • Challenges and requirements when applying PHM on MEMS. • Proposition of a PHM method. • Application to a microgripper (condition assessment a...
Ausführliche Beschreibung

• Review of microelectromechanical systems (MEMS) reliability and failure mechanisms. • Introduction to the Prognostics and Health Management (PHM) concept. • Challenges and requirements when applying PHM on MEMS. • Proposition of a PHM method. • Application to a microgripper (condition assessment and remaining useful life estimation). Ausführliche Beschreibung