Suchergebnisse - "Hatamura, Yotaro"

1

A fundamental structure for intelligent manufacturing

von: Hatamura, Yotaro

1993, in: Precision engineering

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2

Multi-layered circuit board precisely pressed-damascened on glass plates

von: Nakao, Masayuki

2004, in: Precision engineering

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3

Micro-Teleoperation with Manual Task Execution Posture

von: Sato, Tomomasa

1995, in: IEEE control systems magazine

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4

Simulation of near-field photolithography using the finite-difference time-domain method

von: Tanaka, Shuji

2001, in: Journal of applied physics

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5

Optical and EUV Lithography - Printing Sub-100 Nanometer Features Near-field Photolithography

von: Tanaka, Shuji

1998, in: Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers

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