Suchergebnisse - Double-sided mechanical polishing

1

Precision Fabrication of Thin Copper Substrate by Double-sided Lapping and Chemical Mechanical Polishing

von: Pan, Bo

2019, in: Journal of manufacturing processes

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2

Trajectory uniformity of the double-sided mechanical polishing of SiC single crystal substrate

von: Zhang, Peng

2019, in: Materials science in semiconductor processing

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3

Analysis of the Influence of the Motion State of Ultra-Thin Sapphire Based on Layer-Stacked Clamping (LSC)

von: Zhixiang Chen

2023, in: Micromachines

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4

The Mechanism of Layer Stacked Clamping (LSC) for Polishing Ultra-Thin Sapphire Wafer

von: Zhixiang Chen

2020, in: Micromachines

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5

Estimation of material removal rate distribution in double-sided polishing of thick square workpiece considering workpiece attitude

von: Yohei HASHIMOTO

2019, in: Journal of Advanced Mechanical Design, Systems, and Manufacturing

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6

Effects of polishing parameters on surface quality in sapphire double-sided CMP

von: Li, Zhongyang

2020transfer abstract, in: Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration

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