Suchergebnisse - Megasonic cleaning

1

Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents

von: Kim, Min-Su

2018transfer abstract, in: Reaction mechanism investigation of furfural conversion to 2-methylfuran on Cu(1 1 1) surface

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2

A quartz-bar megasonic system for nano-pattern cleaning

von: Kim, Hyunse

2013, in: International journal of precision engineering and manufacturing

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3

Adhesion and removal behavior of particulate contaminants from EUV mask materials

von: Kim, Min-Su

2017transfer abstract, in: Reaction mechanism investigation of furfural conversion to 2-methylfuran on Cu(1 1 1) surface

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4

Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

von: Sahoo, Bichitra Nanda

2021, in: Ultrasonics sonochemistry

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5

Role of ammonia and carbonates in scavenging hydroxyl radicals generated during megasonic irradiation of wafer cleaning solutions

von: Balachandran, Rajesh

2014, in: Brain emotional learning impedance control of uncertain nonlinear systems with time delay: Experiments on a hybrid elastic joint robot in telesurgery

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6

Characterization of stable and transient cavitation in megasonically irradiated aqueous solutions

von: Balachandran, Rajesh

2015, in: Brain emotional learning impedance control of uncertain nonlinear systems with time delay: Experiments on a hybrid elastic joint robot in telesurgery

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7

A novel way of detecting transient cavitation near a solid surface during megasonic cleaning using electrochemical impedance spectroscopy

von: Keswani, M.

2013, in: Brain emotional learning impedance control of uncertain nonlinear systems with time delay: Experiments on a hybrid elastic joint robot in telesurgery

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8

Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography

von: Kim, Min-Su

2014, in: Brain emotional learning impedance control of uncertain nonlinear systems with time delay: Experiments on a hybrid elastic joint robot in telesurgery

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9

Particle Deposition and Removal of Relevance to Wet Processing in Semiconductor Manufacturing

von: Chiang, Chieh-Chun

2015, in: Particulate science and technology

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10

Electrochemical investigations of stable cavitation from bubbles generated during reduction of water

von: Keswani, M.

2014, in: Apparent Progression of Presbyopia After Laser In Situ Keratomileusis in Patients With Early Presbyopia

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11

Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

von: Bichitra Nanda Sahoo

2022, in: Ultrasonics Sonochemistry

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12

Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83MHz megasonic of interest to wafer cleaning

von: Kang, Bong-Kyun

2014, in: Apparent Progression of Presbyopia After Laser In Situ Keratomileusis in Patients With Early Presbyopia

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13

Dual-Frequency Megasonic Waveguide for Nano-Pattern Cleaning

von: Kim, Hyunse

2015, in: IEEE transactions on semiconductor manufacturing

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