Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications

Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topolog...
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Gespeichert in:

Autor*in:	Chirag Goel [verfasserIn] Paul-Vahe Cicek [verfasserIn] Alexandre Robichaud [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2022

Schlagwörter:	capacitive micromachined ultrasonic transducers (CMUTs) medical imaging MEMS ultrasonic transducers

Übergeordnetes Werk:	In: Micromachines - MDPI AG, 2010, 13(2022), 10, p 1598
Übergeordnetes Werk:	volume:13 ; year:2022 ; number:10, p 1598

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/mi13101598

Katalog-ID:	DOAJ00326596X

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allfields	10.3390/mi13101598 doi (DE-627)DOAJ00326596X (DE-599)DOAJ006bce1314274ebe9c0d63881d63a204 DE-627 ger DE-627 rakwb eng TJ1-1570 Chirag Goel verfasserin aut Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air. capacitive micromachined ultrasonic transducers (CMUTs) medical imaging MEMS ultrasonic transducers Mechanical engineering and machinery Paul-Vahe Cicek verfasserin aut Alexandre Robichaud verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 10, p 1598 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:10, p 1598 https://doi.org/10.3390/mi13101598 kostenfrei https://doaj.org/article/006bce1314274ebe9c0d63881d63a204 kostenfrei https://www.mdpi.com/2072-666X/13/10/1598 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 10, p 1598
spelling	10.3390/mi13101598 doi (DE-627)DOAJ00326596X (DE-599)DOAJ006bce1314274ebe9c0d63881d63a204 DE-627 ger DE-627 rakwb eng TJ1-1570 Chirag Goel verfasserin aut Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air. capacitive micromachined ultrasonic transducers (CMUTs) medical imaging MEMS ultrasonic transducers Mechanical engineering and machinery Paul-Vahe Cicek verfasserin aut Alexandre Robichaud verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 10, p 1598 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:10, p 1598 https://doi.org/10.3390/mi13101598 kostenfrei https://doaj.org/article/006bce1314274ebe9c0d63881d63a204 kostenfrei https://www.mdpi.com/2072-666X/13/10/1598 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 10, p 1598
allfields_unstemmed	10.3390/mi13101598 doi (DE-627)DOAJ00326596X (DE-599)DOAJ006bce1314274ebe9c0d63881d63a204 DE-627 ger DE-627 rakwb eng TJ1-1570 Chirag Goel verfasserin aut Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air. capacitive micromachined ultrasonic transducers (CMUTs) medical imaging MEMS ultrasonic transducers Mechanical engineering and machinery Paul-Vahe Cicek verfasserin aut Alexandre Robichaud verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 10, p 1598 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:10, p 1598 https://doi.org/10.3390/mi13101598 kostenfrei https://doaj.org/article/006bce1314274ebe9c0d63881d63a204 kostenfrei https://www.mdpi.com/2072-666X/13/10/1598 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 10, p 1598
allfieldsGer	10.3390/mi13101598 doi (DE-627)DOAJ00326596X (DE-599)DOAJ006bce1314274ebe9c0d63881d63a204 DE-627 ger DE-627 rakwb eng TJ1-1570 Chirag Goel verfasserin aut Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air. capacitive micromachined ultrasonic transducers (CMUTs) medical imaging MEMS ultrasonic transducers Mechanical engineering and machinery Paul-Vahe Cicek verfasserin aut Alexandre Robichaud verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 10, p 1598 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:10, p 1598 https://doi.org/10.3390/mi13101598 kostenfrei https://doaj.org/article/006bce1314274ebe9c0d63881d63a204 kostenfrei https://www.mdpi.com/2072-666X/13/10/1598 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 10, p 1598
allfieldsSound	10.3390/mi13101598 doi (DE-627)DOAJ00326596X (DE-599)DOAJ006bce1314274ebe9c0d63881d63a204 DE-627 ger DE-627 rakwb eng TJ1-1570 Chirag Goel verfasserin aut Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air. capacitive micromachined ultrasonic transducers (CMUTs) medical imaging MEMS ultrasonic transducers Mechanical engineering and machinery Paul-Vahe Cicek verfasserin aut Alexandre Robichaud verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 10, p 1598 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:10, p 1598 https://doi.org/10.3390/mi13101598 kostenfrei https://doaj.org/article/006bce1314274ebe9c0d63881d63a204 kostenfrei https://www.mdpi.com/2072-666X/13/10/1598 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 10, p 1598
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callnumber-first	T - Technology
author	Chirag Goel
spellingShingle	Chirag Goel misc TJ1-1570 misc capacitive micromachined ultrasonic transducers (CMUTs) misc medical imaging misc MEMS misc ultrasonic transducers misc Mechanical engineering and machinery Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications
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topic_title	TJ1-1570 Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications capacitive micromachined ultrasonic transducers (CMUTs) medical imaging MEMS ultrasonic transducers
topic	misc TJ1-1570 misc capacitive micromachined ultrasonic transducers (CMUTs) misc medical imaging misc MEMS misc ultrasonic transducers misc Mechanical engineering and machinery
topic_unstemmed	misc TJ1-1570 misc capacitive micromachined ultrasonic transducers (CMUTs) misc medical imaging misc MEMS misc ultrasonic transducers misc Mechanical engineering and machinery
topic_browse	misc TJ1-1570 misc capacitive micromachined ultrasonic transducers (CMUTs) misc medical imaging misc MEMS misc ultrasonic transducers misc Mechanical engineering and machinery
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title	Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications
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title_sort	design and implementation of low-voltage tunable capacitive micro-machined transducers (cmut) for portable applications
callnumber	TJ1-1570
title_auth	Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications
abstract	Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air.
abstractGer	Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air.
abstract_unstemmed	Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air.
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title_short	Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications
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