Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters

Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is d...
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Autor*in:	Bart Vereecke [verfasserIn] Els Van Besien [verfasserIn] Deniz Sabuncuoglu Tezcan [verfasserIn] Nick Spooren [verfasserIn] Nicolaas Tack [verfasserIn] Andy Lambrechts [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2019

Schlagwörter:	CMOS image sensor monolithic integration optical filters multispectral imaging RGB NIR

Übergeordnetes Werk:	In: Proceedings - MDPI AG, 2018, 2(2019), 13, p 751
Übergeordnetes Werk:	volume:2 ; year:2019 ; number:13, p 751

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/proceedings2130751

Katalog-ID:	DOAJ012274054

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allfieldsGer	10.3390/proceedings2130751 doi (DE-627)DOAJ012274054 (DE-599)DOAJc3b610b49e6d4bada1bf7c3ac2b2f39d DE-627 ger DE-627 rakwb eng Bart Vereecke verfasserin aut Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is described, including the integration of a metallic shield to minimize crosstalk, and two interference filters: a NIR blocking filter, and a NIR bandpass filter. This is then combined with standard polymer based RGB colour filters. Fabrication of this chip is done in imec’s 200 mm cleanroom using standard CMOS technology, except for the addition of RGB colour filters and microlenses, which is outsourced. CMOS image sensor monolithic integration optical filters multispectral imaging RGB NIR General Works A Els Van Besien verfasserin aut Deniz Sabuncuoglu Tezcan verfasserin aut Nick Spooren verfasserin aut Nicolaas Tack verfasserin aut Andy Lambrechts verfasserin aut In Proceedings MDPI AG, 2018 2(2019), 13, p 751 (DE-627)896671828 (DE-600)2904077-2 25043900 nnns volume:2 year:2019 number:13, p 751 https://doi.org/10.3390/proceedings2130751 kostenfrei https://doaj.org/article/c3b610b49e6d4bada1bf7c3ac2b2f39d kostenfrei http://www.mdpi.com/2504-3900/2/13/751 kostenfrei https://doaj.org/toc/2504-3900 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 2 2019 13, p 751
allfieldsSound	10.3390/proceedings2130751 doi (DE-627)DOAJ012274054 (DE-599)DOAJc3b610b49e6d4bada1bf7c3ac2b2f39d DE-627 ger DE-627 rakwb eng Bart Vereecke verfasserin aut Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is described, including the integration of a metallic shield to minimize crosstalk, and two interference filters: a NIR blocking filter, and a NIR bandpass filter. This is then combined with standard polymer based RGB colour filters. Fabrication of this chip is done in imec’s 200 mm cleanroom using standard CMOS technology, except for the addition of RGB colour filters and microlenses, which is outsourced. CMOS image sensor monolithic integration optical filters multispectral imaging RGB NIR General Works A Els Van Besien verfasserin aut Deniz Sabuncuoglu Tezcan verfasserin aut Nick Spooren verfasserin aut Nicolaas Tack verfasserin aut Andy Lambrechts verfasserin aut In Proceedings MDPI AG, 2018 2(2019), 13, p 751 (DE-627)896671828 (DE-600)2904077-2 25043900 nnns volume:2 year:2019 number:13, p 751 https://doi.org/10.3390/proceedings2130751 kostenfrei https://doaj.org/article/c3b610b49e6d4bada1bf7c3ac2b2f39d kostenfrei http://www.mdpi.com/2504-3900/2/13/751 kostenfrei https://doaj.org/toc/2504-3900 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 2 2019 13, p 751
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author	Bart Vereecke
spellingShingle	Bart Vereecke misc CMOS image sensor misc monolithic integration misc optical filters misc multispectral imaging misc RGB misc NIR misc General Works misc A Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters
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topic_title	Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters CMOS image sensor monolithic integration optical filters multispectral imaging RGB NIR
topic	misc CMOS image sensor misc monolithic integration misc optical filters misc multispectral imaging misc RGB misc NIR misc General Works misc A
topic_unstemmed	misc CMOS image sensor misc monolithic integration misc optical filters misc multispectral imaging misc RGB misc NIR misc General Works misc A
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title	Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters
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author_browse	Bart Vereecke Els Van Besien Deniz Sabuncuoglu Tezcan Nick Spooren Nicolaas Tack Andy Lambrechts
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title_sort	fabrication of a cmos-based imaging chip with monolithically integrated rgb and nir filters
title_auth	Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters
abstract	Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is described, including the integration of a metallic shield to minimize crosstalk, and two interference filters: a NIR blocking filter, and a NIR bandpass filter. This is then combined with standard polymer based RGB colour filters. Fabrication of this chip is done in imec’s 200 mm cleanroom using standard CMOS technology, except for the addition of RGB colour filters and microlenses, which is outsourced.
abstractGer	Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is described, including the integration of a metallic shield to minimize crosstalk, and two interference filters: a NIR blocking filter, and a NIR bandpass filter. This is then combined with standard polymer based RGB colour filters. Fabrication of this chip is done in imec’s 200 mm cleanroom using standard CMOS technology, except for the addition of RGB colour filters and microlenses, which is outsourced.
abstract_unstemmed	Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is described, including the integration of a metallic shield to minimize crosstalk, and two interference filters: a NIR blocking filter, and a NIR bandpass filter. This is then combined with standard polymer based RGB colour filters. Fabrication of this chip is done in imec’s 200 mm cleanroom using standard CMOS technology, except for the addition of RGB colour filters and microlenses, which is outsourced.
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title_short	Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters
url	https://doi.org/10.3390/proceedings2130751 https://doaj.org/article/c3b610b49e6d4bada1bf7c3ac2b2f39d http://www.mdpi.com/2504-3900/2/13/751 https://doaj.org/toc/2504-3900
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Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters

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