Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe

This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid e...
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Autor*in:	Hiroshi MURAKAMI [verfasserIn] Akio KATSUKI [verfasserIn] Hiromichi ONIKURA [verfasserIn] Takao SAJIMA [verfasserIn] Norio KAWAGOISHI [verfasserIn] Eiji KONDO [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2010

Schlagwörter:	micro hole deep hole measurement optical fiber probe laser diode accuracy

Übergeordnetes Werk:	In: Journal of Advanced Mechanical Design, Systems, and Manufacturing - The Japan Society of Mechanical Engineers, 2022, 4(2010), 5, Seite 995-1004
Übergeordnetes Werk:	volume:4 ; year:2010 ; number:5 ; pages:995-1004

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.1299/jamdsm.4.995

Katalog-ID:	DOAJ020242360

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650		4	\|a micro hole
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allfields	10.1299/jamdsm.4.995 doi (DE-627)DOAJ020242360 (DE-599)DOAJ5b30560c31d04a20b4f255f8f52f6bf4 DE-627 ger DE-627 rakwb eng TA213-215 TJ1-1570 Hiroshi MURAKAMI verfasserin aut Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration. micro hole deep hole measurement optical fiber probe laser diode accuracy Engineering machinery, tools, and implements Mechanical engineering and machinery Akio KATSUKI verfasserin aut Hiromichi ONIKURA verfasserin aut Takao SAJIMA verfasserin aut Norio KAWAGOISHI verfasserin aut Eiji KONDO verfasserin aut In Journal of Advanced Mechanical Design, Systems, and Manufacturing The Japan Society of Mechanical Engineers, 2022 4(2010), 5, Seite 995-1004 (DE-627)549634266 (DE-600)2395570-3 18813054 nnns volume:4 year:2010 number:5 pages:995-1004 https://doi.org/10.1299/jamdsm.4.995 kostenfrei https://doaj.org/article/5b30560c31d04a20b4f255f8f52f6bf4 kostenfrei https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_995/_pdf/-char/en kostenfrei https://doaj.org/toc/1881-3054 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 4 2010 5 995-1004
spelling	10.1299/jamdsm.4.995 doi (DE-627)DOAJ020242360 (DE-599)DOAJ5b30560c31d04a20b4f255f8f52f6bf4 DE-627 ger DE-627 rakwb eng TA213-215 TJ1-1570 Hiroshi MURAKAMI verfasserin aut Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration. micro hole deep hole measurement optical fiber probe laser diode accuracy Engineering machinery, tools, and implements Mechanical engineering and machinery Akio KATSUKI verfasserin aut Hiromichi ONIKURA verfasserin aut Takao SAJIMA verfasserin aut Norio KAWAGOISHI verfasserin aut Eiji KONDO verfasserin aut In Journal of Advanced Mechanical Design, Systems, and Manufacturing The Japan Society of Mechanical Engineers, 2022 4(2010), 5, Seite 995-1004 (DE-627)549634266 (DE-600)2395570-3 18813054 nnns volume:4 year:2010 number:5 pages:995-1004 https://doi.org/10.1299/jamdsm.4.995 kostenfrei https://doaj.org/article/5b30560c31d04a20b4f255f8f52f6bf4 kostenfrei https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_995/_pdf/-char/en kostenfrei https://doaj.org/toc/1881-3054 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 4 2010 5 995-1004
allfields_unstemmed	10.1299/jamdsm.4.995 doi (DE-627)DOAJ020242360 (DE-599)DOAJ5b30560c31d04a20b4f255f8f52f6bf4 DE-627 ger DE-627 rakwb eng TA213-215 TJ1-1570 Hiroshi MURAKAMI verfasserin aut Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration. micro hole deep hole measurement optical fiber probe laser diode accuracy Engineering machinery, tools, and implements Mechanical engineering and machinery Akio KATSUKI verfasserin aut Hiromichi ONIKURA verfasserin aut Takao SAJIMA verfasserin aut Norio KAWAGOISHI verfasserin aut Eiji KONDO verfasserin aut In Journal of Advanced Mechanical Design, Systems, and Manufacturing The Japan Society of Mechanical Engineers, 2022 4(2010), 5, Seite 995-1004 (DE-627)549634266 (DE-600)2395570-3 18813054 nnns volume:4 year:2010 number:5 pages:995-1004 https://doi.org/10.1299/jamdsm.4.995 kostenfrei https://doaj.org/article/5b30560c31d04a20b4f255f8f52f6bf4 kostenfrei https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_995/_pdf/-char/en kostenfrei https://doaj.org/toc/1881-3054 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 4 2010 5 995-1004
allfieldsGer	10.1299/jamdsm.4.995 doi (DE-627)DOAJ020242360 (DE-599)DOAJ5b30560c31d04a20b4f255f8f52f6bf4 DE-627 ger DE-627 rakwb eng TA213-215 TJ1-1570 Hiroshi MURAKAMI verfasserin aut Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration. micro hole deep hole measurement optical fiber probe laser diode accuracy Engineering machinery, tools, and implements Mechanical engineering and machinery Akio KATSUKI verfasserin aut Hiromichi ONIKURA verfasserin aut Takao SAJIMA verfasserin aut Norio KAWAGOISHI verfasserin aut Eiji KONDO verfasserin aut In Journal of Advanced Mechanical Design, Systems, and Manufacturing The Japan Society of Mechanical Engineers, 2022 4(2010), 5, Seite 995-1004 (DE-627)549634266 (DE-600)2395570-3 18813054 nnns volume:4 year:2010 number:5 pages:995-1004 https://doi.org/10.1299/jamdsm.4.995 kostenfrei https://doaj.org/article/5b30560c31d04a20b4f255f8f52f6bf4 kostenfrei https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_995/_pdf/-char/en kostenfrei https://doaj.org/toc/1881-3054 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 4 2010 5 995-1004
allfieldsSound	10.1299/jamdsm.4.995 doi (DE-627)DOAJ020242360 (DE-599)DOAJ5b30560c31d04a20b4f255f8f52f6bf4 DE-627 ger DE-627 rakwb eng TA213-215 TJ1-1570 Hiroshi MURAKAMI verfasserin aut Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration. micro hole deep hole measurement optical fiber probe laser diode accuracy Engineering machinery, tools, and implements Mechanical engineering and machinery Akio KATSUKI verfasserin aut Hiromichi ONIKURA verfasserin aut Takao SAJIMA verfasserin aut Norio KAWAGOISHI verfasserin aut Eiji KONDO verfasserin aut In Journal of Advanced Mechanical Design, Systems, and Manufacturing The Japan Society of Mechanical Engineers, 2022 4(2010), 5, Seite 995-1004 (DE-627)549634266 (DE-600)2395570-3 18813054 nnns volume:4 year:2010 number:5 pages:995-1004 https://doi.org/10.1299/jamdsm.4.995 kostenfrei https://doaj.org/article/5b30560c31d04a20b4f255f8f52f6bf4 kostenfrei https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_995/_pdf/-char/en kostenfrei https://doaj.org/toc/1881-3054 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 4 2010 5 995-1004
language	English
source	In Journal of Advanced Mechanical Design, Systems, and Manufacturing 4(2010), 5, Seite 995-1004 volume:4 year:2010 number:5 pages:995-1004
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topic_facet	micro hole deep hole measurement optical fiber probe laser diode accuracy Engineering machinery, tools, and implements Mechanical engineering and machinery
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container_title	Journal of Advanced Mechanical Design, Systems, and Manufacturing
authorswithroles_txt_mv	Hiroshi MURAKAMI @@aut@@ Akio KATSUKI @@aut@@ Hiromichi ONIKURA @@aut@@ Takao SAJIMA @@aut@@ Norio KAWAGOISHI @@aut@@ Eiji KONDO @@aut@@
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callnumber-first	T - Technology
author	Hiroshi MURAKAMI
spellingShingle	Hiroshi MURAKAMI misc TA213-215 misc TJ1-1570 misc micro hole misc deep hole misc measurement misc optical fiber probe misc laser diode misc accuracy misc Engineering machinery, tools, and implements misc Mechanical engineering and machinery Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe
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topic_title	TA213-215 TJ1-1570 Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe micro hole deep hole measurement optical fiber probe laser diode accuracy
topic	misc TA213-215 misc TJ1-1570 misc micro hole misc deep hole misc measurement misc optical fiber probe misc laser diode misc accuracy misc Engineering machinery, tools, and implements misc Mechanical engineering and machinery
topic_unstemmed	misc TA213-215 misc TJ1-1570 misc micro hole misc deep hole misc measurement misc optical fiber probe misc laser diode misc accuracy misc Engineering machinery, tools, and implements misc Mechanical engineering and machinery
topic_browse	misc TA213-215 misc TJ1-1570 misc micro hole misc deep hole misc measurement misc optical fiber probe misc laser diode misc accuracy misc Engineering machinery, tools, and implements misc Mechanical engineering and machinery
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title	Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe
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title_full	Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe
author_sort	Hiroshi MURAKAMI
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author_browse	Hiroshi MURAKAMI Akio KATSUKI Hiromichi ONIKURA Takao SAJIMA Norio KAWAGOISHI Eiji KONDO
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title_sort	development of a system for measuring micro hole accuracy using an optical fiber probe
callnumber	TA213-215
title_auth	Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe
abstract	This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration.
abstractGer	This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration.
abstract_unstemmed	This paper presents a system for measuring micro holes that makes use of an optical fiber probe. The optical fiber probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. For this research, the optical fiber probe is fabricated by using an acid etch technique and its characteristics in the process of displacement detection are described. The effects of surface force are then evaluated. The diameter of the optical fiber probe sphere at the tip of the probe is calibrated by using a 1mm gage block, and the effect of the probe sphere diameter is compensated for measurement of the roughness standard specimen. As a result, it is confirmed that the accuracy after compensation of the roughness standard specimen as measured by the measuring system corresponds well to that of the surface roughness tester in both shape and value, demonstrating the utility of this means of calibration.
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container_issue	5
title_short	Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe
url	https://doi.org/10.1299/jamdsm.4.995 https://doaj.org/article/5b30560c31d04a20b4f255f8f52f6bf4 https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_995/_pdf/-char/en https://doaj.org/toc/1881-3054
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author2	Akio KATSUKI Hiromichi ONIKURA Takao SAJIMA Norio KAWAGOISHI Eiji KONDO
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up_date	2024-07-03T13:48:47.448Z
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Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe

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