Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film

A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with l...
Ausführliche Beschreibung

Gespeichert in:

Autor*in:	Junbin Zang [verfasserIn] Zheng Fan [verfasserIn] Penglu Li [verfasserIn] Xiaoya Duan [verfasserIn] Chunsheng Wu [verfasserIn] Danfeng Cui [verfasserIn] Chenyang Xue [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2022

Schlagwörter:	MEMS fabrication multiphysics coupling simulation PMUT

Übergeordnetes Werk:	In: Micromachines - MDPI AG, 2010, 13(2022), 8, p 1317
Übergeordnetes Werk:	volume:13 ; year:2022 ; number:8, p 1317

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/mi13081317

Katalog-ID:	DOAJ024210595

Internformat


LEADER	01000caa a22002652 4500
001	DOAJ024210595
003	DE-627
005	20240414134112.0
007	cr uuu---uuuuu
008	230226s2022 xx \|\|\|\|\|o 00\| \|\|eng c
024	7		\|a 10.3390/mi13081317 \|2 doi
035			\|a (DE-627)DOAJ024210595
035			\|a (DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
050		0	\|a TJ1-1570
100	0		\|a Junbin Zang \|e verfasserin \|4 aut
245	1	0	\|a Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film
264		1	\|c 2022
336			\|a Text \|b txt \|2 rdacontent
337			\|a Computermedien \|b c \|2 rdamedia
338			\|a Online-Ressource \|b cr \|2 rdacarrier
520			\|a A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.
650		4	\|a MEMS fabrication
650		4	\|a multiphysics coupling simulation
650		4	\|a PMUT
653		0	\|a Mechanical engineering and machinery
700	0		\|a Zheng Fan \|e verfasserin \|4 aut
700	0		\|a Penglu Li \|e verfasserin \|4 aut
700	0		\|a Xiaoya Duan \|e verfasserin \|4 aut
700	0		\|a Chunsheng Wu \|e verfasserin \|4 aut
700	0		\|a Danfeng Cui \|e verfasserin \|4 aut
700	0		\|a Chenyang Xue \|e verfasserin \|4 aut
773	0	8	\|i In \|t Micromachines \|d MDPI AG, 2010 \|g 13(2022), 8, p 1317 \|w (DE-627)665016069 \|w (DE-600)2620864-7 \|x 2072666X \|7 nnns
773	1	8	\|g volume:13 \|g year:2022 \|g number:8, p 1317
856	4	0	\|u https://doi.org/10.3390/mi13081317 \|z kostenfrei
856	4	0	\|u https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa \|z kostenfrei
856	4	0	\|u https://www.mdpi.com/2072-666X/13/8/1317 \|z kostenfrei
856	4	2	\|u https://doaj.org/toc/2072-666X \|y Journal toc \|z kostenfrei
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_DOAJ
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_24
912			\|a GBV_ILN_39
912			\|a GBV_ILN_40
912			\|a GBV_ILN_60
912			\|a GBV_ILN_62
912			\|a GBV_ILN_63
912			\|a GBV_ILN_65
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_73
912			\|a GBV_ILN_95
912			\|a GBV_ILN_105
912			\|a GBV_ILN_110
912			\|a GBV_ILN_151
912			\|a GBV_ILN_161
912			\|a GBV_ILN_170
912			\|a GBV_ILN_213
912			\|a GBV_ILN_230
912			\|a GBV_ILN_285
912			\|a GBV_ILN_293
912			\|a GBV_ILN_370
912			\|a GBV_ILN_602
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_4012
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4112
912			\|a GBV_ILN_4125
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4249
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4322
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4324
912			\|a GBV_ILN_4325
912			\|a GBV_ILN_4335
912			\|a GBV_ILN_4338
912			\|a GBV_ILN_4367
912			\|a GBV_ILN_4700
951			\|a AR
952			\|d 13 \|j 2022 \|e 8, p 1317

Indexfelder

author_variant	j z jz z f zf p l pl x d xd c w cw d c dc c x cx
matchkey_str	article:2072666X:2022----::einnfbiainfihrqecpeolcrcirmcieutaoita
hierarchy_sort_str	2022
callnumber-subject-code	TJ
publishDate	2022
allfields	10.3390/mi13081317 doi (DE-627)DOAJ024210595 (DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa DE-627 ger DE-627 rakwb eng TJ1-1570 Junbin Zang verfasserin aut Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester. MEMS fabrication multiphysics coupling simulation PMUT Mechanical engineering and machinery Zheng Fan verfasserin aut Penglu Li verfasserin aut Xiaoya Duan verfasserin aut Chunsheng Wu verfasserin aut Danfeng Cui verfasserin aut Chenyang Xue verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 8, p 1317 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:8, p 1317 https://doi.org/10.3390/mi13081317 kostenfrei https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa kostenfrei https://www.mdpi.com/2072-666X/13/8/1317 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 8, p 1317
spelling	10.3390/mi13081317 doi (DE-627)DOAJ024210595 (DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa DE-627 ger DE-627 rakwb eng TJ1-1570 Junbin Zang verfasserin aut Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester. MEMS fabrication multiphysics coupling simulation PMUT Mechanical engineering and machinery Zheng Fan verfasserin aut Penglu Li verfasserin aut Xiaoya Duan verfasserin aut Chunsheng Wu verfasserin aut Danfeng Cui verfasserin aut Chenyang Xue verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 8, p 1317 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:8, p 1317 https://doi.org/10.3390/mi13081317 kostenfrei https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa kostenfrei https://www.mdpi.com/2072-666X/13/8/1317 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 8, p 1317
allfields_unstemmed	10.3390/mi13081317 doi (DE-627)DOAJ024210595 (DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa DE-627 ger DE-627 rakwb eng TJ1-1570 Junbin Zang verfasserin aut Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester. MEMS fabrication multiphysics coupling simulation PMUT Mechanical engineering and machinery Zheng Fan verfasserin aut Penglu Li verfasserin aut Xiaoya Duan verfasserin aut Chunsheng Wu verfasserin aut Danfeng Cui verfasserin aut Chenyang Xue verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 8, p 1317 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:8, p 1317 https://doi.org/10.3390/mi13081317 kostenfrei https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa kostenfrei https://www.mdpi.com/2072-666X/13/8/1317 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 8, p 1317
allfieldsGer	10.3390/mi13081317 doi (DE-627)DOAJ024210595 (DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa DE-627 ger DE-627 rakwb eng TJ1-1570 Junbin Zang verfasserin aut Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester. MEMS fabrication multiphysics coupling simulation PMUT Mechanical engineering and machinery Zheng Fan verfasserin aut Penglu Li verfasserin aut Xiaoya Duan verfasserin aut Chunsheng Wu verfasserin aut Danfeng Cui verfasserin aut Chenyang Xue verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 8, p 1317 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:8, p 1317 https://doi.org/10.3390/mi13081317 kostenfrei https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa kostenfrei https://www.mdpi.com/2072-666X/13/8/1317 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 8, p 1317
allfieldsSound	10.3390/mi13081317 doi (DE-627)DOAJ024210595 (DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa DE-627 ger DE-627 rakwb eng TJ1-1570 Junbin Zang verfasserin aut Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester. MEMS fabrication multiphysics coupling simulation PMUT Mechanical engineering and machinery Zheng Fan verfasserin aut Penglu Li verfasserin aut Xiaoya Duan verfasserin aut Chunsheng Wu verfasserin aut Danfeng Cui verfasserin aut Chenyang Xue verfasserin aut In Micromachines MDPI AG, 2010 13(2022), 8, p 1317 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:13 year:2022 number:8, p 1317 https://doi.org/10.3390/mi13081317 kostenfrei https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa kostenfrei https://www.mdpi.com/2072-666X/13/8/1317 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2022 8, p 1317
language	English
source	In Micromachines 13(2022), 8, p 1317 volume:13 year:2022 number:8, p 1317
sourceStr	In Micromachines 13(2022), 8, p 1317 volume:13 year:2022 number:8, p 1317
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	MEMS fabrication multiphysics coupling simulation PMUT Mechanical engineering and machinery
isfreeaccess_bool	true
container_title	Micromachines
authorswithroles_txt_mv	Junbin Zang @@aut@@ Zheng Fan @@aut@@ Penglu Li @@aut@@ Xiaoya Duan @@aut@@ Chunsheng Wu @@aut@@ Danfeng Cui @@aut@@ Chenyang Xue @@aut@@
publishDateDaySort_date	2022-01-01T00:00:00Z
hierarchy_top_id	665016069
id	DOAJ024210595
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">DOAJ024210595</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240414134112.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230226s2022 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/mi13081317</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ024210595</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ1-1570</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Junbin Zang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS fabrication</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">multiphysics coupling simulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">PMUT</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Mechanical engineering and machinery</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Zheng Fan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Penglu Li</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Xiaoya Duan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Chunsheng Wu</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Danfeng Cui</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Chenyang Xue</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Micromachines</subfield><subfield code="d">MDPI AG, 2010</subfield><subfield code="g">13(2022), 8, p 1317</subfield><subfield code="w">(DE-627)665016069</subfield><subfield code="w">(DE-600)2620864-7</subfield><subfield code="x">2072666X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:13</subfield><subfield code="g">year:2022</subfield><subfield code="g">number:8, p 1317</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/mi13081317</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.mdpi.com/2072-666X/13/8/1317</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/2072-666X</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">13</subfield><subfield code="j">2022</subfield><subfield code="e">8, p 1317</subfield></datafield></record></collection>
callnumber-first	T - Technology
author	Junbin Zang
spellingShingle	Junbin Zang misc TJ1-1570 misc MEMS fabrication misc multiphysics coupling simulation misc PMUT misc Mechanical engineering and machinery Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film
authorStr	Junbin Zang
ppnlink_with_tag_str_mv	@@773@@(DE-627)665016069
format	electronic Article
delete_txt_mv	keep
author_role	aut aut aut aut aut aut aut
collection	DOAJ
remote_str	true
callnumber-label	TJ1-1570
illustrated	Not Illustrated
issn	2072666X
topic_title	TJ1-1570 Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film MEMS fabrication multiphysics coupling simulation PMUT
topic	misc TJ1-1570 misc MEMS fabrication misc multiphysics coupling simulation misc PMUT misc Mechanical engineering and machinery
topic_unstemmed	misc TJ1-1570 misc MEMS fabrication misc multiphysics coupling simulation misc PMUT misc Mechanical engineering and machinery
topic_browse	misc TJ1-1570 misc MEMS fabrication misc multiphysics coupling simulation misc PMUT misc Mechanical engineering and machinery
format_facet	Elektronische Aufsätze Aufsätze Elektronische Ressource
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	cr
hierarchy_parent_title	Micromachines
hierarchy_parent_id	665016069
hierarchy_top_title	Micromachines
isfreeaccess_txt	true
familylinks_str_mv	(DE-627)665016069 (DE-600)2620864-7
title	Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film
ctrlnum	(DE-627)DOAJ024210595 (DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa
title_full	Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film
author_sort	Junbin Zang
journal	Micromachines
journalStr	Micromachines
callnumber-first-code	T
lang_code	eng
isOA_bool	true
recordtype	marc
publishDateSort	2022
contenttype_str_mv	txt
author_browse	Junbin Zang Zheng Fan Penglu Li Xiaoya Duan Chunsheng Wu Danfeng Cui Chenyang Xue
container_volume	13
class	TJ1-1570
format_se	Elektronische Aufsätze
author-letter	Junbin Zang
doi_str_mv	10.3390/mi13081317
author2-role	verfasserin
title_sort	design and fabrication of high-frequency piezoelectric micromachined ultrasonic transducer based on an aln thin film
callnumber	TJ1-1570
title_auth	Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film
abstract	A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.
abstractGer	A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.
abstract_unstemmed	A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700
container_issue	8, p 1317
title_short	Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film
url	https://doi.org/10.3390/mi13081317 https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa https://www.mdpi.com/2072-666X/13/8/1317 https://doaj.org/toc/2072-666X
remote_bool	true
author2	Zheng Fan Penglu Li Xiaoya Duan Chunsheng Wu Danfeng Cui Chenyang Xue
author2Str	Zheng Fan Penglu Li Xiaoya Duan Chunsheng Wu Danfeng Cui Chenyang Xue
ppnlink	665016069
callnumber-subject	TJ - Mechanical Engineering and Machinery
mediatype_str_mv	c
isOA_txt	true
hochschulschrift_bool	false
doi_str	10.3390/mi13081317
callnumber-a	TJ1-1570
up_date	2024-07-03T21:47:45.055Z
_version_	1803596086706700289
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">DOAJ024210595</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240414134112.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230226s2022 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/mi13081317</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ024210595</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ102def8ffa354dc5a534ecb23cd703fa</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ1-1570</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Junbin Zang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS fabrication</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">multiphysics coupling simulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">PMUT</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Mechanical engineering and machinery</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Zheng Fan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Penglu Li</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Xiaoya Duan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Chunsheng Wu</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Danfeng Cui</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Chenyang Xue</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Micromachines</subfield><subfield code="d">MDPI AG, 2010</subfield><subfield code="g">13(2022), 8, p 1317</subfield><subfield code="w">(DE-627)665016069</subfield><subfield code="w">(DE-600)2620864-7</subfield><subfield code="x">2072666X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:13</subfield><subfield code="g">year:2022</subfield><subfield code="g">number:8, p 1317</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/mi13081317</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/102def8ffa354dc5a534ecb23cd703fa</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.mdpi.com/2072-666X/13/8/1317</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/2072-666X</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">13</subfield><subfield code="j">2022</subfield><subfield code="e">8, p 1317</subfield></datafield></record></collection>
score	7.399912

Nicht das Richtige dabei?

Schreiben Sie uns!

Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?