High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and...
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Gespeichert in:

Autor*in:	Wenjie Wu [verfasserIn] Panpan Zheng [verfasserIn] Jinquan Liu [verfasserIn] Zhu Li [verfasserIn] Ji Fan [verfasserIn] Huafeng Liu [verfasserIn] Liangcheng Tu [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2017

Schlagwörter:	capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer

Übergeordnetes Werk:	In: Sensors - MDPI AG, 2003, 17(2017), 9, p 2158
Übergeordnetes Werk:	volume:17 ; year:2017 ; number:9, p 2158

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/s17092158

Katalog-ID:	DOAJ025332872

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allfields	10.3390/s17092158 doi (DE-627)DOAJ025332872 (DE-599)DOAJbeba364f62904e76bf3dd5b830275398 DE-627 ger DE-627 rakwb eng TP1-1185 Wenjie Wu verfasserin aut High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement. capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer Chemical technology Panpan Zheng verfasserin aut Jinquan Liu verfasserin aut Zhu Li verfasserin aut Ji Fan verfasserin aut Huafeng Liu verfasserin aut Liangcheng Tu verfasserin aut In Sensors MDPI AG, 2003 17(2017), 9, p 2158 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:17 year:2017 number:9, p 2158 https://doi.org/10.3390/s17092158 kostenfrei https://doaj.org/article/beba364f62904e76bf3dd5b830275398 kostenfrei https://www.mdpi.com/1424-8220/17/9/2158 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 17 2017 9, p 2158
spelling	10.3390/s17092158 doi (DE-627)DOAJ025332872 (DE-599)DOAJbeba364f62904e76bf3dd5b830275398 DE-627 ger DE-627 rakwb eng TP1-1185 Wenjie Wu verfasserin aut High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement. capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer Chemical technology Panpan Zheng verfasserin aut Jinquan Liu verfasserin aut Zhu Li verfasserin aut Ji Fan verfasserin aut Huafeng Liu verfasserin aut Liangcheng Tu verfasserin aut In Sensors MDPI AG, 2003 17(2017), 9, p 2158 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:17 year:2017 number:9, p 2158 https://doi.org/10.3390/s17092158 kostenfrei https://doaj.org/article/beba364f62904e76bf3dd5b830275398 kostenfrei https://www.mdpi.com/1424-8220/17/9/2158 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 17 2017 9, p 2158
allfields_unstemmed	10.3390/s17092158 doi (DE-627)DOAJ025332872 (DE-599)DOAJbeba364f62904e76bf3dd5b830275398 DE-627 ger DE-627 rakwb eng TP1-1185 Wenjie Wu verfasserin aut High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement. capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer Chemical technology Panpan Zheng verfasserin aut Jinquan Liu verfasserin aut Zhu Li verfasserin aut Ji Fan verfasserin aut Huafeng Liu verfasserin aut Liangcheng Tu verfasserin aut In Sensors MDPI AG, 2003 17(2017), 9, p 2158 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:17 year:2017 number:9, p 2158 https://doi.org/10.3390/s17092158 kostenfrei https://doaj.org/article/beba364f62904e76bf3dd5b830275398 kostenfrei https://www.mdpi.com/1424-8220/17/9/2158 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 17 2017 9, p 2158
allfieldsGer	10.3390/s17092158 doi (DE-627)DOAJ025332872 (DE-599)DOAJbeba364f62904e76bf3dd5b830275398 DE-627 ger DE-627 rakwb eng TP1-1185 Wenjie Wu verfasserin aut High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement. capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer Chemical technology Panpan Zheng verfasserin aut Jinquan Liu verfasserin aut Zhu Li verfasserin aut Ji Fan verfasserin aut Huafeng Liu verfasserin aut Liangcheng Tu verfasserin aut In Sensors MDPI AG, 2003 17(2017), 9, p 2158 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:17 year:2017 number:9, p 2158 https://doi.org/10.3390/s17092158 kostenfrei https://doaj.org/article/beba364f62904e76bf3dd5b830275398 kostenfrei https://www.mdpi.com/1424-8220/17/9/2158 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 17 2017 9, p 2158
allfieldsSound	10.3390/s17092158 doi (DE-627)DOAJ025332872 (DE-599)DOAJbeba364f62904e76bf3dd5b830275398 DE-627 ger DE-627 rakwb eng TP1-1185 Wenjie Wu verfasserin aut High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement. capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer Chemical technology Panpan Zheng verfasserin aut Jinquan Liu verfasserin aut Zhu Li verfasserin aut Ji Fan verfasserin aut Huafeng Liu verfasserin aut Liangcheng Tu verfasserin aut In Sensors MDPI AG, 2003 17(2017), 9, p 2158 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:17 year:2017 number:9, p 2158 https://doi.org/10.3390/s17092158 kostenfrei https://doaj.org/article/beba364f62904e76bf3dd5b830275398 kostenfrei https://www.mdpi.com/1424-8220/17/9/2158 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 17 2017 9, p 2158
language	English
source	In Sensors 17(2017), 9, p 2158 volume:17 year:2017 number:9, p 2158
sourceStr	In Sensors 17(2017), 9, p 2158 volume:17 year:2017 number:9, p 2158
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topic_facet	capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer Chemical technology
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authorswithroles_txt_mv	Wenjie Wu @@aut@@ Panpan Zheng @@aut@@ Jinquan Liu @@aut@@ Zhu Li @@aut@@ Ji Fan @@aut@@ Huafeng Liu @@aut@@ Liangcheng Tu @@aut@@
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callnumber-first	T - Technology
author	Wenjie Wu
spellingShingle	Wenjie Wu misc TP1-1185 misc capacitive sensor misc area-changed misc parasitic capacitance misc fringe effect misc sensitivity improvement misc micro accelerometer misc Chemical technology High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer
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topic_title	TP1-1185 High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer capacitive sensor area-changed parasitic capacitance fringe effect sensitivity improvement micro accelerometer
topic	misc TP1-1185 misc capacitive sensor misc area-changed misc parasitic capacitance misc fringe effect misc sensitivity improvement misc micro accelerometer misc Chemical technology
topic_unstemmed	misc TP1-1185 misc capacitive sensor misc area-changed misc parasitic capacitance misc fringe effect misc sensitivity improvement misc micro accelerometer misc Chemical technology
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title	High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer
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title_sort	high-sensitivity encoder-like micro area-changed capacitive transducer for a nano-g micro accelerometer
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title_auth	High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer
abstract	Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement.
abstractGer	Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement.
abstract_unstemmed	Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement.
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title_short	High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer
url	https://doi.org/10.3390/s17092158 https://doaj.org/article/beba364f62904e76bf3dd5b830275398 https://www.mdpi.com/1424-8220/17/9/2158 https://doaj.org/toc/1424-8220
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up_date	2024-07-03T14:23:07.284Z
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High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

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