Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor

The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positionin...
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Autor*in:	Fengli Gao [verfasserIn] Xide Li [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2015

Schlagwörter:	tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response

Übergeordnetes Werk:	In: Sensors - MDPI AG, 2003, 15(2015), 9, Seite 24530-24552
Übergeordnetes Werk:	volume:15 ; year:2015 ; number:9 ; pages:24530-24552

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/s150924530

Katalog-ID:	DOAJ029875072

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allfields	10.3390/s150924530 doi (DE-627)DOAJ029875072 (DE-599)DOAJ526ad0853d934aee82bf6f1f69c89b2b DE-627 ger DE-627 rakwb eng TP1-1185 Fengli Gao verfasserin aut Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor 2015 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface. tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response Chemical technology Xide Li verfasserin aut In Sensors MDPI AG, 2003 15(2015), 9, Seite 24530-24552 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:15 year:2015 number:9 pages:24530-24552 https://doi.org/10.3390/s150924530 kostenfrei https://doaj.org/article/526ad0853d934aee82bf6f1f69c89b2b kostenfrei http://www.mdpi.com/1424-8220/15/9/24530 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2015 9 24530-24552
spelling	10.3390/s150924530 doi (DE-627)DOAJ029875072 (DE-599)DOAJ526ad0853d934aee82bf6f1f69c89b2b DE-627 ger DE-627 rakwb eng TP1-1185 Fengli Gao verfasserin aut Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor 2015 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface. tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response Chemical technology Xide Li verfasserin aut In Sensors MDPI AG, 2003 15(2015), 9, Seite 24530-24552 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:15 year:2015 number:9 pages:24530-24552 https://doi.org/10.3390/s150924530 kostenfrei https://doaj.org/article/526ad0853d934aee82bf6f1f69c89b2b kostenfrei http://www.mdpi.com/1424-8220/15/9/24530 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2015 9 24530-24552
allfields_unstemmed	10.3390/s150924530 doi (DE-627)DOAJ029875072 (DE-599)DOAJ526ad0853d934aee82bf6f1f69c89b2b DE-627 ger DE-627 rakwb eng TP1-1185 Fengli Gao verfasserin aut Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor 2015 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface. tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response Chemical technology Xide Li verfasserin aut In Sensors MDPI AG, 2003 15(2015), 9, Seite 24530-24552 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:15 year:2015 number:9 pages:24530-24552 https://doi.org/10.3390/s150924530 kostenfrei https://doaj.org/article/526ad0853d934aee82bf6f1f69c89b2b kostenfrei http://www.mdpi.com/1424-8220/15/9/24530 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2015 9 24530-24552
allfieldsGer	10.3390/s150924530 doi (DE-627)DOAJ029875072 (DE-599)DOAJ526ad0853d934aee82bf6f1f69c89b2b DE-627 ger DE-627 rakwb eng TP1-1185 Fengli Gao verfasserin aut Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor 2015 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface. tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response Chemical technology Xide Li verfasserin aut In Sensors MDPI AG, 2003 15(2015), 9, Seite 24530-24552 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:15 year:2015 number:9 pages:24530-24552 https://doi.org/10.3390/s150924530 kostenfrei https://doaj.org/article/526ad0853d934aee82bf6f1f69c89b2b kostenfrei http://www.mdpi.com/1424-8220/15/9/24530 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2015 9 24530-24552
allfieldsSound	10.3390/s150924530 doi (DE-627)DOAJ029875072 (DE-599)DOAJ526ad0853d934aee82bf6f1f69c89b2b DE-627 ger DE-627 rakwb eng TP1-1185 Fengli Gao verfasserin aut Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor 2015 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface. tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response Chemical technology Xide Li verfasserin aut In Sensors MDPI AG, 2003 15(2015), 9, Seite 24530-24552 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:15 year:2015 number:9 pages:24530-24552 https://doi.org/10.3390/s150924530 kostenfrei https://doaj.org/article/526ad0853d934aee82bf6f1f69c89b2b kostenfrei http://www.mdpi.com/1424-8220/15/9/24530 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2015 9 24530-24552
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source	In Sensors 15(2015), 9, Seite 24530-24552 volume:15 year:2015 number:9 pages:24530-24552
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topic_facet	tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response Chemical technology
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authorswithroles_txt_mv	Fengli Gao @@aut@@ Xide Li @@aut@@
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callnumber-first	T - Technology
author	Fengli Gao
spellingShingle	Fengli Gao misc TP1-1185 misc tuning fork misc scanning near-field optical microscopy misc finite element method misc force or interaction sensing harmonic response misc Chemical technology Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
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topic_title	TP1-1185 Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor tuning fork scanning near-field optical microscopy finite element method force or interaction sensing harmonic response
topic	misc TP1-1185 misc tuning fork misc scanning near-field optical microscopy misc finite element method misc force or interaction sensing harmonic response misc Chemical technology
topic_unstemmed	misc TP1-1185 misc tuning fork misc scanning near-field optical microscopy misc finite element method misc force or interaction sensing harmonic response misc Chemical technology
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title_full	Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
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title_sort	research on the sensing performance of the tuning fork-probe as a micro interaction sensor
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title_auth	Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
abstract	The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface.
abstractGer	The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface.
abstract_unstemmed	The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface.
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title_short	Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
url	https://doi.org/10.3390/s150924530 https://doaj.org/article/526ad0853d934aee82bf6f1f69c89b2b http://www.mdpi.com/1424-8220/15/9/24530 https://doaj.org/toc/1424-8220
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Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor

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