High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath refle...
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Gespeichert in:

Autor*in:	Iván Zamora [verfasserIn] Eyglis Ledesma [verfasserIn] Arantxa Uranga [verfasserIn] Núria Barniol [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2021

Schlagwörter:	immersed distance measurement multi-frequency continuous waves phase measurement PMUT time-of-flight ultrasound

Übergeordnetes Werk:	In: Sensors - MDPI AG, 2003, 21(2021), 13, p 4524
Übergeordnetes Werk:	volume:21 ; year:2021 ; number:13, p 4524

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/s21134524

Katalog-ID:	DOAJ030410797

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520			\|a Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation.
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allfields	10.3390/s21134524 doi (DE-627)DOAJ030410797 (DE-599)DOAJf93624210e41428fa20f352c4318d7e4 DE-627 ger DE-627 rakwb eng TP1-1185 Iván Zamora verfasserin aut High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. immersed distance measurement multi-frequency continuous waves phase measurement PMUT time-of-flight ultrasound Chemical technology Eyglis Ledesma verfasserin aut Arantxa Uranga verfasserin aut Núria Barniol verfasserin aut In Sensors MDPI AG, 2003 21(2021), 13, p 4524 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:21 year:2021 number:13, p 4524 https://doi.org/10.3390/s21134524 kostenfrei https://doaj.org/article/f93624210e41428fa20f352c4318d7e4 kostenfrei https://www.mdpi.com/1424-8220/21/13/4524 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 21 2021 13, p 4524
spelling	10.3390/s21134524 doi (DE-627)DOAJ030410797 (DE-599)DOAJf93624210e41428fa20f352c4318d7e4 DE-627 ger DE-627 rakwb eng TP1-1185 Iván Zamora verfasserin aut High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. immersed distance measurement multi-frequency continuous waves phase measurement PMUT time-of-flight ultrasound Chemical technology Eyglis Ledesma verfasserin aut Arantxa Uranga verfasserin aut Núria Barniol verfasserin aut In Sensors MDPI AG, 2003 21(2021), 13, p 4524 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:21 year:2021 number:13, p 4524 https://doi.org/10.3390/s21134524 kostenfrei https://doaj.org/article/f93624210e41428fa20f352c4318d7e4 kostenfrei https://www.mdpi.com/1424-8220/21/13/4524 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 21 2021 13, p 4524
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allfieldsGer	10.3390/s21134524 doi (DE-627)DOAJ030410797 (DE-599)DOAJf93624210e41428fa20f352c4318d7e4 DE-627 ger DE-627 rakwb eng TP1-1185 Iván Zamora verfasserin aut High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. immersed distance measurement multi-frequency continuous waves phase measurement PMUT time-of-flight ultrasound Chemical technology Eyglis Ledesma verfasserin aut Arantxa Uranga verfasserin aut Núria Barniol verfasserin aut In Sensors MDPI AG, 2003 21(2021), 13, p 4524 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:21 year:2021 number:13, p 4524 https://doi.org/10.3390/s21134524 kostenfrei https://doaj.org/article/f93624210e41428fa20f352c4318d7e4 kostenfrei https://www.mdpi.com/1424-8220/21/13/4524 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 21 2021 13, p 4524
allfieldsSound	10.3390/s21134524 doi (DE-627)DOAJ030410797 (DE-599)DOAJf93624210e41428fa20f352c4318d7e4 DE-627 ger DE-627 rakwb eng TP1-1185 Iván Zamora verfasserin aut High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. immersed distance measurement multi-frequency continuous waves phase measurement PMUT time-of-flight ultrasound Chemical technology Eyglis Ledesma verfasserin aut Arantxa Uranga verfasserin aut Núria Barniol verfasserin aut In Sensors MDPI AG, 2003 21(2021), 13, p 4524 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:21 year:2021 number:13, p 4524 https://doi.org/10.3390/s21134524 kostenfrei https://doaj.org/article/f93624210e41428fa20f352c4318d7e4 kostenfrei https://www.mdpi.com/1424-8220/21/13/4524 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 21 2021 13, p 4524
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source	In Sensors 21(2021), 13, p 4524 volume:21 year:2021 number:13, p 4524
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authorswithroles_txt_mv	Iván Zamora @@aut@@ Eyglis Ledesma @@aut@@ Arantxa Uranga @@aut@@ Núria Barniol @@aut@@
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callnumber-first	T - Technology
author	Iván Zamora
spellingShingle	Iván Zamora misc TP1-1185 misc immersed distance measurement misc multi-frequency continuous waves misc phase measurement misc PMUT misc time-of-flight misc ultrasound misc Chemical technology High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation
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topic_title	TP1-1185 High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation immersed distance measurement multi-frequency continuous waves phase measurement PMUT time-of-flight ultrasound
topic	misc TP1-1185 misc immersed distance measurement misc multi-frequency continuous waves misc phase measurement misc PMUT misc time-of-flight misc ultrasound misc Chemical technology
topic_unstemmed	misc TP1-1185 misc immersed distance measurement misc multi-frequency continuous waves misc phase measurement misc PMUT misc time-of-flight misc ultrasound misc Chemical technology
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title	High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation
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title_full	High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation
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author_browse	Iván Zamora Eyglis Ledesma Arantxa Uranga Núria Barniol
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title_sort	high accuracy ultrasound micro-distance measurements with pmuts under liquid operation
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title_auth	High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation
abstract	Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation.
abstractGer	Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation.
abstract_unstemmed	Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation.
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title_short	High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation
url	https://doi.org/10.3390/s21134524 https://doaj.org/article/f93624210e41428fa20f352c4318d7e4 https://www.mdpi.com/1424-8220/21/13/4524 https://doaj.org/toc/1424-8220
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author2	Eyglis Ledesma Arantxa Uranga Núria Barniol
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up_date	2024-07-03T14:51:04.251Z
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High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

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