Squared PMUT with Enhanced Pressure Sensitivities

This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be mono...
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Autor*in:	Eyglis Ledesma [verfasserIn] Iván Zamora [verfasserIn] Francesc Torres [verfasserIn] Arantxa Uranga [verfasserIn] Vassil Tzanov [verfasserIn] Nuria Barniol [verfasserIn] Eloi Marigó [verfasserIn] Mohan Soundara-Pandian [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2018

Schlagwörter:	piezoelectric micromachined ultrasonic transducer (PMUT) differential excitation transmitting sensitivity receiving sensitivity

Übergeordnetes Werk:	In: Proceedings - MDPI AG, 2018, 2(2018), 13, p 925
Übergeordnetes Werk:	volume:2 ; year:2018 ; number:13, p 925

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/proceedings2130925

Katalog-ID:	DOAJ030796423

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allfields	10.3390/proceedings2130925 doi (DE-627)DOAJ030796423 (DE-599)DOAJ4e77f9f21df04cbeaa3a816df7f58f0e DE-627 ger DE-627 rakwb eng Eyglis Ledesma verfasserin aut Squared PMUT with Enhanced Pressure Sensitivities 2018 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now. piezoelectric micromachined ultrasonic transducer (PMUT) differential excitation transmitting sensitivity receiving sensitivity General Works A Iván Zamora verfasserin aut Francesc Torres verfasserin aut Arantxa Uranga verfasserin aut Vassil Tzanov verfasserin aut Nuria Barniol verfasserin aut Eloi Marigó verfasserin aut Mohan Soundara-Pandian verfasserin aut In Proceedings MDPI AG, 2018 2(2018), 13, p 925 (DE-627)896671828 (DE-600)2904077-2 25043900 nnns volume:2 year:2018 number:13, p 925 https://doi.org/10.3390/proceedings2130925 kostenfrei https://doaj.org/article/4e77f9f21df04cbeaa3a816df7f58f0e kostenfrei https://www.mdpi.com/2504-3900/2/13/925 kostenfrei https://doaj.org/toc/2504-3900 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 2 2018 13, p 925
spelling	10.3390/proceedings2130925 doi (DE-627)DOAJ030796423 (DE-599)DOAJ4e77f9f21df04cbeaa3a816df7f58f0e DE-627 ger DE-627 rakwb eng Eyglis Ledesma verfasserin aut Squared PMUT with Enhanced Pressure Sensitivities 2018 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now. piezoelectric micromachined ultrasonic transducer (PMUT) differential excitation transmitting sensitivity receiving sensitivity General Works A Iván Zamora verfasserin aut Francesc Torres verfasserin aut Arantxa Uranga verfasserin aut Vassil Tzanov verfasserin aut Nuria Barniol verfasserin aut Eloi Marigó verfasserin aut Mohan Soundara-Pandian verfasserin aut In Proceedings MDPI AG, 2018 2(2018), 13, p 925 (DE-627)896671828 (DE-600)2904077-2 25043900 nnns volume:2 year:2018 number:13, p 925 https://doi.org/10.3390/proceedings2130925 kostenfrei https://doaj.org/article/4e77f9f21df04cbeaa3a816df7f58f0e kostenfrei https://www.mdpi.com/2504-3900/2/13/925 kostenfrei https://doaj.org/toc/2504-3900 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 2 2018 13, p 925
allfields_unstemmed	10.3390/proceedings2130925 doi (DE-627)DOAJ030796423 (DE-599)DOAJ4e77f9f21df04cbeaa3a816df7f58f0e DE-627 ger DE-627 rakwb eng Eyglis Ledesma verfasserin aut Squared PMUT with Enhanced Pressure Sensitivities 2018 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now. piezoelectric micromachined ultrasonic transducer (PMUT) differential excitation transmitting sensitivity receiving sensitivity General Works A Iván Zamora verfasserin aut Francesc Torres verfasserin aut Arantxa Uranga verfasserin aut Vassil Tzanov verfasserin aut Nuria Barniol verfasserin aut Eloi Marigó verfasserin aut Mohan Soundara-Pandian verfasserin aut In Proceedings MDPI AG, 2018 2(2018), 13, p 925 (DE-627)896671828 (DE-600)2904077-2 25043900 nnns volume:2 year:2018 number:13, p 925 https://doi.org/10.3390/proceedings2130925 kostenfrei https://doaj.org/article/4e77f9f21df04cbeaa3a816df7f58f0e kostenfrei https://www.mdpi.com/2504-3900/2/13/925 kostenfrei https://doaj.org/toc/2504-3900 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 2 2018 13, p 925
allfieldsGer	10.3390/proceedings2130925 doi (DE-627)DOAJ030796423 (DE-599)DOAJ4e77f9f21df04cbeaa3a816df7f58f0e DE-627 ger DE-627 rakwb eng Eyglis Ledesma verfasserin aut Squared PMUT with Enhanced Pressure Sensitivities 2018 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now. piezoelectric micromachined ultrasonic transducer (PMUT) differential excitation transmitting sensitivity receiving sensitivity General Works A Iván Zamora verfasserin aut Francesc Torres verfasserin aut Arantxa Uranga verfasserin aut Vassil Tzanov verfasserin aut Nuria Barniol verfasserin aut Eloi Marigó verfasserin aut Mohan Soundara-Pandian verfasserin aut In Proceedings MDPI AG, 2018 2(2018), 13, p 925 (DE-627)896671828 (DE-600)2904077-2 25043900 nnns volume:2 year:2018 number:13, p 925 https://doi.org/10.3390/proceedings2130925 kostenfrei https://doaj.org/article/4e77f9f21df04cbeaa3a816df7f58f0e kostenfrei https://www.mdpi.com/2504-3900/2/13/925 kostenfrei https://doaj.org/toc/2504-3900 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 2 2018 13, p 925
allfieldsSound	10.3390/proceedings2130925 doi (DE-627)DOAJ030796423 (DE-599)DOAJ4e77f9f21df04cbeaa3a816df7f58f0e DE-627 ger DE-627 rakwb eng Eyglis Ledesma verfasserin aut Squared PMUT with Enhanced Pressure Sensitivities 2018 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now. piezoelectric micromachined ultrasonic transducer (PMUT) differential excitation transmitting sensitivity receiving sensitivity General Works A Iván Zamora verfasserin aut Francesc Torres verfasserin aut Arantxa Uranga verfasserin aut Vassil Tzanov verfasserin aut Nuria Barniol verfasserin aut Eloi Marigó verfasserin aut Mohan Soundara-Pandian verfasserin aut In Proceedings MDPI AG, 2018 2(2018), 13, p 925 (DE-627)896671828 (DE-600)2904077-2 25043900 nnns volume:2 year:2018 number:13, p 925 https://doi.org/10.3390/proceedings2130925 kostenfrei https://doaj.org/article/4e77f9f21df04cbeaa3a816df7f58f0e kostenfrei https://www.mdpi.com/2504-3900/2/13/925 kostenfrei https://doaj.org/toc/2504-3900 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 2 2018 13, p 925
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authorswithroles_txt_mv	Eyglis Ledesma @@aut@@ Iván Zamora @@aut@@ Francesc Torres @@aut@@ Arantxa Uranga @@aut@@ Vassil Tzanov @@aut@@ Nuria Barniol @@aut@@ Eloi Marigó @@aut@@ Mohan Soundara-Pandian @@aut@@
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author	Eyglis Ledesma
spellingShingle	Eyglis Ledesma misc piezoelectric micromachined ultrasonic transducer (PMUT) misc differential excitation misc transmitting sensitivity misc receiving sensitivity misc General Works misc A Squared PMUT with Enhanced Pressure Sensitivities
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topic_title	Squared PMUT with Enhanced Pressure Sensitivities piezoelectric micromachined ultrasonic transducer (PMUT) differential excitation transmitting sensitivity receiving sensitivity
topic	misc piezoelectric micromachined ultrasonic transducer (PMUT) misc differential excitation misc transmitting sensitivity misc receiving sensitivity misc General Works misc A
topic_unstemmed	misc piezoelectric micromachined ultrasonic transducer (PMUT) misc differential excitation misc transmitting sensitivity misc receiving sensitivity misc General Works misc A
topic_browse	misc piezoelectric micromachined ultrasonic transducer (PMUT) misc differential excitation misc transmitting sensitivity misc receiving sensitivity misc General Works misc A
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title	Squared PMUT with Enhanced Pressure Sensitivities
ctrlnum	(DE-627)DOAJ030796423 (DE-599)DOAJ4e77f9f21df04cbeaa3a816df7f58f0e
title_full	Squared PMUT with Enhanced Pressure Sensitivities
author_sort	Eyglis Ledesma
journal	Proceedings
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author_browse	Eyglis Ledesma Iván Zamora Francesc Torres Arantxa Uranga Vassil Tzanov Nuria Barniol Eloi Marigó Mohan Soundara-Pandian
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format_se	Elektronische Aufsätze
author-letter	Eyglis Ledesma
doi_str_mv	10.3390/proceedings2130925
author2-role	verfasserin
title_sort	squared pmut with enhanced pressure sensitivities
title_auth	Squared PMUT with Enhanced Pressure Sensitivities
abstract	This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.
abstractGer	This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.
abstract_unstemmed	This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.
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container_issue	13, p 925
title_short	Squared PMUT with Enhanced Pressure Sensitivities
url	https://doi.org/10.3390/proceedings2130925 https://doaj.org/article/4e77f9f21df04cbeaa3a816df7f58f0e https://www.mdpi.com/2504-3900/2/13/925 https://doaj.org/toc/2504-3900
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author2	Iván Zamora Francesc Torres Arantxa Uranga Vassil Tzanov Nuria Barniol Eloi Marigó Mohan Soundara-Pandian
author2Str	Iván Zamora Francesc Torres Arantxa Uranga Vassil Tzanov Nuria Barniol Eloi Marigó Mohan Soundara-Pandian
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up_date	2024-07-03T17:01:38.634Z
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