Integrated Magnetic MEMS Relays: Status of the Technology

The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared t...
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Autor*in:	Giuseppe Schiavone [verfasserIn] Marc P. Y. Desmulliez [verfasserIn] Anthony J. Walton [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2014

Schlagwörter:	magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS)

Übergeordnetes Werk:	In: Micromachines - MDPI AG, 2010, 5(2014), 3, Seite 622-653
Übergeordnetes Werk:	volume:5 ; year:2014 ; number:3 ; pages:622-653

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/mi5030622

Katalog-ID:	DOAJ037490923

Internformat


LEADER	01000caa a22002652 4500
001	DOAJ037490923
003	DE-627
005	20230308010829.0
007	cr uuu---uuuuu
008	230227s2014 xx \|\|\|\|\|o 00\| \|\|eng c
024	7		\|a 10.3390/mi5030622 \|2 doi
035			\|a (DE-627)DOAJ037490923
035			\|a (DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
050		0	\|a TJ1-1570
100	0		\|a Giuseppe Schiavone \|e verfasserin \|4 aut
245	1	0	\|a Integrated Magnetic MEMS Relays: Status of the Technology
264		1	\|c 2014
336			\|a Text \|b txt \|2 rdacontent
337			\|a Computermedien \|b c \|2 rdamedia
338			\|a Online-Ressource \|b cr \|2 rdacarrier
520			\|a The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.
650		4	\|a magnetic MEMS (microelectromechanical systems)
650		4	\|a relays
650		4	\|a MEMS integration
650		4	\|a MEMS switches
650		4	\|a microactuators
650		4	\|a RF-MEMS (radio frequency MEMS)
653		0	\|a Mechanical engineering and machinery
700	0		\|a Marc P. Y. Desmulliez \|e verfasserin \|4 aut
700	0		\|a Anthony J. Walton \|e verfasserin \|4 aut
773	0	8	\|i In \|t Micromachines \|d MDPI AG, 2010 \|g 5(2014), 3, Seite 622-653 \|w (DE-627)665016069 \|w (DE-600)2620864-7 \|x 2072666X \|7 nnns
773	1	8	\|g volume:5 \|g year:2014 \|g number:3 \|g pages:622-653
856	4	0	\|u https://doi.org/10.3390/mi5030622 \|z kostenfrei
856	4	0	\|u https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6 \|z kostenfrei
856	4	0	\|u http://www.mdpi.com/2072-666X/5/3/622 \|z kostenfrei
856	4	2	\|u https://doaj.org/toc/2072-666X \|y Journal toc \|z kostenfrei
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_DOAJ
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_24
912			\|a GBV_ILN_39
912			\|a GBV_ILN_40
912			\|a GBV_ILN_60
912			\|a GBV_ILN_62
912			\|a GBV_ILN_63
912			\|a GBV_ILN_65
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_73
912			\|a GBV_ILN_95
912			\|a GBV_ILN_105
912			\|a GBV_ILN_110
912			\|a GBV_ILN_151
912			\|a GBV_ILN_161
912			\|a GBV_ILN_170
912			\|a GBV_ILN_213
912			\|a GBV_ILN_230
912			\|a GBV_ILN_285
912			\|a GBV_ILN_293
912			\|a GBV_ILN_370
912			\|a GBV_ILN_602
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_4012
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4112
912			\|a GBV_ILN_4125
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4249
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4322
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4324
912			\|a GBV_ILN_4325
912			\|a GBV_ILN_4335
912			\|a GBV_ILN_4338
912			\|a GBV_ILN_4367
912			\|a GBV_ILN_4700
951			\|a AR
952			\|d 5 \|j 2014 \|e 3 \|h 622-653

Indexfelder

author_variant	g s gs m p y d mpyd a j w ajw
matchkey_str	article:2072666X:2014----::nertdantceseasttsf
hierarchy_sort_str	2014
callnumber-subject-code	TJ
publishDate	2014
allfields	10.3390/mi5030622 doi (DE-627)DOAJ037490923 (DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6 DE-627 ger DE-627 rakwb eng TJ1-1570 Giuseppe Schiavone verfasserin aut Integrated Magnetic MEMS Relays: Status of the Technology 2014 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes. magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) Mechanical engineering and machinery Marc P. Y. Desmulliez verfasserin aut Anthony J. Walton verfasserin aut In Micromachines MDPI AG, 2010 5(2014), 3, Seite 622-653 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:5 year:2014 number:3 pages:622-653 https://doi.org/10.3390/mi5030622 kostenfrei https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6 kostenfrei http://www.mdpi.com/2072-666X/5/3/622 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 5 2014 3 622-653
spelling	10.3390/mi5030622 doi (DE-627)DOAJ037490923 (DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6 DE-627 ger DE-627 rakwb eng TJ1-1570 Giuseppe Schiavone verfasserin aut Integrated Magnetic MEMS Relays: Status of the Technology 2014 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes. magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) Mechanical engineering and machinery Marc P. Y. Desmulliez verfasserin aut Anthony J. Walton verfasserin aut In Micromachines MDPI AG, 2010 5(2014), 3, Seite 622-653 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:5 year:2014 number:3 pages:622-653 https://doi.org/10.3390/mi5030622 kostenfrei https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6 kostenfrei http://www.mdpi.com/2072-666X/5/3/622 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 5 2014 3 622-653
allfields_unstemmed	10.3390/mi5030622 doi (DE-627)DOAJ037490923 (DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6 DE-627 ger DE-627 rakwb eng TJ1-1570 Giuseppe Schiavone verfasserin aut Integrated Magnetic MEMS Relays: Status of the Technology 2014 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes. magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) Mechanical engineering and machinery Marc P. Y. Desmulliez verfasserin aut Anthony J. Walton verfasserin aut In Micromachines MDPI AG, 2010 5(2014), 3, Seite 622-653 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:5 year:2014 number:3 pages:622-653 https://doi.org/10.3390/mi5030622 kostenfrei https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6 kostenfrei http://www.mdpi.com/2072-666X/5/3/622 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 5 2014 3 622-653
allfieldsGer	10.3390/mi5030622 doi (DE-627)DOAJ037490923 (DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6 DE-627 ger DE-627 rakwb eng TJ1-1570 Giuseppe Schiavone verfasserin aut Integrated Magnetic MEMS Relays: Status of the Technology 2014 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes. magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) Mechanical engineering and machinery Marc P. Y. Desmulliez verfasserin aut Anthony J. Walton verfasserin aut In Micromachines MDPI AG, 2010 5(2014), 3, Seite 622-653 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:5 year:2014 number:3 pages:622-653 https://doi.org/10.3390/mi5030622 kostenfrei https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6 kostenfrei http://www.mdpi.com/2072-666X/5/3/622 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 5 2014 3 622-653
allfieldsSound	10.3390/mi5030622 doi (DE-627)DOAJ037490923 (DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6 DE-627 ger DE-627 rakwb eng TJ1-1570 Giuseppe Schiavone verfasserin aut Integrated Magnetic MEMS Relays: Status of the Technology 2014 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes. magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) Mechanical engineering and machinery Marc P. Y. Desmulliez verfasserin aut Anthony J. Walton verfasserin aut In Micromachines MDPI AG, 2010 5(2014), 3, Seite 622-653 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:5 year:2014 number:3 pages:622-653 https://doi.org/10.3390/mi5030622 kostenfrei https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6 kostenfrei http://www.mdpi.com/2072-666X/5/3/622 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 5 2014 3 622-653
language	English
source	In Micromachines 5(2014), 3, Seite 622-653 volume:5 year:2014 number:3 pages:622-653
sourceStr	In Micromachines 5(2014), 3, Seite 622-653 volume:5 year:2014 number:3 pages:622-653
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) Mechanical engineering and machinery
isfreeaccess_bool	true
container_title	Micromachines
authorswithroles_txt_mv	Giuseppe Schiavone @@aut@@ Marc P. Y. Desmulliez @@aut@@ Anthony J. Walton @@aut@@
publishDateDaySort_date	2014-01-01T00:00:00Z
hierarchy_top_id	665016069
id	DOAJ037490923
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">DOAJ037490923</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230308010829.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230227s2014 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/mi5030622</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ037490923</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ1-1570</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Giuseppe Schiavone</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Integrated Magnetic MEMS Relays: Status of the Technology</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2014</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">magnetic MEMS (microelectromechanical systems)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">relays</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS integration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS switches</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">microactuators</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">RF-MEMS (radio frequency MEMS)</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Mechanical engineering and machinery</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Marc P. Y. Desmulliez</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Anthony J. Walton</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Micromachines</subfield><subfield code="d">MDPI AG, 2010</subfield><subfield code="g">5(2014), 3, Seite 622-653</subfield><subfield code="w">(DE-627)665016069</subfield><subfield code="w">(DE-600)2620864-7</subfield><subfield code="x">2072666X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:5</subfield><subfield code="g">year:2014</subfield><subfield code="g">number:3</subfield><subfield code="g">pages:622-653</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/mi5030622</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.mdpi.com/2072-666X/5/3/622</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/2072-666X</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">5</subfield><subfield code="j">2014</subfield><subfield code="e">3</subfield><subfield code="h">622-653</subfield></datafield></record></collection>
callnumber-first	T - Technology
author	Giuseppe Schiavone
spellingShingle	Giuseppe Schiavone misc TJ1-1570 misc magnetic MEMS (microelectromechanical systems) misc relays misc MEMS integration misc MEMS switches misc microactuators misc RF-MEMS (radio frequency MEMS) misc Mechanical engineering and machinery Integrated Magnetic MEMS Relays: Status of the Technology
authorStr	Giuseppe Schiavone
ppnlink_with_tag_str_mv	@@773@@(DE-627)665016069
format	electronic Article
delete_txt_mv	keep
author_role	aut aut aut
collection	DOAJ
remote_str	true
callnumber-label	TJ1-1570
illustrated	Not Illustrated
issn	2072666X
topic_title	TJ1-1570 Integrated Magnetic MEMS Relays: Status of the Technology magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS)
topic	misc TJ1-1570 misc magnetic MEMS (microelectromechanical systems) misc relays misc MEMS integration misc MEMS switches misc microactuators misc RF-MEMS (radio frequency MEMS) misc Mechanical engineering and machinery
topic_unstemmed	misc TJ1-1570 misc magnetic MEMS (microelectromechanical systems) misc relays misc MEMS integration misc MEMS switches misc microactuators misc RF-MEMS (radio frequency MEMS) misc Mechanical engineering and machinery
topic_browse	misc TJ1-1570 misc magnetic MEMS (microelectromechanical systems) misc relays misc MEMS integration misc MEMS switches misc microactuators misc RF-MEMS (radio frequency MEMS) misc Mechanical engineering and machinery
format_facet	Elektronische Aufsätze Aufsätze Elektronische Ressource
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	cr
hierarchy_parent_title	Micromachines
hierarchy_parent_id	665016069
hierarchy_top_title	Micromachines
isfreeaccess_txt	true
familylinks_str_mv	(DE-627)665016069 (DE-600)2620864-7
title	Integrated Magnetic MEMS Relays: Status of the Technology
ctrlnum	(DE-627)DOAJ037490923 (DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6
title_full	Integrated Magnetic MEMS Relays: Status of the Technology
author_sort	Giuseppe Schiavone
journal	Micromachines
journalStr	Micromachines
callnumber-first-code	T
lang_code	eng
isOA_bool	true
recordtype	marc
publishDateSort	2014
contenttype_str_mv	txt
container_start_page	622
author_browse	Giuseppe Schiavone Marc P. Y. Desmulliez Anthony J. Walton
container_volume	5
class	TJ1-1570
format_se	Elektronische Aufsätze
author-letter	Giuseppe Schiavone
doi_str_mv	10.3390/mi5030622
author2-role	verfasserin
title_sort	integrated magnetic mems relays: status of the technology
callnumber	TJ1-1570
title_auth	Integrated Magnetic MEMS Relays: Status of the Technology
abstract	The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.
abstractGer	The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.
abstract_unstemmed	The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700
container_issue	3
title_short	Integrated Magnetic MEMS Relays: Status of the Technology
url	https://doi.org/10.3390/mi5030622 https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6 http://www.mdpi.com/2072-666X/5/3/622 https://doaj.org/toc/2072-666X
remote_bool	true
author2	Marc P. Y. Desmulliez Anthony J. Walton
author2Str	Marc P. Y. Desmulliez Anthony J. Walton
ppnlink	665016069
callnumber-subject	TJ - Mechanical Engineering and Machinery
mediatype_str_mv	c
isOA_txt	true
hochschulschrift_bool	false
doi_str	10.3390/mi5030622
callnumber-a	TJ1-1570
up_date	2024-07-04T01:24:58.642Z
_version_	1803609753407979520
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">DOAJ037490923</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230308010829.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230227s2014 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/mi5030622</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ037490923</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ1bbd51f5a50e41149d5f675f2e1944f6</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ1-1570</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Giuseppe Schiavone</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Integrated Magnetic MEMS Relays: Status of the Technology</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2014</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">magnetic MEMS (microelectromechanical systems)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">relays</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS integration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS switches</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">microactuators</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">RF-MEMS (radio frequency MEMS)</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Mechanical engineering and machinery</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Marc P. Y. Desmulliez</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Anthony J. Walton</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Micromachines</subfield><subfield code="d">MDPI AG, 2010</subfield><subfield code="g">5(2014), 3, Seite 622-653</subfield><subfield code="w">(DE-627)665016069</subfield><subfield code="w">(DE-600)2620864-7</subfield><subfield code="x">2072666X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:5</subfield><subfield code="g">year:2014</subfield><subfield code="g">number:3</subfield><subfield code="g">pages:622-653</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/mi5030622</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.mdpi.com/2072-666X/5/3/622</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/2072-666X</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">5</subfield><subfield code="j">2014</subfield><subfield code="e">3</subfield><subfield code="h">622-653</subfield></datafield></record></collection>
score	7.3993597

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