Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon

Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characterist...
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Autor*in:	Yanming Zhang [verfasserIn] Zhen Zhang [verfasserIn] Yi Zhang [verfasserIn] Denghua Liu [verfasserIn] Jie Wu [verfasserIn] Yu Huang [verfasserIn] Guojun Zhang [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2021

Schlagwörter:	Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon

Übergeordnetes Werk:	In: Journal of Advanced Research - Elsevier, 2013, 30(2021), Seite 39-51
Übergeordnetes Werk:	volume:30 ; year:2021 ; pages:39-51

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.1016/j.jare.2020.12.005

Katalog-ID:	DOAJ053059999

Internformat


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245	1	0	\|a Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
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520			\|a Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology.
650		4	\|a Laser induced plasma micro-machining (LIPMM)
650		4	\|a Surface integrity
650		4	\|a Geometrical shape
650		4	\|a Bubble behavior
650		4	\|a Magnetic field assisted technique
650		4	\|a Single-crystal silicon
653		0	\|a Medicine (General)
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700	0		\|a Yi Zhang \|e verfasserin \|4 aut
700	0		\|a Denghua Liu \|e verfasserin \|4 aut
700	0		\|a Jie Wu \|e verfasserin \|4 aut
700	0		\|a Yu Huang \|e verfasserin \|4 aut
700	0		\|a Guojun Zhang \|e verfasserin \|4 aut
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allfields	10.1016/j.jare.2020.12.005 doi (DE-627)DOAJ053059999 (DE-599)DOAJ076cb5899ad441b2b4b8271da5255470 DE-627 ger DE-627 rakwb eng R5-920 Q1-390 Yanming Zhang verfasserin aut Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology. Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon Medicine (General) Science (General) Zhen Zhang verfasserin aut Yi Zhang verfasserin aut Denghua Liu verfasserin aut Jie Wu verfasserin aut Yu Huang verfasserin aut Guojun Zhang verfasserin aut In Journal of Advanced Research Elsevier, 2013 30(2021), Seite 39-51 (DE-627)62014680X (DE-600)2541849-X 20901224 nnns volume:30 year:2021 pages:39-51 https://doi.org/10.1016/j.jare.2020.12.005 kostenfrei https://doaj.org/article/076cb5899ad441b2b4b8271da5255470 kostenfrei http://www.sciencedirect.com/science/article/pii/S2090123220302551 kostenfrei https://doaj.org/toc/2090-1232 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 AR 30 2021 39-51
spelling	10.1016/j.jare.2020.12.005 doi (DE-627)DOAJ053059999 (DE-599)DOAJ076cb5899ad441b2b4b8271da5255470 DE-627 ger DE-627 rakwb eng R5-920 Q1-390 Yanming Zhang verfasserin aut Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology. Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon Medicine (General) Science (General) Zhen Zhang verfasserin aut Yi Zhang verfasserin aut Denghua Liu verfasserin aut Jie Wu verfasserin aut Yu Huang verfasserin aut Guojun Zhang verfasserin aut In Journal of Advanced Research Elsevier, 2013 30(2021), Seite 39-51 (DE-627)62014680X (DE-600)2541849-X 20901224 nnns volume:30 year:2021 pages:39-51 https://doi.org/10.1016/j.jare.2020.12.005 kostenfrei https://doaj.org/article/076cb5899ad441b2b4b8271da5255470 kostenfrei http://www.sciencedirect.com/science/article/pii/S2090123220302551 kostenfrei https://doaj.org/toc/2090-1232 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 AR 30 2021 39-51
allfields_unstemmed	10.1016/j.jare.2020.12.005 doi (DE-627)DOAJ053059999 (DE-599)DOAJ076cb5899ad441b2b4b8271da5255470 DE-627 ger DE-627 rakwb eng R5-920 Q1-390 Yanming Zhang verfasserin aut Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology. Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon Medicine (General) Science (General) Zhen Zhang verfasserin aut Yi Zhang verfasserin aut Denghua Liu verfasserin aut Jie Wu verfasserin aut Yu Huang verfasserin aut Guojun Zhang verfasserin aut In Journal of Advanced Research Elsevier, 2013 30(2021), Seite 39-51 (DE-627)62014680X (DE-600)2541849-X 20901224 nnns volume:30 year:2021 pages:39-51 https://doi.org/10.1016/j.jare.2020.12.005 kostenfrei https://doaj.org/article/076cb5899ad441b2b4b8271da5255470 kostenfrei http://www.sciencedirect.com/science/article/pii/S2090123220302551 kostenfrei https://doaj.org/toc/2090-1232 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 AR 30 2021 39-51
allfieldsGer	10.1016/j.jare.2020.12.005 doi (DE-627)DOAJ053059999 (DE-599)DOAJ076cb5899ad441b2b4b8271da5255470 DE-627 ger DE-627 rakwb eng R5-920 Q1-390 Yanming Zhang verfasserin aut Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology. Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon Medicine (General) Science (General) Zhen Zhang verfasserin aut Yi Zhang verfasserin aut Denghua Liu verfasserin aut Jie Wu verfasserin aut Yu Huang verfasserin aut Guojun Zhang verfasserin aut In Journal of Advanced Research Elsevier, 2013 30(2021), Seite 39-51 (DE-627)62014680X (DE-600)2541849-X 20901224 nnns volume:30 year:2021 pages:39-51 https://doi.org/10.1016/j.jare.2020.12.005 kostenfrei https://doaj.org/article/076cb5899ad441b2b4b8271da5255470 kostenfrei http://www.sciencedirect.com/science/article/pii/S2090123220302551 kostenfrei https://doaj.org/toc/2090-1232 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 AR 30 2021 39-51
allfieldsSound	10.1016/j.jare.2020.12.005 doi (DE-627)DOAJ053059999 (DE-599)DOAJ076cb5899ad441b2b4b8271da5255470 DE-627 ger DE-627 rakwb eng R5-920 Q1-390 Yanming Zhang verfasserin aut Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology. Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon Medicine (General) Science (General) Zhen Zhang verfasserin aut Yi Zhang verfasserin aut Denghua Liu verfasserin aut Jie Wu verfasserin aut Yu Huang verfasserin aut Guojun Zhang verfasserin aut In Journal of Advanced Research Elsevier, 2013 30(2021), Seite 39-51 (DE-627)62014680X (DE-600)2541849-X 20901224 nnns volume:30 year:2021 pages:39-51 https://doi.org/10.1016/j.jare.2020.12.005 kostenfrei https://doaj.org/article/076cb5899ad441b2b4b8271da5255470 kostenfrei http://www.sciencedirect.com/science/article/pii/S2090123220302551 kostenfrei https://doaj.org/toc/2090-1232 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 AR 30 2021 39-51
language	English
source	In Journal of Advanced Research 30(2021), Seite 39-51 volume:30 year:2021 pages:39-51
sourceStr	In Journal of Advanced Research 30(2021), Seite 39-51 volume:30 year:2021 pages:39-51
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon Medicine (General) Science (General)
isfreeaccess_bool	true
container_title	Journal of Advanced Research
authorswithroles_txt_mv	Yanming Zhang @@aut@@ Zhen Zhang @@aut@@ Yi Zhang @@aut@@ Denghua Liu @@aut@@ Jie Wu @@aut@@ Yu Huang @@aut@@ Guojun Zhang @@aut@@
publishDateDaySort_date	2021-01-01T00:00:00Z
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id	DOAJ053059999
language_de	englisch
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callnumber-first	R - Medicine
author	Yanming Zhang
spellingShingle	Yanming Zhang misc R5-920 misc Q1-390 misc Laser induced plasma micro-machining (LIPMM) misc Surface integrity misc Geometrical shape misc Bubble behavior misc Magnetic field assisted technique misc Single-crystal silicon misc Medicine (General) misc Science (General) Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
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topic_title	R5-920 Q1-390 Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon Laser induced plasma micro-machining (LIPMM) Surface integrity Geometrical shape Bubble behavior Magnetic field assisted technique Single-crystal silicon
topic	misc R5-920 misc Q1-390 misc Laser induced plasma micro-machining (LIPMM) misc Surface integrity misc Geometrical shape misc Bubble behavior misc Magnetic field assisted technique misc Single-crystal silicon misc Medicine (General) misc Science (General)
topic_unstemmed	misc R5-920 misc Q1-390 misc Laser induced plasma micro-machining (LIPMM) misc Surface integrity misc Geometrical shape misc Bubble behavior misc Magnetic field assisted technique misc Single-crystal silicon misc Medicine (General) misc Science (General)
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title	Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
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title_full	Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
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title_sort	study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
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title_auth	Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
abstract	Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology.
abstractGer	Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology.
abstract_unstemmed	Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology.
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title_short	Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
url	https://doi.org/10.1016/j.jare.2020.12.005 https://doaj.org/article/076cb5899ad441b2b4b8271da5255470 http://www.sciencedirect.com/science/article/pii/S2090123220302551 https://doaj.org/toc/2090-1232
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Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. 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Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon

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