High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy
A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has se...
Ausführliche Beschreibung
Autor*in: |
Yiu Wai Lai, Michael Krause, Alan Savan, Sigurd Thienhaus, Nektarios Koukourakis, Martin R Hofmann and Alfred Ludwig [verfasserIn] |
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E-Artikel |
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Englisch |
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2011 |
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In: Science and Technology of Advanced Materials - Taylor & Francis Group, 2002, 12(2011), 5, p 054201 |
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Übergeordnetes Werk: |
volume:12 ; year:2011 ; number:5, p 054201 |
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Katalog-ID: |
DOAJ060200928 |
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(DE-627)DOAJ060200928 (DE-599)DOAJ9eb5839d99fe4c9e9a865ee18994fcc0 DE-627 ger DE-627 rakwb eng TA401-492 TP248.13-248.65 Yiu Wai Lai, Michael Krause, Alan Savan, Sigurd Thienhaus, Nektarios Koukourakis, Martin R Hofmann and Alfred Ludwig verfasserin aut High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. Materials of engineering and construction. Mechanics of materials Biotechnology In Science and Technology of Advanced Materials Taylor & Francis Group, 2002 12(2011), 5, p 054201 (DE-627)324530153 (DE-600)2027985-1 18785514 nnns volume:12 year:2011 number:5, p 054201 https://doaj.org/article/9eb5839d99fe4c9e9a865ee18994fcc0 kostenfrei http://iopscience.iop.org/1468-6996/12/5/054201 kostenfrei https://doaj.org/toc/1468-6996 Journal toc kostenfrei https://doaj.org/toc/1878-5514 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2811 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 12 2011 5, p 054201 |
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(DE-627)DOAJ060200928 (DE-599)DOAJ9eb5839d99fe4c9e9a865ee18994fcc0 DE-627 ger DE-627 rakwb eng TA401-492 TP248.13-248.65 Yiu Wai Lai, Michael Krause, Alan Savan, Sigurd Thienhaus, Nektarios Koukourakis, Martin R Hofmann and Alfred Ludwig verfasserin aut High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. Materials of engineering and construction. Mechanics of materials Biotechnology In Science and Technology of Advanced Materials Taylor & Francis Group, 2002 12(2011), 5, p 054201 (DE-627)324530153 (DE-600)2027985-1 18785514 nnns volume:12 year:2011 number:5, p 054201 https://doaj.org/article/9eb5839d99fe4c9e9a865ee18994fcc0 kostenfrei http://iopscience.iop.org/1468-6996/12/5/054201 kostenfrei https://doaj.org/toc/1468-6996 Journal toc kostenfrei https://doaj.org/toc/1878-5514 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2811 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 12 2011 5, p 054201 |
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(DE-627)DOAJ060200928 (DE-599)DOAJ9eb5839d99fe4c9e9a865ee18994fcc0 DE-627 ger DE-627 rakwb eng TA401-492 TP248.13-248.65 Yiu Wai Lai, Michael Krause, Alan Savan, Sigurd Thienhaus, Nektarios Koukourakis, Martin R Hofmann and Alfred Ludwig verfasserin aut High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. Materials of engineering and construction. Mechanics of materials Biotechnology In Science and Technology of Advanced Materials Taylor & Francis Group, 2002 12(2011), 5, p 054201 (DE-627)324530153 (DE-600)2027985-1 18785514 nnns volume:12 year:2011 number:5, p 054201 https://doaj.org/article/9eb5839d99fe4c9e9a865ee18994fcc0 kostenfrei http://iopscience.iop.org/1468-6996/12/5/054201 kostenfrei https://doaj.org/toc/1468-6996 Journal toc kostenfrei https://doaj.org/toc/1878-5514 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2811 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 12 2011 5, p 054201 |
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(DE-627)DOAJ060200928 (DE-599)DOAJ9eb5839d99fe4c9e9a865ee18994fcc0 DE-627 ger DE-627 rakwb eng TA401-492 TP248.13-248.65 Yiu Wai Lai, Michael Krause, Alan Savan, Sigurd Thienhaus, Nektarios Koukourakis, Martin R Hofmann and Alfred Ludwig verfasserin aut High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. Materials of engineering and construction. Mechanics of materials Biotechnology In Science and Technology of Advanced Materials Taylor & Francis Group, 2002 12(2011), 5, p 054201 (DE-627)324530153 (DE-600)2027985-1 18785514 nnns volume:12 year:2011 number:5, p 054201 https://doaj.org/article/9eb5839d99fe4c9e9a865ee18994fcc0 kostenfrei http://iopscience.iop.org/1468-6996/12/5/054201 kostenfrei https://doaj.org/toc/1468-6996 Journal toc kostenfrei https://doaj.org/toc/1878-5514 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2811 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 12 2011 5, p 054201 |
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(DE-627)DOAJ060200928 (DE-599)DOAJ9eb5839d99fe4c9e9a865ee18994fcc0 DE-627 ger DE-627 rakwb eng TA401-492 TP248.13-248.65 Yiu Wai Lai, Michael Krause, Alan Savan, Sigurd Thienhaus, Nektarios Koukourakis, Martin R Hofmann and Alfred Ludwig verfasserin aut High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. Materials of engineering and construction. Mechanics of materials Biotechnology In Science and Technology of Advanced Materials Taylor & Francis Group, 2002 12(2011), 5, p 054201 (DE-627)324530153 (DE-600)2027985-1 18785514 nnns volume:12 year:2011 number:5, p 054201 https://doaj.org/article/9eb5839d99fe4c9e9a865ee18994fcc0 kostenfrei http://iopscience.iop.org/1468-6996/12/5/054201 kostenfrei https://doaj.org/toc/1468-6996 Journal toc kostenfrei https://doaj.org/toc/1878-5514 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2811 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 12 2011 5, p 054201 |
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High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy |
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A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. |
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A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. |
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A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has several significant advantages over conventional stylus profilometry: it is contactless and fast, substrate bending is compensated, and the experimental setup is simple. Patterned films prepared by different combinatorial thin-film approaches were characterized to investigate and demonstrate this method. The results show that this technique is valuable for the quick, reliable and high-throughput determination of the film thickness distribution in combinatorial materials research. Importantly, it can also be applied to thin films that have been structured by shadow masking. |
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