Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that th...
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Autor*in:	Yusi Zhu [verfasserIn] Zhan Zhao [verfasserIn] Zhen Fang [verfasserIn] Lidong Du [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2021

Schlagwörter:	dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor

Übergeordnetes Werk:	In: Micromachines - MDPI AG, 2010, 12(2021), 11, p 1361
Übergeordnetes Werk:	volume:12 ; year:2021 ; number:11, p 1361

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/mi12111361

Katalog-ID:	DOAJ061252387

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topic_facet	dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor Mechanical engineering and machinery
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callnumber-first	T - Technology
author	Yusi Zhu
spellingShingle	Yusi Zhu misc TJ1-1570 misc dual-resonator-based (DRB) MEMS sensor misc multiple-resonator-based (MRB) MEMS sensor misc strength-coupled-resonator-based (SCRB) sensor misc wave-coupled-resonator-based (WCRB) sensor misc uncoupled-resonator-based (UCRB) sensor misc Mechanical engineering and machinery Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
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topic_title	TJ1-1570 Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor
topic	misc TJ1-1570 misc dual-resonator-based (DRB) MEMS sensor misc multiple-resonator-based (MRB) MEMS sensor misc strength-coupled-resonator-based (SCRB) sensor misc wave-coupled-resonator-based (WCRB) sensor misc uncoupled-resonator-based (UCRB) sensor misc Mechanical engineering and machinery
topic_unstemmed	misc TJ1-1570 misc dual-resonator-based (DRB) MEMS sensor misc multiple-resonator-based (MRB) MEMS sensor misc strength-coupled-resonator-based (SCRB) sensor misc wave-coupled-resonator-based (WCRB) sensor misc uncoupled-resonator-based (UCRB) sensor misc Mechanical engineering and machinery
topic_browse	misc TJ1-1570 misc dual-resonator-based (DRB) MEMS sensor misc multiple-resonator-based (MRB) MEMS sensor misc strength-coupled-resonator-based (SCRB) sensor misc wave-coupled-resonator-based (WCRB) sensor misc uncoupled-resonator-based (UCRB) sensor misc Mechanical engineering and machinery
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title	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
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title_sort	dual-resonator-based (drb) and multiple-resonator-based (mrb) mems sensors: a review
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title_auth	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
abstract	Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.
abstractGer	Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.
abstract_unstemmed	Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.
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container_issue	11, p 1361
title_short	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
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