Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that th...
Ausführliche Beschreibung
Autor*in: |
Yusi Zhu [verfasserIn] Zhan Zhao [verfasserIn] Zhen Fang [verfasserIn] Lidong Du [verfasserIn] |
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Format: |
E-Artikel |
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Sprache: |
Englisch |
Erschienen: |
2021 |
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Schlagwörter: |
dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor |
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Übergeordnetes Werk: |
In: Micromachines - MDPI AG, 2010, 12(2021), 11, p 1361 |
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Übergeordnetes Werk: |
volume:12 ; year:2021 ; number:11, p 1361 |
Links: |
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DOI / URN: |
10.3390/mi12111361 |
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Katalog-ID: |
DOAJ061252387 |
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10.3390/mi12111361 doi (DE-627)DOAJ061252387 (DE-599)DOAJ4db19c11e3df49cd9fdac18d51137273 DE-627 ger DE-627 rakwb eng TJ1-1570 Yusi Zhu verfasserin aut Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets. dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor Mechanical engineering and machinery Zhan Zhao verfasserin aut Zhen Fang verfasserin aut Lidong Du verfasserin aut In Micromachines MDPI AG, 2010 12(2021), 11, p 1361 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:12 year:2021 number:11, p 1361 https://doi.org/10.3390/mi12111361 kostenfrei https://doaj.org/article/4db19c11e3df49cd9fdac18d51137273 kostenfrei https://www.mdpi.com/2072-666X/12/11/1361 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 12 2021 11, p 1361 |
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TJ1-1570 Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor |
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Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review |
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Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets. |
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Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets. |
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Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets. |
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