Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the dia...
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Gespeichert in:

Autor*in:	Hiroshi Murakami [verfasserIn] Kosuke Uchiyama [verfasserIn] Akio Katsuki [verfasserIn] Takao Sajima [verfasserIn] Kunitaka Fujiyoshi [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2023

Schlagwörter:	microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating

Übergeordnetes Werk:	In: Applied Sciences - MDPI AG, 2012, 13(2023), 3, p 1260
Übergeordnetes Werk:	volume:13 ; year:2023 ; number:3, p 1260

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/app13031260

Katalog-ID:	DOAJ080690831

Internformat


LEADER	01000caa a22002652 4500
001	DOAJ080690831
003	DE-627
005	20240413070816.0
007	cr uuu---uuuuu
008	230310s2023 xx \|\|\|\|\|o 00\| \|\|eng c
024	7		\|a 10.3390/app13031260 \|2 doi
035			\|a (DE-627)DOAJ080690831
035			\|a (DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
050		0	\|a TA1-2040
050		0	\|a QH301-705.5
050		0	\|a QC1-999
050		0	\|a QD1-999
100	0		\|a Hiroshi Murakami \|e verfasserin \|4 aut
245	1	0	\|a Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings
264		1	\|c 2023
336			\|a Text \|b txt \|2 rdacontent
337			\|a Computermedien \|b c \|2 rdamedia
338			\|a Online-Ressource \|b cr \|2 rdacarrier
520			\|a The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.
650		4	\|a microstructure measurement
650		4	\|a optical fiber stylus
650		4	\|a surface force
650		4	\|a adherence prevention
650		4	\|a water repellent coating
650		4	\|a fluororesin coating
653		0	\|a Technology
653		0	\|a T
653		0	\|a Engineering (General). Civil engineering (General)
653		0	\|a Biology (General)
653		0	\|a Physics
653		0	\|a Chemistry
700	0		\|a Kosuke Uchiyama \|e verfasserin \|4 aut
700	0		\|a Akio Katsuki \|e verfasserin \|4 aut
700	0		\|a Takao Sajima \|e verfasserin \|4 aut
700	0		\|a Kunitaka Fujiyoshi \|e verfasserin \|4 aut
773	0	8	\|i In \|t Applied Sciences \|d MDPI AG, 2012 \|g 13(2023), 3, p 1260 \|w (DE-627)737287640 \|w (DE-600)2704225-X \|x 20763417 \|7 nnns
773	1	8	\|g volume:13 \|g year:2023 \|g number:3, p 1260
856	4	0	\|u https://doi.org/10.3390/app13031260 \|z kostenfrei
856	4	0	\|u https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb \|z kostenfrei
856	4	0	\|u https://www.mdpi.com/2076-3417/13/3/1260 \|z kostenfrei
856	4	2	\|u https://doaj.org/toc/2076-3417 \|y Journal toc \|z kostenfrei
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_DOAJ
912			\|a GBV_ILN_11
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_24
912			\|a GBV_ILN_39
912			\|a GBV_ILN_40
912			\|a GBV_ILN_60
912			\|a GBV_ILN_62
912			\|a GBV_ILN_63
912			\|a GBV_ILN_65
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_73
912			\|a GBV_ILN_95
912			\|a GBV_ILN_105
912			\|a GBV_ILN_110
912			\|a GBV_ILN_151
912			\|a GBV_ILN_161
912			\|a GBV_ILN_170
912			\|a GBV_ILN_171
912			\|a GBV_ILN_213
912			\|a GBV_ILN_230
912			\|a GBV_ILN_285
912			\|a GBV_ILN_293
912			\|a GBV_ILN_370
912			\|a GBV_ILN_602
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2055
912			\|a GBV_ILN_4012
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4112
912			\|a GBV_ILN_4125
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4249
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4322
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4324
912			\|a GBV_ILN_4325
912			\|a GBV_ILN_4335
912			\|a GBV_ILN_4338
912			\|a GBV_ILN_4367
912			\|a GBV_ILN_4700
951			\|a AR
952			\|d 13 \|j 2023 \|e 3, p 1260

Indexfelder

author_variant	h m hm k u ku a k ak t s ts k f kf
matchkey_str	article:20763417:2023----::eeomnoaihuciniesyufrirsrcueesrmnwtwtree
hierarchy_sort_str	2023
callnumber-subject-code	TA
publishDate	2023
allfields	10.3390/app13031260 doi (DE-627)DOAJ080690831 (DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb DE-627 ger DE-627 rakwb eng TA1-2040 QH301-705.5 QC1-999 QD1-999 Hiroshi Murakami verfasserin aut Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%. microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating Technology T Engineering (General). Civil engineering (General) Biology (General) Physics Chemistry Kosuke Uchiyama verfasserin aut Akio Katsuki verfasserin aut Takao Sajima verfasserin aut Kunitaka Fujiyoshi verfasserin aut In Applied Sciences MDPI AG, 2012 13(2023), 3, p 1260 (DE-627)737287640 (DE-600)2704225-X 20763417 nnns volume:13 year:2023 number:3, p 1260 https://doi.org/10.3390/app13031260 kostenfrei https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb kostenfrei https://www.mdpi.com/2076-3417/13/3/1260 kostenfrei https://doaj.org/toc/2076-3417 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2023 3, p 1260
spelling	10.3390/app13031260 doi (DE-627)DOAJ080690831 (DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb DE-627 ger DE-627 rakwb eng TA1-2040 QH301-705.5 QC1-999 QD1-999 Hiroshi Murakami verfasserin aut Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%. microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating Technology T Engineering (General). Civil engineering (General) Biology (General) Physics Chemistry Kosuke Uchiyama verfasserin aut Akio Katsuki verfasserin aut Takao Sajima verfasserin aut Kunitaka Fujiyoshi verfasserin aut In Applied Sciences MDPI AG, 2012 13(2023), 3, p 1260 (DE-627)737287640 (DE-600)2704225-X 20763417 nnns volume:13 year:2023 number:3, p 1260 https://doi.org/10.3390/app13031260 kostenfrei https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb kostenfrei https://www.mdpi.com/2076-3417/13/3/1260 kostenfrei https://doaj.org/toc/2076-3417 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2023 3, p 1260
allfields_unstemmed	10.3390/app13031260 doi (DE-627)DOAJ080690831 (DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb DE-627 ger DE-627 rakwb eng TA1-2040 QH301-705.5 QC1-999 QD1-999 Hiroshi Murakami verfasserin aut Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%. microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating Technology T Engineering (General). Civil engineering (General) Biology (General) Physics Chemistry Kosuke Uchiyama verfasserin aut Akio Katsuki verfasserin aut Takao Sajima verfasserin aut Kunitaka Fujiyoshi verfasserin aut In Applied Sciences MDPI AG, 2012 13(2023), 3, p 1260 (DE-627)737287640 (DE-600)2704225-X 20763417 nnns volume:13 year:2023 number:3, p 1260 https://doi.org/10.3390/app13031260 kostenfrei https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb kostenfrei https://www.mdpi.com/2076-3417/13/3/1260 kostenfrei https://doaj.org/toc/2076-3417 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2023 3, p 1260
allfieldsGer	10.3390/app13031260 doi (DE-627)DOAJ080690831 (DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb DE-627 ger DE-627 rakwb eng TA1-2040 QH301-705.5 QC1-999 QD1-999 Hiroshi Murakami verfasserin aut Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%. microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating Technology T Engineering (General). Civil engineering (General) Biology (General) Physics Chemistry Kosuke Uchiyama verfasserin aut Akio Katsuki verfasserin aut Takao Sajima verfasserin aut Kunitaka Fujiyoshi verfasserin aut In Applied Sciences MDPI AG, 2012 13(2023), 3, p 1260 (DE-627)737287640 (DE-600)2704225-X 20763417 nnns volume:13 year:2023 number:3, p 1260 https://doi.org/10.3390/app13031260 kostenfrei https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb kostenfrei https://www.mdpi.com/2076-3417/13/3/1260 kostenfrei https://doaj.org/toc/2076-3417 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2023 3, p 1260
allfieldsSound	10.3390/app13031260 doi (DE-627)DOAJ080690831 (DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb DE-627 ger DE-627 rakwb eng TA1-2040 QH301-705.5 QC1-999 QD1-999 Hiroshi Murakami verfasserin aut Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%. microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating Technology T Engineering (General). Civil engineering (General) Biology (General) Physics Chemistry Kosuke Uchiyama verfasserin aut Akio Katsuki verfasserin aut Takao Sajima verfasserin aut Kunitaka Fujiyoshi verfasserin aut In Applied Sciences MDPI AG, 2012 13(2023), 3, p 1260 (DE-627)737287640 (DE-600)2704225-X 20763417 nnns volume:13 year:2023 number:3, p 1260 https://doi.org/10.3390/app13031260 kostenfrei https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb kostenfrei https://www.mdpi.com/2076-3417/13/3/1260 kostenfrei https://doaj.org/toc/2076-3417 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 13 2023 3, p 1260
language	English
source	In Applied Sciences 13(2023), 3, p 1260 volume:13 year:2023 number:3, p 1260
sourceStr	In Applied Sciences 13(2023), 3, p 1260 volume:13 year:2023 number:3, p 1260
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating Technology T Engineering (General). Civil engineering (General) Biology (General) Physics Chemistry
isfreeaccess_bool	true
container_title	Applied Sciences
authorswithroles_txt_mv	Hiroshi Murakami @@aut@@ Kosuke Uchiyama @@aut@@ Akio Katsuki @@aut@@ Takao Sajima @@aut@@ Kunitaka Fujiyoshi @@aut@@
publishDateDaySort_date	2023-01-01T00:00:00Z
hierarchy_top_id	737287640
id	DOAJ080690831
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">DOAJ080690831</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240413070816.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230310s2023 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/app13031260</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ080690831</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA1-2040</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QH301-705.5</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC1-999</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QD1-999</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Hiroshi Murakami</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2023</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">microstructure measurement</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">optical fiber stylus</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">surface force</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">adherence prevention</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">water repellent coating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">fluororesin coating</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Technology</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">T</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Engineering (General). Civil engineering (General)</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Biology (General)</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Physics</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Chemistry</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Kosuke Uchiyama</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Akio Katsuki</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Takao Sajima</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Kunitaka Fujiyoshi</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Applied Sciences</subfield><subfield code="d">MDPI AG, 2012</subfield><subfield code="g">13(2023), 3, p 1260</subfield><subfield code="w">(DE-627)737287640</subfield><subfield code="w">(DE-600)2704225-X</subfield><subfield code="x">20763417</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:13</subfield><subfield code="g">year:2023</subfield><subfield code="g">number:3, p 1260</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/app13031260</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.mdpi.com/2076-3417/13/3/1260</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/2076-3417</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_171</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2055</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">13</subfield><subfield code="j">2023</subfield><subfield code="e">3, p 1260</subfield></datafield></record></collection>
callnumber-first	T - Technology
author	Hiroshi Murakami
spellingShingle	Hiroshi Murakami misc TA1-2040 misc QH301-705.5 misc QC1-999 misc QD1-999 misc microstructure measurement misc optical fiber stylus misc surface force misc adherence prevention misc water repellent coating misc fluororesin coating misc Technology misc T misc Engineering (General). Civil engineering (General) misc Biology (General) misc Physics misc Chemistry Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings
authorStr	Hiroshi Murakami
ppnlink_with_tag_str_mv	@@773@@(DE-627)737287640
format	electronic Article
delete_txt_mv	keep
author_role	aut aut aut aut aut
collection	DOAJ
remote_str	true
callnumber-label	TA1-2040
illustrated	Not Illustrated
issn	20763417
topic_title	TA1-2040 QH301-705.5 QC1-999 QD1-999 Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings microstructure measurement optical fiber stylus surface force adherence prevention water repellent coating fluororesin coating
topic	misc TA1-2040 misc QH301-705.5 misc QC1-999 misc QD1-999 misc microstructure measurement misc optical fiber stylus misc surface force misc adherence prevention misc water repellent coating misc fluororesin coating misc Technology misc T misc Engineering (General). Civil engineering (General) misc Biology (General) misc Physics misc Chemistry
topic_unstemmed	misc TA1-2040 misc QH301-705.5 misc QC1-999 misc QD1-999 misc microstructure measurement misc optical fiber stylus misc surface force misc adherence prevention misc water repellent coating misc fluororesin coating misc Technology misc T misc Engineering (General). Civil engineering (General) misc Biology (General) misc Physics misc Chemistry
topic_browse	misc TA1-2040 misc QH301-705.5 misc QC1-999 misc QD1-999 misc microstructure measurement misc optical fiber stylus misc surface force misc adherence prevention misc water repellent coating misc fluororesin coating misc Technology misc T misc Engineering (General). Civil engineering (General) misc Biology (General) misc Physics misc Chemistry
format_facet	Elektronische Aufsätze Aufsätze Elektronische Ressource
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	cr
hierarchy_parent_title	Applied Sciences
hierarchy_parent_id	737287640
hierarchy_top_title	Applied Sciences
isfreeaccess_txt	true
familylinks_str_mv	(DE-627)737287640 (DE-600)2704225-X
title	Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings
ctrlnum	(DE-627)DOAJ080690831 (DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb
title_full	Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings
author_sort	Hiroshi Murakami
journal	Applied Sciences
journalStr	Applied Sciences
callnumber-first-code	T
lang_code	eng
isOA_bool	true
recordtype	marc
publishDateSort	2023
contenttype_str_mv	txt
author_browse	Hiroshi Murakami Kosuke Uchiyama Akio Katsuki Takao Sajima Kunitaka Fujiyoshi
container_volume	13
class	TA1-2040 QH301-705.5 QC1-999 QD1-999
format_se	Elektronische Aufsätze
author-letter	Hiroshi Murakami
doi_str_mv	10.3390/app13031260
author2-role	verfasserin
title_sort	development of a high-function fiber stylus for microstructure measurement with water-repellent and antistatic coatings
callnumber	TA1-2040
title_auth	Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings
abstract	The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.
abstractGer	The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.
abstract_unstemmed	The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700
container_issue	3, p 1260
title_short	Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings
url	https://doi.org/10.3390/app13031260 https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb https://www.mdpi.com/2076-3417/13/3/1260 https://doaj.org/toc/2076-3417
remote_bool	true
author2	Kosuke Uchiyama Akio Katsuki Takao Sajima Kunitaka Fujiyoshi
author2Str	Kosuke Uchiyama Akio Katsuki Takao Sajima Kunitaka Fujiyoshi
ppnlink	737287640
callnumber-subject	TA - General and Civil Engineering
mediatype_str_mv	c
isOA_txt	true
hochschulschrift_bool	false
doi_str	10.3390/app13031260
callnumber-a	TA1-2040
up_date	2024-07-03T16:03:47.795Z
_version_	1803574446959624192
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">DOAJ080690831</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240413070816.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230310s2023 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/app13031260</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ080690831</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ87912a8b1138407f899a5bb00e0f89cb</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA1-2040</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QH301-705.5</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC1-999</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QD1-999</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Hiroshi Murakami</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2023</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">microstructure measurement</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">optical fiber stylus</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">surface force</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">adherence prevention</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">water repellent coating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">fluororesin coating</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Technology</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">T</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Engineering (General). Civil engineering (General)</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Biology (General)</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Physics</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Chemistry</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Kosuke Uchiyama</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Akio Katsuki</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Takao Sajima</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Kunitaka Fujiyoshi</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Applied Sciences</subfield><subfield code="d">MDPI AG, 2012</subfield><subfield code="g">13(2023), 3, p 1260</subfield><subfield code="w">(DE-627)737287640</subfield><subfield code="w">(DE-600)2704225-X</subfield><subfield code="x">20763417</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:13</subfield><subfield code="g">year:2023</subfield><subfield code="g">number:3, p 1260</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/app13031260</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/87912a8b1138407f899a5bb00e0f89cb</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.mdpi.com/2076-3417/13/3/1260</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/2076-3417</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_171</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2055</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">13</subfield><subfield code="j">2023</subfield><subfield code="e">3, p 1260</subfield></datafield></record></collection>
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Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

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