Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...
Ausführliche Beschreibung
Autor*in: |
Di Chang [verfasserIn] Ziqi Yin [verfasserIn] Yunke Sun [verfasserIn] Pengcheng Hu [verfasserIn] Jiubin Tan [verfasserIn] Zhigang Fan [verfasserIn] |
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E-Artikel |
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Englisch |
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2022 |
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In: Photonics - MDPI AG, 2014, 9(2022), 11, p 830 |
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Übergeordnetes Werk: |
volume:9 ; year:2022 ; number:11, p 830 |
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DOI / URN: |
10.3390/photonics9110830 |
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Katalog-ID: |
DOAJ08366999X |
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10.3390/photonics9110830 doi (DE-627)DOAJ08366999X (DE-599)DOAJdfd292cbeec04f6181cfb27ea8bdca21 DE-627 ger DE-627 rakwb eng TA1501-1820 Di Chang verfasserin aut Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. grating interferometry heterodyne interferometry displacement measurement Applied optics. Photonics Ziqi Yin verfasserin aut Yunke Sun verfasserin aut Pengcheng Hu verfasserin aut Jiubin Tan verfasserin aut Zhigang Fan verfasserin aut In Photonics MDPI AG, 2014 9(2022), 11, p 830 (DE-627)786192763 (DE-600)2770002-1 23046732 nnns volume:9 year:2022 number:11, p 830 https://doi.org/10.3390/photonics9110830 kostenfrei https://doaj.org/article/dfd292cbeec04f6181cfb27ea8bdca21 kostenfrei https://www.mdpi.com/2304-6732/9/11/830 kostenfrei https://doaj.org/toc/2304-6732 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 2022 11, p 830 |
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10.3390/photonics9110830 doi (DE-627)DOAJ08366999X (DE-599)DOAJdfd292cbeec04f6181cfb27ea8bdca21 DE-627 ger DE-627 rakwb eng TA1501-1820 Di Chang verfasserin aut Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. grating interferometry heterodyne interferometry displacement measurement Applied optics. Photonics Ziqi Yin verfasserin aut Yunke Sun verfasserin aut Pengcheng Hu verfasserin aut Jiubin Tan verfasserin aut Zhigang Fan verfasserin aut In Photonics MDPI AG, 2014 9(2022), 11, p 830 (DE-627)786192763 (DE-600)2770002-1 23046732 nnns volume:9 year:2022 number:11, p 830 https://doi.org/10.3390/photonics9110830 kostenfrei https://doaj.org/article/dfd292cbeec04f6181cfb27ea8bdca21 kostenfrei https://www.mdpi.com/2304-6732/9/11/830 kostenfrei https://doaj.org/toc/2304-6732 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 2022 11, p 830 |
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10.3390/photonics9110830 doi (DE-627)DOAJ08366999X (DE-599)DOAJdfd292cbeec04f6181cfb27ea8bdca21 DE-627 ger DE-627 rakwb eng TA1501-1820 Di Chang verfasserin aut Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. grating interferometry heterodyne interferometry displacement measurement Applied optics. Photonics Ziqi Yin verfasserin aut Yunke Sun verfasserin aut Pengcheng Hu verfasserin aut Jiubin Tan verfasserin aut Zhigang Fan verfasserin aut In Photonics MDPI AG, 2014 9(2022), 11, p 830 (DE-627)786192763 (DE-600)2770002-1 23046732 nnns volume:9 year:2022 number:11, p 830 https://doi.org/10.3390/photonics9110830 kostenfrei https://doaj.org/article/dfd292cbeec04f6181cfb27ea8bdca21 kostenfrei https://www.mdpi.com/2304-6732/9/11/830 kostenfrei https://doaj.org/toc/2304-6732 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 2022 11, p 830 |
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10.3390/photonics9110830 doi (DE-627)DOAJ08366999X (DE-599)DOAJdfd292cbeec04f6181cfb27ea8bdca21 DE-627 ger DE-627 rakwb eng TA1501-1820 Di Chang verfasserin aut Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. grating interferometry heterodyne interferometry displacement measurement Applied optics. Photonics Ziqi Yin verfasserin aut Yunke Sun verfasserin aut Pengcheng Hu verfasserin aut Jiubin Tan verfasserin aut Zhigang Fan verfasserin aut In Photonics MDPI AG, 2014 9(2022), 11, p 830 (DE-627)786192763 (DE-600)2770002-1 23046732 nnns volume:9 year:2022 number:11, p 830 https://doi.org/10.3390/photonics9110830 kostenfrei https://doaj.org/article/dfd292cbeec04f6181cfb27ea8bdca21 kostenfrei https://www.mdpi.com/2304-6732/9/11/830 kostenfrei https://doaj.org/toc/2304-6732 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 2022 11, p 830 |
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10.3390/photonics9110830 doi (DE-627)DOAJ08366999X (DE-599)DOAJdfd292cbeec04f6181cfb27ea8bdca21 DE-627 ger DE-627 rakwb eng TA1501-1820 Di Chang verfasserin aut Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. grating interferometry heterodyne interferometry displacement measurement Applied optics. Photonics Ziqi Yin verfasserin aut Yunke Sun verfasserin aut Pengcheng Hu verfasserin aut Jiubin Tan verfasserin aut Zhigang Fan verfasserin aut In Photonics MDPI AG, 2014 9(2022), 11, p 830 (DE-627)786192763 (DE-600)2770002-1 23046732 nnns volume:9 year:2022 number:11, p 830 https://doi.org/10.3390/photonics9110830 kostenfrei https://doaj.org/article/dfd292cbeec04f6181cfb27ea8bdca21 kostenfrei https://www.mdpi.com/2304-6732/9/11/830 kostenfrei https://doaj.org/toc/2304-6732 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 2022 11, p 830 |
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Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements |
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Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. |
abstractGer |
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. |
abstract_unstemmed |
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. |
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score |
7.4032135 |