On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers

This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The an...
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Autor*in:	Binh Duc Truong [verfasserIn] Cuong Phu Le [verfasserIn] Einar Halvorsen [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2019

Schlagwörter:	lateral instability MEMS electrostatic transducer static pull-in

Übergeordnetes Werk:	In: Sensors - MDPI AG, 2003, 19(2019), 17, p 3770
Übergeordnetes Werk:	volume:19 ; year:2019 ; number:17, p 3770

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/s19173770

Katalog-ID:	DOAJ086567977

Internformat


LEADER	01000naa a22002652 4500
001	DOAJ086567977
003	DE-627
005	20230311051839.0
007	cr uuu---uuuuu
008	230311s2019 xx \|\|\|\|\|o 00\| \|\|eng c
024	7		\|a 10.3390/s19173770 \|2 doi
035			\|a (DE-627)DOAJ086567977
035			\|a (DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
050		0	\|a TP1-1185
100	0		\|a Binh Duc Truong \|e verfasserin \|4 aut
245	1	0	\|a On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
264		1	\|c 2019
336			\|a Text \|b txt \|2 rdacontent
337			\|a Computermedien \|b c \|2 rdamedia
338			\|a Online-Ressource \|b cr \|2 rdacarrier
520			\|a This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.
650		4	\|a lateral instability
650		4	\|a MEMS electrostatic transducer
650		4	\|a static pull-in
653		0	\|a Chemical technology
700	0		\|a Cuong Phu Le \|e verfasserin \|4 aut
700	0		\|a Einar Halvorsen \|e verfasserin \|4 aut
773	0	8	\|i In \|t Sensors \|d MDPI AG, 2003 \|g 19(2019), 17, p 3770 \|w (DE-627)331640910 \|w (DE-600)2052857-7 \|x 14248220 \|7 nnns
773	1	8	\|g volume:19 \|g year:2019 \|g number:17, p 3770
856	4	0	\|u https://doi.org/10.3390/s19173770 \|z kostenfrei
856	4	0	\|u https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596 \|z kostenfrei
856	4	0	\|u https://www.mdpi.com/1424-8220/19/17/3770 \|z kostenfrei
856	4	2	\|u https://doaj.org/toc/1424-8220 \|y Journal toc \|z kostenfrei
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_DOAJ
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_24
912			\|a GBV_ILN_31
912			\|a GBV_ILN_39
912			\|a GBV_ILN_40
912			\|a GBV_ILN_60
912			\|a GBV_ILN_62
912			\|a GBV_ILN_63
912			\|a GBV_ILN_65
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_73
912			\|a GBV_ILN_95
912			\|a GBV_ILN_105
912			\|a GBV_ILN_110
912			\|a GBV_ILN_151
912			\|a GBV_ILN_161
912			\|a GBV_ILN_170
912			\|a GBV_ILN_206
912			\|a GBV_ILN_213
912			\|a GBV_ILN_230
912			\|a GBV_ILN_285
912			\|a GBV_ILN_293
912			\|a GBV_ILN_370
912			\|a GBV_ILN_602
912			\|a GBV_ILN_2005
912			\|a GBV_ILN_2009
912			\|a GBV_ILN_2011
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2055
912			\|a GBV_ILN_2057
912			\|a GBV_ILN_2111
912			\|a GBV_ILN_2507
912			\|a GBV_ILN_4012
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4112
912			\|a GBV_ILN_4125
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4249
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4322
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4324
912			\|a GBV_ILN_4325
912			\|a GBV_ILN_4335
912			\|a GBV_ILN_4338
912			\|a GBV_ILN_4367
912			\|a GBV_ILN_4700
951			\|a AR
952			\|d 19 \|j 2019 \|e 17, p 3770

Indexfelder

author_variant	b d t bdt c p l cpl e h eh
matchkey_str	article:14248220:2019----::nhltrlntbltaayiommcmdielc
hierarchy_sort_str	2019
callnumber-subject-code	TP
publishDate	2019
allfields	10.3390/s19173770 doi (DE-627)DOAJ086567977 (DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596 DE-627 ger DE-627 rakwb eng TP1-1185 Binh Duc Truong verfasserin aut On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers. lateral instability MEMS electrostatic transducer static pull-in Chemical technology Cuong Phu Le verfasserin aut Einar Halvorsen verfasserin aut In Sensors MDPI AG, 2003 19(2019), 17, p 3770 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:19 year:2019 number:17, p 3770 https://doi.org/10.3390/s19173770 kostenfrei https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596 kostenfrei https://www.mdpi.com/1424-8220/19/17/3770 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 19 2019 17, p 3770
spelling	10.3390/s19173770 doi (DE-627)DOAJ086567977 (DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596 DE-627 ger DE-627 rakwb eng TP1-1185 Binh Duc Truong verfasserin aut On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers. lateral instability MEMS electrostatic transducer static pull-in Chemical technology Cuong Phu Le verfasserin aut Einar Halvorsen verfasserin aut In Sensors MDPI AG, 2003 19(2019), 17, p 3770 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:19 year:2019 number:17, p 3770 https://doi.org/10.3390/s19173770 kostenfrei https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596 kostenfrei https://www.mdpi.com/1424-8220/19/17/3770 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 19 2019 17, p 3770
allfields_unstemmed	10.3390/s19173770 doi (DE-627)DOAJ086567977 (DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596 DE-627 ger DE-627 rakwb eng TP1-1185 Binh Duc Truong verfasserin aut On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers. lateral instability MEMS electrostatic transducer static pull-in Chemical technology Cuong Phu Le verfasserin aut Einar Halvorsen verfasserin aut In Sensors MDPI AG, 2003 19(2019), 17, p 3770 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:19 year:2019 number:17, p 3770 https://doi.org/10.3390/s19173770 kostenfrei https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596 kostenfrei https://www.mdpi.com/1424-8220/19/17/3770 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 19 2019 17, p 3770
allfieldsGer	10.3390/s19173770 doi (DE-627)DOAJ086567977 (DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596 DE-627 ger DE-627 rakwb eng TP1-1185 Binh Duc Truong verfasserin aut On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers. lateral instability MEMS electrostatic transducer static pull-in Chemical technology Cuong Phu Le verfasserin aut Einar Halvorsen verfasserin aut In Sensors MDPI AG, 2003 19(2019), 17, p 3770 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:19 year:2019 number:17, p 3770 https://doi.org/10.3390/s19173770 kostenfrei https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596 kostenfrei https://www.mdpi.com/1424-8220/19/17/3770 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 19 2019 17, p 3770
allfieldsSound	10.3390/s19173770 doi (DE-627)DOAJ086567977 (DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596 DE-627 ger DE-627 rakwb eng TP1-1185 Binh Duc Truong verfasserin aut On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers. lateral instability MEMS electrostatic transducer static pull-in Chemical technology Cuong Phu Le verfasserin aut Einar Halvorsen verfasserin aut In Sensors MDPI AG, 2003 19(2019), 17, p 3770 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:19 year:2019 number:17, p 3770 https://doi.org/10.3390/s19173770 kostenfrei https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596 kostenfrei https://www.mdpi.com/1424-8220/19/17/3770 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 19 2019 17, p 3770
language	English
source	In Sensors 19(2019), 17, p 3770 volume:19 year:2019 number:17, p 3770
sourceStr	In Sensors 19(2019), 17, p 3770 volume:19 year:2019 number:17, p 3770
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	lateral instability MEMS electrostatic transducer static pull-in Chemical technology
isfreeaccess_bool	true
container_title	Sensors
authorswithroles_txt_mv	Binh Duc Truong @@aut@@ Cuong Phu Le @@aut@@ Einar Halvorsen @@aut@@
publishDateDaySort_date	2019-01-01T00:00:00Z
hierarchy_top_id	331640910
id	DOAJ086567977
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000naa a22002652 4500</leader><controlfield tag="001">DOAJ086567977</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230311051839.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230311s2019 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/s19173770</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ086567977</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TP1-1185</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Binh Duc Truong</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2019</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">lateral instability</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS electrostatic transducer</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">static pull-in</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Chemical technology</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Cuong Phu Le</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Einar Halvorsen</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Sensors</subfield><subfield code="d">MDPI AG, 2003</subfield><subfield code="g">19(2019), 17, p 3770</subfield><subfield code="w">(DE-627)331640910</subfield><subfield code="w">(DE-600)2052857-7</subfield><subfield code="x">14248220</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:19</subfield><subfield code="g">year:2019</subfield><subfield code="g">number:17, p 3770</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/s19173770</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.mdpi.com/1424-8220/19/17/3770</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/1424-8220</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_206</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2009</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2011</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2055</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2057</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2507</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">19</subfield><subfield code="j">2019</subfield><subfield code="e">17, p 3770</subfield></datafield></record></collection>
callnumber-first	T - Technology
author	Binh Duc Truong
spellingShingle	Binh Duc Truong misc TP1-1185 misc lateral instability misc MEMS electrostatic transducer misc static pull-in misc Chemical technology On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
authorStr	Binh Duc Truong
ppnlink_with_tag_str_mv	@@773@@(DE-627)331640910
format	electronic Article
delete_txt_mv	keep
author_role	aut aut aut
collection	DOAJ
remote_str	true
callnumber-label	TP1-1185
illustrated	Not Illustrated
issn	14248220
topic_title	TP1-1185 On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers lateral instability MEMS electrostatic transducer static pull-in
topic	misc TP1-1185 misc lateral instability misc MEMS electrostatic transducer misc static pull-in misc Chemical technology
topic_unstemmed	misc TP1-1185 misc lateral instability misc MEMS electrostatic transducer misc static pull-in misc Chemical technology
topic_browse	misc TP1-1185 misc lateral instability misc MEMS electrostatic transducer misc static pull-in misc Chemical technology
format_facet	Elektronische Aufsätze Aufsätze Elektronische Ressource
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	cr
hierarchy_parent_title	Sensors
hierarchy_parent_id	331640910
hierarchy_top_title	Sensors
isfreeaccess_txt	true
familylinks_str_mv	(DE-627)331640910 (DE-600)2052857-7
title	On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
ctrlnum	(DE-627)DOAJ086567977 (DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596
title_full	On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
author_sort	Binh Duc Truong
journal	Sensors
journalStr	Sensors
callnumber-first-code	T
lang_code	eng
isOA_bool	true
recordtype	marc
publishDateSort	2019
contenttype_str_mv	txt
author_browse	Binh Duc Truong Cuong Phu Le Einar Halvorsen
container_volume	19
class	TP1-1185
format_se	Elektronische Aufsätze
author-letter	Binh Duc Truong
doi_str_mv	10.3390/s19173770
author2-role	verfasserin
title_sort	on the lateral instability analysis of mems comb-drive electrostatic transducers
callnumber	TP1-1185
title_auth	On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
abstract	This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.
abstractGer	This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.
abstract_unstemmed	This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700
container_issue	17, p 3770
title_short	On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
url	https://doi.org/10.3390/s19173770 https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596 https://www.mdpi.com/1424-8220/19/17/3770 https://doaj.org/toc/1424-8220
remote_bool	true
author2	Cuong Phu Le Einar Halvorsen
author2Str	Cuong Phu Le Einar Halvorsen
ppnlink	331640910
callnumber-subject	TP - Chemical Technology
mediatype_str_mv	c
isOA_txt	true
hochschulschrift_bool	false
doi_str	10.3390/s19173770
callnumber-a	TP1-1185
up_date	2024-07-03T21:27:24.332Z
_version_	1803594806679568384
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000naa a22002652 4500</leader><controlfield tag="001">DOAJ086567977</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230311051839.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230311s2019 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.3390/s19173770</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)DOAJ086567977</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DOAJ144529cc65f042b2b08b8c2a4502c596</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TP1-1185</subfield></datafield><datafield tag="100" ind1="0" ind2=" "><subfield code="a">Binh Duc Truong</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2019</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">lateral instability</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS electrostatic transducer</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">static pull-in</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Chemical technology</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Cuong Phu Le</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="0" ind2=" "><subfield code="a">Einar Halvorsen</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">In</subfield><subfield code="t">Sensors</subfield><subfield code="d">MDPI AG, 2003</subfield><subfield code="g">19(2019), 17, p 3770</subfield><subfield code="w">(DE-627)331640910</subfield><subfield code="w">(DE-600)2052857-7</subfield><subfield code="x">14248220</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:19</subfield><subfield code="g">year:2019</subfield><subfield code="g">number:17, p 3770</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.3390/s19173770</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doaj.org/article/144529cc65f042b2b08b8c2a4502c596</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.mdpi.com/1424-8220/19/17/3770</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="u">https://doaj.org/toc/1424-8220</subfield><subfield code="y">Journal toc</subfield><subfield code="z">kostenfrei</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_DOAJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_39</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_161</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_206</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_213</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_230</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_293</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2009</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2011</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2055</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2057</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2507</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4012</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4249</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4322</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4367</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">19</subfield><subfield code="j">2019</subfield><subfield code="e">17, p 3770</subfield></datafield></record></collection>
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On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers

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