Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments

Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The in...
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Gespeichert in:

Autor*in:	Xiaoyan Shen [verfasserIn] Shinan Zhou [verfasserIn] Dongsheng Li [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2021

Schlagwörter:	microdisplacement measurement Fabry–Perot etalon circular regression multichord averaging method focusing control

Übergeordnetes Werk:	In: Sensors - MDPI AG, 2003, 21(2021), 11, p 3749
Übergeordnetes Werk:	volume:21 ; year:2021 ; number:11, p 3749

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/s21113749

Katalog-ID:	DOAJ086600524

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520			\|a Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry.
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allfields	10.3390/s21113749 doi (DE-627)DOAJ086600524 (DE-599)DOAJ1d52ccc5d94c4f08b28775bb10402510 DE-627 ger DE-627 rakwb eng TP1-1185 Xiaoyan Shen verfasserin aut Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry. microdisplacement measurement Fabry–Perot etalon circular regression multichord averaging method focusing control Chemical technology Shinan Zhou verfasserin aut Dongsheng Li verfasserin aut In Sensors MDPI AG, 2003 21(2021), 11, p 3749 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:21 year:2021 number:11, p 3749 https://doi.org/10.3390/s21113749 kostenfrei https://doaj.org/article/1d52ccc5d94c4f08b28775bb10402510 kostenfrei https://www.mdpi.com/1424-8220/21/11/3749 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 21 2021 11, p 3749
spelling	10.3390/s21113749 doi (DE-627)DOAJ086600524 (DE-599)DOAJ1d52ccc5d94c4f08b28775bb10402510 DE-627 ger DE-627 rakwb eng TP1-1185 Xiaoyan Shen verfasserin aut Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry. microdisplacement measurement Fabry–Perot etalon circular regression multichord averaging method focusing control Chemical technology Shinan Zhou verfasserin aut Dongsheng Li verfasserin aut In Sensors MDPI AG, 2003 21(2021), 11, p 3749 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:21 year:2021 number:11, p 3749 https://doi.org/10.3390/s21113749 kostenfrei https://doaj.org/article/1d52ccc5d94c4f08b28775bb10402510 kostenfrei https://www.mdpi.com/1424-8220/21/11/3749 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 21 2021 11, p 3749
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allfieldsSound	10.3390/s21113749 doi (DE-627)DOAJ086600524 (DE-599)DOAJ1d52ccc5d94c4f08b28775bb10402510 DE-627 ger DE-627 rakwb eng TP1-1185 Xiaoyan Shen verfasserin aut Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry. microdisplacement measurement Fabry–Perot etalon circular regression multichord averaging method focusing control Chemical technology Shinan Zhou verfasserin aut Dongsheng Li verfasserin aut In Sensors MDPI AG, 2003 21(2021), 11, p 3749 (DE-627)331640910 (DE-600)2052857-7 14248220 nnns volume:21 year:2021 number:11, p 3749 https://doi.org/10.3390/s21113749 kostenfrei https://doaj.org/article/1d52ccc5d94c4f08b28775bb10402510 kostenfrei https://www.mdpi.com/1424-8220/21/11/3749 kostenfrei https://doaj.org/toc/1424-8220 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_206 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2005 GBV_ILN_2009 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2111 GBV_ILN_2507 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 21 2021 11, p 3749
language	English
source	In Sensors 21(2021), 11, p 3749 volume:21 year:2021 number:11, p 3749
sourceStr	In Sensors 21(2021), 11, p 3749 volume:21 year:2021 number:11, p 3749
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topic_facet	microdisplacement measurement Fabry–Perot etalon circular regression multichord averaging method focusing control Chemical technology
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authorswithroles_txt_mv	Xiaoyan Shen @@aut@@ Shinan Zhou @@aut@@ Dongsheng Li @@aut@@
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callnumber-first	T - Technology
author	Xiaoyan Shen
spellingShingle	Xiaoyan Shen misc TP1-1185 misc microdisplacement measurement misc Fabry–Perot etalon misc circular regression misc multichord averaging method misc focusing control misc Chemical technology Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments
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topic_title	TP1-1185 Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments microdisplacement measurement Fabry–Perot etalon circular regression multichord averaging method focusing control
topic	misc TP1-1185 misc microdisplacement measurement misc Fabry–Perot etalon misc circular regression misc multichord averaging method misc focusing control misc Chemical technology
topic_unstemmed	misc TP1-1185 misc microdisplacement measurement misc Fabry–Perot etalon misc circular regression misc multichord averaging method misc focusing control misc Chemical technology
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title	Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments
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title_full	Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments
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title_sort	microdisplacement measurement based on f-p etalon: processing method and experiments
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title_auth	Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments
abstract	Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry.
abstractGer	Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry.
abstract_unstemmed	Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry.
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title_short	Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments
url	https://doi.org/10.3390/s21113749 https://doaj.org/article/1d52ccc5d94c4f08b28775bb10402510 https://www.mdpi.com/1424-8220/21/11/3749 https://doaj.org/toc/1424-8220
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up_date	2024-07-03T21:39:06.633Z
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Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments

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