Micro milling of fused silica using picosecond laser shaped single crystal diamond tools

Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this pa...
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Autor*in:	Jiacheng Song [verfasserIn] Zhen Tong [verfasserIn] Zhenqiang Yao [verfasserIn] Xiangqian Jiang [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2023

Schlagwörter:	micro-milling tool picosecond laser fused silica damage layer structured surface

Übergeordnetes Werk:	In: Frontiers in Materials - Frontiers Media S.A., 2014, 10(2023)
Übergeordnetes Werk:	volume:10 ; year:2023

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3389/fmats.2023.1176545

Katalog-ID:	DOAJ090407423

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allfields	10.3389/fmats.2023.1176545 doi (DE-627)DOAJ090407423 (DE-599)DOAJ899d3c3712424bbf83fc12b945d32b16 DE-627 ger DE-627 rakwb eng Jiacheng Song verfasserin aut Micro milling of fused silica using picosecond laser shaped single crystal diamond tools 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet. micro-milling tool picosecond laser fused silica damage layer structured surface Technology T Jiacheng Song verfasserin aut Zhen Tong verfasserin aut Zhen Tong verfasserin aut Zhenqiang Yao verfasserin aut Zhenqiang Yao verfasserin aut Xiangqian Jiang verfasserin aut In Frontiers in Materials Frontiers Media S.A., 2014 10(2023) (DE-627)779920716 (DE-600)2759394-0 22968016 nnns volume:10 year:2023 https://doi.org/10.3389/fmats.2023.1176545 kostenfrei https://doaj.org/article/899d3c3712424bbf83fc12b945d32b16 kostenfrei https://www.frontiersin.org/articles/10.3389/fmats.2023.1176545/full kostenfrei https://doaj.org/toc/2296-8016 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2003 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 10 2023
spelling	10.3389/fmats.2023.1176545 doi (DE-627)DOAJ090407423 (DE-599)DOAJ899d3c3712424bbf83fc12b945d32b16 DE-627 ger DE-627 rakwb eng Jiacheng Song verfasserin aut Micro milling of fused silica using picosecond laser shaped single crystal diamond tools 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet. micro-milling tool picosecond laser fused silica damage layer structured surface Technology T Jiacheng Song verfasserin aut Zhen Tong verfasserin aut Zhen Tong verfasserin aut Zhenqiang Yao verfasserin aut Zhenqiang Yao verfasserin aut Xiangqian Jiang verfasserin aut In Frontiers in Materials Frontiers Media S.A., 2014 10(2023) (DE-627)779920716 (DE-600)2759394-0 22968016 nnns volume:10 year:2023 https://doi.org/10.3389/fmats.2023.1176545 kostenfrei https://doaj.org/article/899d3c3712424bbf83fc12b945d32b16 kostenfrei https://www.frontiersin.org/articles/10.3389/fmats.2023.1176545/full kostenfrei https://doaj.org/toc/2296-8016 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2003 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 10 2023
allfields_unstemmed	10.3389/fmats.2023.1176545 doi (DE-627)DOAJ090407423 (DE-599)DOAJ899d3c3712424bbf83fc12b945d32b16 DE-627 ger DE-627 rakwb eng Jiacheng Song verfasserin aut Micro milling of fused silica using picosecond laser shaped single crystal diamond tools 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet. micro-milling tool picosecond laser fused silica damage layer structured surface Technology T Jiacheng Song verfasserin aut Zhen Tong verfasserin aut Zhen Tong verfasserin aut Zhenqiang Yao verfasserin aut Zhenqiang Yao verfasserin aut Xiangqian Jiang verfasserin aut In Frontiers in Materials Frontiers Media S.A., 2014 10(2023) (DE-627)779920716 (DE-600)2759394-0 22968016 nnns volume:10 year:2023 https://doi.org/10.3389/fmats.2023.1176545 kostenfrei https://doaj.org/article/899d3c3712424bbf83fc12b945d32b16 kostenfrei https://www.frontiersin.org/articles/10.3389/fmats.2023.1176545/full kostenfrei https://doaj.org/toc/2296-8016 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2003 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 10 2023
allfieldsGer	10.3389/fmats.2023.1176545 doi (DE-627)DOAJ090407423 (DE-599)DOAJ899d3c3712424bbf83fc12b945d32b16 DE-627 ger DE-627 rakwb eng Jiacheng Song verfasserin aut Micro milling of fused silica using picosecond laser shaped single crystal diamond tools 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet. micro-milling tool picosecond laser fused silica damage layer structured surface Technology T Jiacheng Song verfasserin aut Zhen Tong verfasserin aut Zhen Tong verfasserin aut Zhenqiang Yao verfasserin aut Zhenqiang Yao verfasserin aut Xiangqian Jiang verfasserin aut In Frontiers in Materials Frontiers Media S.A., 2014 10(2023) (DE-627)779920716 (DE-600)2759394-0 22968016 nnns volume:10 year:2023 https://doi.org/10.3389/fmats.2023.1176545 kostenfrei https://doaj.org/article/899d3c3712424bbf83fc12b945d32b16 kostenfrei https://www.frontiersin.org/articles/10.3389/fmats.2023.1176545/full kostenfrei https://doaj.org/toc/2296-8016 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2003 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 10 2023
allfieldsSound	10.3389/fmats.2023.1176545 doi (DE-627)DOAJ090407423 (DE-599)DOAJ899d3c3712424bbf83fc12b945d32b16 DE-627 ger DE-627 rakwb eng Jiacheng Song verfasserin aut Micro milling of fused silica using picosecond laser shaped single crystal diamond tools 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet. micro-milling tool picosecond laser fused silica damage layer structured surface Technology T Jiacheng Song verfasserin aut Zhen Tong verfasserin aut Zhen Tong verfasserin aut Zhenqiang Yao verfasserin aut Zhenqiang Yao verfasserin aut Xiangqian Jiang verfasserin aut In Frontiers in Materials Frontiers Media S.A., 2014 10(2023) (DE-627)779920716 (DE-600)2759394-0 22968016 nnns volume:10 year:2023 https://doi.org/10.3389/fmats.2023.1176545 kostenfrei https://doaj.org/article/899d3c3712424bbf83fc12b945d32b16 kostenfrei https://www.frontiersin.org/articles/10.3389/fmats.2023.1176545/full kostenfrei https://doaj.org/toc/2296-8016 Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2003 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 10 2023
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topic_facet	micro-milling tool picosecond laser fused silica damage layer structured surface Technology T
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container_title	Frontiers in Materials
authorswithroles_txt_mv	Jiacheng Song @@aut@@ Zhen Tong @@aut@@ Zhenqiang Yao @@aut@@ Xiangqian Jiang @@aut@@
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However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). 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author	Jiacheng Song
spellingShingle	Jiacheng Song misc micro-milling tool misc picosecond laser misc fused silica misc damage layer misc structured surface misc Technology misc T Micro milling of fused silica using picosecond laser shaped single crystal diamond tools
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topic_title	Micro milling of fused silica using picosecond laser shaped single crystal diamond tools micro-milling tool picosecond laser fused silica damage layer structured surface
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title	Micro milling of fused silica using picosecond laser shaped single crystal diamond tools
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title_full	Micro milling of fused silica using picosecond laser shaped single crystal diamond tools
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title_sort	micro milling of fused silica using picosecond laser shaped single crystal diamond tools
title_auth	Micro milling of fused silica using picosecond laser shaped single crystal diamond tools
abstract	Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet.
abstractGer	Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet.
abstract_unstemmed	Fused silica is widely used as a material for optical lenses owing to its excellent optical properties and low thermal expansion coefficient. However, as a hard and brittle material, there is very limited option of processing technologies to machining fused silica with surface structures. In this paper, a picosecond laser based single crystal diamond tool fabrication technology is proposed to generate micro milling tools with different geometrical designs, and the tool cutting performance is experimentally tested through micro-milling of fused silica under different cutting conditions. An optimal picosecond laser processing path is proposed to inhibit the graphitization of diamond tool and improve the concentricity of tool blades, and a multi-edge milling tool with a minimum rotary diameter of 0.4 mm can be obtained. The effects of rake angle on cutting force and the degree of brittle damage on the subsurface of fused silica are studied by micro milling tests of fused silica using the laser-shaped tools. The results show that the fused silica machined by diamond milling tool with a rake angle of −30° has the best surface finish (Ra = 41.2 nm). Using this laser-machined milling tool, a plurality of micro Fresnel lenses with aperture of 1.6 mm were successfully machined on a fused silica sheet.
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title_short	Micro milling of fused silica using picosecond laser shaped single crystal diamond tools
url	https://doi.org/10.3389/fmats.2023.1176545 https://doaj.org/article/899d3c3712424bbf83fc12b945d32b16 https://www.frontiersin.org/articles/10.3389/fmats.2023.1176545/full https://doaj.org/toc/2296-8016
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Micro milling of fused silica using picosecond laser shaped single crystal diamond tools

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