A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer

Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transduc...
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Autor*in:	Tao Liu [verfasserIn] Zhihao Li [verfasserIn] Jiahuan Zhang [verfasserIn] Dongxiao Li [verfasserIn] Hanjie Dou [verfasserIn] Pengfan Wu [verfasserIn] Jiaqian Yang [verfasserIn] Wangyang Zhang [verfasserIn] Xiaojing Mu [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2023

Schlagwörter:	MEMS ultrasonic flowmeter PMUTs array PZT

Übergeordnetes Werk:	In: Micromachines - MDPI AG, 2010, 15(2023), 1, p 45
Übergeordnetes Werk:	volume:15 ; year:2023 ; number:1, p 45

Links:	Link aufrufen Link aufrufen Link aufrufen Journal toc

DOI / URN:	10.3390/mi15010045

Katalog-ID:	DOAJ096316667

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spelling	10.3390/mi15010045 doi (DE-627)DOAJ096316667 (DE-599)DOAJ6f497b85fca74079b80d0e76681f5e6e DE-627 ger DE-627 rakwb eng TJ1-1570 Tao Liu verfasserin aut A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup<2</sup<. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%. MEMS ultrasonic flowmeter PMUTs array PZT Mechanical engineering and machinery Zhihao Li verfasserin aut Jiahuan Zhang verfasserin aut Dongxiao Li verfasserin aut Hanjie Dou verfasserin aut Pengfan Wu verfasserin aut Jiaqian Yang verfasserin aut Wangyang Zhang verfasserin aut Xiaojing Mu verfasserin aut In Micromachines MDPI AG, 2010 15(2023), 1, p 45 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:15 year:2023 number:1, p 45 https://doi.org/10.3390/mi15010045 kostenfrei https://doaj.org/article/6f497b85fca74079b80d0e76681f5e6e kostenfrei https://www.mdpi.com/2072-666X/15/1/45 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2023 1, p 45
allfields_unstemmed	10.3390/mi15010045 doi (DE-627)DOAJ096316667 (DE-599)DOAJ6f497b85fca74079b80d0e76681f5e6e DE-627 ger DE-627 rakwb eng TJ1-1570 Tao Liu verfasserin aut A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup<2</sup<. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%. MEMS ultrasonic flowmeter PMUTs array PZT Mechanical engineering and machinery Zhihao Li verfasserin aut Jiahuan Zhang verfasserin aut Dongxiao Li verfasserin aut Hanjie Dou verfasserin aut Pengfan Wu verfasserin aut Jiaqian Yang verfasserin aut Wangyang Zhang verfasserin aut Xiaojing Mu verfasserin aut In Micromachines MDPI AG, 2010 15(2023), 1, p 45 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:15 year:2023 number:1, p 45 https://doi.org/10.3390/mi15010045 kostenfrei https://doaj.org/article/6f497b85fca74079b80d0e76681f5e6e kostenfrei https://www.mdpi.com/2072-666X/15/1/45 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2023 1, p 45
allfieldsGer	10.3390/mi15010045 doi (DE-627)DOAJ096316667 (DE-599)DOAJ6f497b85fca74079b80d0e76681f5e6e DE-627 ger DE-627 rakwb eng TJ1-1570 Tao Liu verfasserin aut A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup<2</sup<. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%. MEMS ultrasonic flowmeter PMUTs array PZT Mechanical engineering and machinery Zhihao Li verfasserin aut Jiahuan Zhang verfasserin aut Dongxiao Li verfasserin aut Hanjie Dou verfasserin aut Pengfan Wu verfasserin aut Jiaqian Yang verfasserin aut Wangyang Zhang verfasserin aut Xiaojing Mu verfasserin aut In Micromachines MDPI AG, 2010 15(2023), 1, p 45 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:15 year:2023 number:1, p 45 https://doi.org/10.3390/mi15010045 kostenfrei https://doaj.org/article/6f497b85fca74079b80d0e76681f5e6e kostenfrei https://www.mdpi.com/2072-666X/15/1/45 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2023 1, p 45
allfieldsSound	10.3390/mi15010045 doi (DE-627)DOAJ096316667 (DE-599)DOAJ6f497b85fca74079b80d0e76681f5e6e DE-627 ger DE-627 rakwb eng TJ1-1570 Tao Liu verfasserin aut A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer 2023 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup<2</sup<. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%. MEMS ultrasonic flowmeter PMUTs array PZT Mechanical engineering and machinery Zhihao Li verfasserin aut Jiahuan Zhang verfasserin aut Dongxiao Li verfasserin aut Hanjie Dou verfasserin aut Pengfan Wu verfasserin aut Jiaqian Yang verfasserin aut Wangyang Zhang verfasserin aut Xiaojing Mu verfasserin aut In Micromachines MDPI AG, 2010 15(2023), 1, p 45 (DE-627)665016069 (DE-600)2620864-7 2072666X nnns volume:15 year:2023 number:1, p 45 https://doi.org/10.3390/mi15010045 kostenfrei https://doaj.org/article/6f497b85fca74079b80d0e76681f5e6e kostenfrei https://www.mdpi.com/2072-666X/15/1/45 kostenfrei https://doaj.org/toc/2072-666X Journal toc kostenfrei GBV_USEFLAG_A SYSFLAG_A GBV_DOAJ GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 15 2023 1, p 45
language	English
source	In Micromachines 15(2023), 1, p 45 volume:15 year:2023 number:1, p 45
sourceStr	In Micromachines 15(2023), 1, p 45 volume:15 year:2023 number:1, p 45
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	MEMS ultrasonic flowmeter PMUTs array PZT Mechanical engineering and machinery
isfreeaccess_bool	true
container_title	Micromachines
authorswithroles_txt_mv	Tao Liu @@aut@@ Zhihao Li @@aut@@ Jiahuan Zhang @@aut@@ Dongxiao Li @@aut@@ Hanjie Dou @@aut@@ Pengfan Wu @@aut@@ Jiaqian Yang @@aut@@ Wangyang Zhang @@aut@@ Xiaojing Mu @@aut@@
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callnumber-first	T - Technology
author	Tao Liu
spellingShingle	Tao Liu misc TJ1-1570 misc MEMS misc ultrasonic flowmeter misc PMUTs array misc PZT misc Mechanical engineering and machinery A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
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topic_title	TJ1-1570 A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer MEMS ultrasonic flowmeter PMUTs array PZT
topic	misc TJ1-1570 misc MEMS misc ultrasonic flowmeter misc PMUTs array misc PZT misc Mechanical engineering and machinery
topic_unstemmed	misc TJ1-1570 misc MEMS misc ultrasonic flowmeter misc PMUTs array misc PZT misc Mechanical engineering and machinery
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title	A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
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title_full	A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
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author_browse	Tao Liu Zhihao Li Jiahuan Zhang Dongxiao Li Hanjie Dou Pengfan Wu Jiaqian Yang Wangyang Zhang Xiaojing Mu
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title_sort	gas flow measurement system based on lead zirconate titanate piezoelectric micromachined ultrasonic transducer
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title_auth	A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
abstract	Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup<2</sup<. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%.
abstractGer	Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup<2</sup<. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%.
abstract_unstemmed	Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup<2</sup<. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%.
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container_issue	1, p 45
title_short	A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
url	https://doi.org/10.3390/mi15010045 https://doaj.org/article/6f497b85fca74079b80d0e76681f5e6e https://www.mdpi.com/2072-666X/15/1/45 https://doaj.org/toc/2072-666X
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author2	Zhihao Li Jiahuan Zhang Dongxiao Li Hanjie Dou Pengfan Wu Jiaqian Yang Wangyang Zhang Xiaojing Mu
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