Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering
The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. T...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Viskupová, K. [verfasserIn] Grančič, B. [verfasserIn] Roch, T. [verfasserIn] Satrapinskyy, L. [verfasserIn] Truchlý, M. [verfasserIn] Mikula, M. [verfasserIn] Šroba, V. [verfasserIn] Ďurina, P. [verfasserIn] Kúš, P. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2021 |
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| Schlagwörter: |
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| Übergeordnetes Werk: |
Enthalten in: Surface and coatings technology - Amsterdam [u.a.] : Elsevier Science, 1986, 421 |
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| Übergeordnetes Werk: |
volume:421 |
| DOI / URN: |
10.1016/j.surfcoat.2021.127463 |
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| Katalog-ID: |
ELV006389422 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | ELV006389422 | ||
| 003 | DE-627 | ||
| 005 | 20230524150632.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 230505s2021 xx |||||o 00| ||eng c | ||
| 024 | 7 | |a 10.1016/j.surfcoat.2021.127463 |2 doi | |
| 035 | |a (DE-627)ELV006389422 | ||
| 035 | |a (ELSEVIER)S0257-8972(21)00637-X | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rda | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 620 |a 670 |q DE-600 |
| 084 | |a 52.78 |2 bkl | ||
| 084 | |a 51.20 |2 bkl | ||
| 100 | 1 | |a Viskupová, K. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering |
| 264 | 1 | |c 2021 | |
| 336 | |a nicht spezifiziert |b zzz |2 rdacontent | ||
| 337 | |a Computermedien |b c |2 rdamedia | ||
| 338 | |a Online-Ressource |b cr |2 rdacarrier | ||
| 520 | |a The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. | ||
| 650 | 4 | |a Transition metal diboride | |
| 650 | 4 | |a Boron-to-metal ratio | |
| 650 | 4 | |a Hard coating | |
| 650 | 4 | |a Toughness | |
| 650 | 4 | |a Nanostructure | |
| 700 | 1 | |a Grančič, B. |e verfasserin |4 aut | |
| 700 | 1 | |a Roch, T. |e verfasserin |4 aut | |
| 700 | 1 | |a Satrapinskyy, L. |e verfasserin |4 aut | |
| 700 | 1 | |a Truchlý, M. |e verfasserin |4 aut | |
| 700 | 1 | |a Mikula, M. |e verfasserin |4 aut | |
| 700 | 1 | |a Šroba, V. |e verfasserin |4 aut | |
| 700 | 1 | |a Ďurina, P. |e verfasserin |4 aut | |
| 700 | 1 | |a Kúš, P. |e verfasserin |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Surface and coatings technology |d Amsterdam [u.a.] : Elsevier Science, 1986 |g 421 |h Online-Ressource |w (DE-627)308447522 |w (DE-600)1502240-7 |w (DE-576)098474049 |x 0257-8972 |7 nnns |
| 773 | 1 | 8 | |g volume:421 |
| 912 | |a GBV_USEFLAG_U | ||
| 912 | |a SYSFLAG_U | ||
| 912 | |a GBV_ELV | ||
| 912 | |a GBV_ILN_20 | ||
| 912 | |a GBV_ILN_22 | ||
| 912 | |a GBV_ILN_23 | ||
| 912 | |a GBV_ILN_24 | ||
| 912 | |a GBV_ILN_31 | ||
| 912 | |a GBV_ILN_32 | ||
| 912 | |a GBV_ILN_40 | ||
| 912 | |a GBV_ILN_60 | ||
| 912 | |a GBV_ILN_62 | ||
| 912 | |a GBV_ILN_63 | ||
| 912 | |a GBV_ILN_65 | ||
| 912 | |a GBV_ILN_69 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_73 | ||
| 912 | |a GBV_ILN_74 | ||
| 912 | |a GBV_ILN_90 | ||
| 912 | |a GBV_ILN_95 | ||
| 912 | |a GBV_ILN_100 | ||
| 912 | |a GBV_ILN_105 | ||
| 912 | |a GBV_ILN_110 | ||
| 912 | |a GBV_ILN_150 | ||
| 912 | |a GBV_ILN_151 | ||
| 912 | |a GBV_ILN_224 | ||
| 912 | |a GBV_ILN_370 | ||
| 912 | |a GBV_ILN_602 | ||
| 912 | |a GBV_ILN_702 | ||
| 912 | |a GBV_ILN_2003 | ||
| 912 | |a GBV_ILN_2004 | ||
| 912 | |a GBV_ILN_2005 | ||
| 912 | |a GBV_ILN_2011 | ||
| 912 | |a GBV_ILN_2014 | ||
| 912 | |a GBV_ILN_2015 | ||
| 912 | |a GBV_ILN_2020 | ||
| 912 | |a GBV_ILN_2021 | ||
| 912 | |a GBV_ILN_2025 | ||
| 912 | |a GBV_ILN_2027 | ||
| 912 | |a GBV_ILN_2034 | ||
| 912 | |a GBV_ILN_2038 | ||
| 912 | |a GBV_ILN_2044 | ||
| 912 | |a GBV_ILN_2048 | ||
| 912 | |a GBV_ILN_2049 | ||
| 912 | |a GBV_ILN_2050 | ||
| 912 | |a GBV_ILN_2056 | ||
| 912 | |a GBV_ILN_2059 | ||
| 912 | |a GBV_ILN_2061 | ||
| 912 | |a GBV_ILN_2064 | ||
| 912 | |a GBV_ILN_2065 | ||
| 912 | |a GBV_ILN_2068 | ||
| 912 | |a GBV_ILN_2111 | ||
| 912 | |a GBV_ILN_2112 | ||
| 912 | |a GBV_ILN_2113 | ||
| 912 | |a GBV_ILN_2118 | ||
| 912 | |a GBV_ILN_2122 | ||
| 912 | |a GBV_ILN_2129 | ||
| 912 | |a GBV_ILN_2143 | ||
| 912 | |a GBV_ILN_2147 | ||
| 912 | |a GBV_ILN_2148 | ||
| 912 | |a GBV_ILN_2152 | ||
| 912 | |a GBV_ILN_2153 | ||
| 912 | |a GBV_ILN_2190 | ||
| 912 | |a GBV_ILN_2336 | ||
| 912 | |a GBV_ILN_2507 | ||
| 912 | |a GBV_ILN_2522 | ||
| 912 | |a GBV_ILN_4035 | ||
| 912 | |a GBV_ILN_4037 | ||
| 912 | |a GBV_ILN_4112 | ||
| 912 | |a GBV_ILN_4125 | ||
| 912 | |a GBV_ILN_4126 | ||
| 912 | |a GBV_ILN_4242 | ||
| 912 | |a GBV_ILN_4251 | ||
| 912 | |a GBV_ILN_4305 | ||
| 912 | |a GBV_ILN_4313 | ||
| 912 | |a GBV_ILN_4323 | ||
| 912 | |a GBV_ILN_4324 | ||
| 912 | |a GBV_ILN_4326 | ||
| 912 | |a GBV_ILN_4333 | ||
| 912 | |a GBV_ILN_4334 | ||
| 912 | |a GBV_ILN_4335 | ||
| 912 | |a GBV_ILN_4338 | ||
| 912 | |a GBV_ILN_4393 | ||
| 936 | b | k | |a 52.78 |j Oberflächentechnik |j Wärmebehandlung |
| 936 | b | k | |a 51.20 |j Werkstoffoberflächeneigenschaften |
| 951 | |a AR | ||
| 952 | |d 421 | ||
| author_variant |
k v kv b g bg t r tr l s ls m t mt m m mm v š vš p ď pď p k pk |
|---|---|
| matchkey_str |
article:02578972:2021----::fetfelceanurlotnaudbrdcaigpeaebdrc |
| hierarchy_sort_str |
2021 |
| bklnumber |
52.78 51.20 |
| publishDate |
2021 |
| allfields |
10.1016/j.surfcoat.2021.127463 doi (DE-627)ELV006389422 (ELSEVIER)S0257-8972(21)00637-X DE-627 ger DE-627 rda eng 620 670 DE-600 52.78 bkl 51.20 bkl Viskupová, K. verfasserin aut Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering 2021 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. Transition metal diboride Boron-to-metal ratio Hard coating Toughness Nanostructure Grančič, B. verfasserin aut Roch, T. verfasserin aut Satrapinskyy, L. verfasserin aut Truchlý, M. verfasserin aut Mikula, M. verfasserin aut Šroba, V. verfasserin aut Ďurina, P. verfasserin aut Kúš, P. verfasserin aut Enthalten in Surface and coatings technology Amsterdam [u.a.] : Elsevier Science, 1986 421 Online-Ressource (DE-627)308447522 (DE-600)1502240-7 (DE-576)098474049 0257-8972 nnns volume:421 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 52.78 Oberflächentechnik Wärmebehandlung 51.20 Werkstoffoberflächeneigenschaften AR 421 |
| spelling |
10.1016/j.surfcoat.2021.127463 doi (DE-627)ELV006389422 (ELSEVIER)S0257-8972(21)00637-X DE-627 ger DE-627 rda eng 620 670 DE-600 52.78 bkl 51.20 bkl Viskupová, K. verfasserin aut Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering 2021 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. Transition metal diboride Boron-to-metal ratio Hard coating Toughness Nanostructure Grančič, B. verfasserin aut Roch, T. verfasserin aut Satrapinskyy, L. verfasserin aut Truchlý, M. verfasserin aut Mikula, M. verfasserin aut Šroba, V. verfasserin aut Ďurina, P. verfasserin aut Kúš, P. verfasserin aut Enthalten in Surface and coatings technology Amsterdam [u.a.] : Elsevier Science, 1986 421 Online-Ressource (DE-627)308447522 (DE-600)1502240-7 (DE-576)098474049 0257-8972 nnns volume:421 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 52.78 Oberflächentechnik Wärmebehandlung 51.20 Werkstoffoberflächeneigenschaften AR 421 |
| allfields_unstemmed |
10.1016/j.surfcoat.2021.127463 doi (DE-627)ELV006389422 (ELSEVIER)S0257-8972(21)00637-X DE-627 ger DE-627 rda eng 620 670 DE-600 52.78 bkl 51.20 bkl Viskupová, K. verfasserin aut Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering 2021 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. Transition metal diboride Boron-to-metal ratio Hard coating Toughness Nanostructure Grančič, B. verfasserin aut Roch, T. verfasserin aut Satrapinskyy, L. verfasserin aut Truchlý, M. verfasserin aut Mikula, M. verfasserin aut Šroba, V. verfasserin aut Ďurina, P. verfasserin aut Kúš, P. verfasserin aut Enthalten in Surface and coatings technology Amsterdam [u.a.] : Elsevier Science, 1986 421 Online-Ressource (DE-627)308447522 (DE-600)1502240-7 (DE-576)098474049 0257-8972 nnns volume:421 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 52.78 Oberflächentechnik Wärmebehandlung 51.20 Werkstoffoberflächeneigenschaften AR 421 |
| allfieldsGer |
10.1016/j.surfcoat.2021.127463 doi (DE-627)ELV006389422 (ELSEVIER)S0257-8972(21)00637-X DE-627 ger DE-627 rda eng 620 670 DE-600 52.78 bkl 51.20 bkl Viskupová, K. verfasserin aut Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering 2021 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. Transition metal diboride Boron-to-metal ratio Hard coating Toughness Nanostructure Grančič, B. verfasserin aut Roch, T. verfasserin aut Satrapinskyy, L. verfasserin aut Truchlý, M. verfasserin aut Mikula, M. verfasserin aut Šroba, V. verfasserin aut Ďurina, P. verfasserin aut Kúš, P. verfasserin aut Enthalten in Surface and coatings technology Amsterdam [u.a.] : Elsevier Science, 1986 421 Online-Ressource (DE-627)308447522 (DE-600)1502240-7 (DE-576)098474049 0257-8972 nnns volume:421 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 52.78 Oberflächentechnik Wärmebehandlung 51.20 Werkstoffoberflächeneigenschaften AR 421 |
| allfieldsSound |
10.1016/j.surfcoat.2021.127463 doi (DE-627)ELV006389422 (ELSEVIER)S0257-8972(21)00637-X DE-627 ger DE-627 rda eng 620 670 DE-600 52.78 bkl 51.20 bkl Viskupová, K. verfasserin aut Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering 2021 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. Transition metal diboride Boron-to-metal ratio Hard coating Toughness Nanostructure Grančič, B. verfasserin aut Roch, T. verfasserin aut Satrapinskyy, L. verfasserin aut Truchlý, M. verfasserin aut Mikula, M. verfasserin aut Šroba, V. verfasserin aut Ďurina, P. verfasserin aut Kúš, P. verfasserin aut Enthalten in Surface and coatings technology Amsterdam [u.a.] : Elsevier Science, 1986 421 Online-Ressource (DE-627)308447522 (DE-600)1502240-7 (DE-576)098474049 0257-8972 nnns volume:421 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 52.78 Oberflächentechnik Wärmebehandlung 51.20 Werkstoffoberflächeneigenschaften AR 421 |
| language |
English |
| source |
Enthalten in Surface and coatings technology 421 volume:421 |
| sourceStr |
Enthalten in Surface and coatings technology 421 volume:421 |
| format_phy_str_mv |
Article |
| bklname |
Oberflächentechnik Wärmebehandlung Werkstoffoberflächeneigenschaften |
| institution |
findex.gbv.de |
| topic_facet |
Transition metal diboride Boron-to-metal ratio Hard coating Toughness Nanostructure |
| dewey-raw |
620 |
| isfreeaccess_bool |
false |
| container_title |
Surface and coatings technology |
| authorswithroles_txt_mv |
Viskupová, K. @@aut@@ Grančič, B. @@aut@@ Roch, T. @@aut@@ Satrapinskyy, L. @@aut@@ Truchlý, M. @@aut@@ Mikula, M. @@aut@@ Šroba, V. @@aut@@ Ďurina, P. @@aut@@ Kúš, P. @@aut@@ |
| publishDateDaySort_date |
2021-01-01T00:00:00Z |
| hierarchy_top_id |
308447522 |
| dewey-sort |
3620 |
| id |
ELV006389422 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV006389422</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230524150632.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230505s2021 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.surfcoat.2021.127463</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV006389422</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S0257-8972(21)00637-X</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="a">670</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">52.78</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">51.20</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Viskupová, K.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2021</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Transition metal diboride</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Boron-to-metal ratio</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Hard coating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Toughness</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructure</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Grančič, B.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Roch, T.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Satrapinskyy, L.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Truchlý, M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mikula, M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Šroba, V.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ďurina, P.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kúš, P.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Surface and coatings technology</subfield><subfield code="d">Amsterdam [u.a.] : Elsevier Science, 1986</subfield><subfield code="g">421</subfield><subfield code="h">Online-Ressource</subfield><subfield code="w">(DE-627)308447522</subfield><subfield code="w">(DE-600)1502240-7</subfield><subfield code="w">(DE-576)098474049</subfield><subfield code="x">0257-8972</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:421</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_74</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_90</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_224</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_702</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2003</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2011</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2025</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2034</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2038</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2044</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2049</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2050</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2056</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2059</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2061</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2064</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2065</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2068</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2113</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2118</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2122</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2129</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2143</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2147</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2148</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2152</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2153</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2190</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2336</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2507</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2522</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4242</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4251</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4326</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4333</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4334</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4393</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">52.78</subfield><subfield code="j">Oberflächentechnik</subfield><subfield code="j">Wärmebehandlung</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">51.20</subfield><subfield code="j">Werkstoffoberflächeneigenschaften</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">421</subfield></datafield></record></collection>
|
| author |
Viskupová, K. |
| spellingShingle |
Viskupová, K. ddc 620 bkl 52.78 bkl 51.20 misc Transition metal diboride misc Boron-to-metal ratio misc Hard coating misc Toughness misc Nanostructure Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering |
| authorStr |
Viskupová, K. |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)308447522 |
| format |
electronic Article |
| dewey-ones |
620 - Engineering & allied operations 670 - Manufacturing |
| delete_txt_mv |
keep |
| author_role |
aut aut aut aut aut aut aut aut aut |
| collection |
elsevier |
| remote_str |
true |
| illustrated |
Not Illustrated |
| issn |
0257-8972 |
| topic_title |
620 670 DE-600 52.78 bkl 51.20 bkl Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering Transition metal diboride Boron-to-metal ratio Hard coating Toughness Nanostructure |
| topic |
ddc 620 bkl 52.78 bkl 51.20 misc Transition metal diboride misc Boron-to-metal ratio misc Hard coating misc Toughness misc Nanostructure |
| topic_unstemmed |
ddc 620 bkl 52.78 bkl 51.20 misc Transition metal diboride misc Boron-to-metal ratio misc Hard coating misc Toughness misc Nanostructure |
| topic_browse |
ddc 620 bkl 52.78 bkl 51.20 misc Transition metal diboride misc Boron-to-metal ratio misc Hard coating misc Toughness misc Nanostructure |
| format_facet |
Elektronische Aufsätze Aufsätze Elektronische Ressource |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
cr |
| hierarchy_parent_title |
Surface and coatings technology |
| hierarchy_parent_id |
308447522 |
| dewey-tens |
620 - Engineering 670 - Manufacturing |
| hierarchy_top_title |
Surface and coatings technology |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)308447522 (DE-600)1502240-7 (DE-576)098474049 |
| title |
Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering |
| ctrlnum |
(DE-627)ELV006389422 (ELSEVIER)S0257-8972(21)00637-X |
| title_full |
Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering |
| author_sort |
Viskupová, K. |
| journal |
Surface and coatings technology |
| journalStr |
Surface and coatings technology |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
600 - Technology |
| recordtype |
marc |
| publishDateSort |
2021 |
| contenttype_str_mv |
zzz |
| author_browse |
Viskupová, K. Grančič, B. Roch, T. Satrapinskyy, L. Truchlý, M. Mikula, M. Šroba, V. Ďurina, P. Kúš, P. |
| container_volume |
421 |
| class |
620 670 DE-600 52.78 bkl 51.20 bkl |
| format_se |
Elektronische Aufsätze |
| author-letter |
Viskupová, K. |
| doi_str_mv |
10.1016/j.surfcoat.2021.127463 |
| dewey-full |
620 670 |
| author2-role |
verfasserin |
| title_sort |
effect of reflected ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering |
| title_auth |
Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering |
| abstract |
The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. |
| abstractGer |
The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. |
| abstract_unstemmed |
The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility. |
| collection_details |
GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 |
| title_short |
Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering |
| remote_bool |
true |
| author2 |
Grančič, B. Roch, T. Satrapinskyy, L. Truchlý, M. Mikula, M. Šroba, V. Ďurina, P. Kúš, P. |
| author2Str |
Grančič, B. Roch, T. Satrapinskyy, L. Truchlý, M. Mikula, M. Šroba, V. Ďurina, P. Kúš, P. |
| ppnlink |
308447522 |
| mediatype_str_mv |
c |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1016/j.surfcoat.2021.127463 |
| up_date |
2024-07-06T21:12:54.713Z |
| _version_ |
1803865685717155840 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV006389422</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230524150632.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230505s2021 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.surfcoat.2021.127463</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV006389422</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S0257-8972(21)00637-X</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="a">670</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">52.78</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">51.20</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Viskupová, K.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2021</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The magnetron sputtered tantalum diboride (TaBy) coatings from stoichiometric TaB2 target are often reported to be deposited in broad B/Ta interval with diverse structure and mechanical properties. In this article, the effect of Ar neutrals reflected from TaB2 target on the B/Ta ratio is examined. Two targets with different thickness are used to influence the current-voltage characteristic of the discharge and the energy of reflected Ar neutrals. In addition, external magnetic field from Helmholtz coils is applied to influence the plasma density in the substrate region. It is demonstrated that the reflected Ar neutrals have a significant effect on B/Ta ratio reduction from 1.9 to 1.4. While decreasing the B/Ta ratio, preferred TaBy crystal orientation changes from (0001) to ( 10 1 ¯ 1 ) . Intense Ar bombardment results in loss of crystallinity exemplified by diffraction maxima broadening. The variation of B/Ta ratio is accompanied by change of hardness and Young's modulus in range from 48 GPa to 32 GPa and from 532 GPa to 390 GPa, respectively. The coatings with B/Ta ratio < 1.6 show material pile-up around cube-corner indents, an indication for improved ductility.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Transition metal diboride</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Boron-to-metal ratio</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Hard coating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Toughness</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructure</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Grančič, B.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Roch, T.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Satrapinskyy, L.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Truchlý, M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mikula, M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Šroba, V.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ďurina, P.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kúš, P.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Surface and coatings technology</subfield><subfield code="d">Amsterdam [u.a.] : Elsevier Science, 1986</subfield><subfield code="g">421</subfield><subfield code="h">Online-Ressource</subfield><subfield code="w">(DE-627)308447522</subfield><subfield code="w">(DE-600)1502240-7</subfield><subfield code="w">(DE-576)098474049</subfield><subfield code="x">0257-8972</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:421</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_74</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_90</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_224</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_702</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2003</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2011</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2025</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2034</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2038</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2044</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2049</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2050</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2056</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2059</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2061</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2064</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2065</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2068</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2113</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2118</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2122</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2129</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2143</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2147</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2148</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2152</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2153</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2190</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2336</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2507</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2522</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4242</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4251</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4326</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4333</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4334</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4393</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">52.78</subfield><subfield code="j">Oberflächentechnik</subfield><subfield code="j">Wärmebehandlung</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">51.20</subfield><subfield code="j">Werkstoffoberflächeneigenschaften</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">421</subfield></datafield></record></collection>
|
| score |
7.401531 |