Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism
In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Chen, DeLi [verfasserIn] Wang, Zhan [verfasserIn] Zeng, Yong [verfasserIn] Zhang, XiaoRong [verfasserIn] Sun, XiaoHong [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2022 |
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| Schlagwörter: |
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| Übergeordnetes Werk: |
Enthalten in: Physics letters / A - Amsterdam : North-Holland Publ., 1967, 432 |
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| Übergeordnetes Werk: |
volume:432 |
| DOI / URN: |
10.1016/j.physleta.2022.128020 |
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| Katalog-ID: |
ELV007517963 |
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| 024 | 7 | |a 10.1016/j.physleta.2022.128020 |2 doi | |
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| 100 | 1 | |a Chen, DeLi |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism |
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| 520 | |a In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. | ||
| 650 | 4 | |a Photonic crystal | |
| 650 | 4 | |a Dual-parameter | |
| 650 | 4 | |a Multi-beam | |
| 650 | 4 | |a Lithography | |
| 700 | 1 | |a Wang, Zhan |e verfasserin |0 (orcid)0000-0002-6458-4653 |4 aut | |
| 700 | 1 | |a Zeng, Yong |e verfasserin |4 aut | |
| 700 | 1 | |a Zhang, XiaoRong |e verfasserin |4 aut | |
| 700 | 1 | |a Sun, XiaoHong |e verfasserin |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Physics letters / A |d Amsterdam : North-Holland Publ., 1967 |g 432 |h Online-Ressource |w (DE-627)266015298 |w (DE-600)1466603-0 |w (DE-576)074959905 |x 1873-2429 |7 nnns |
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| 912 | |a GBV_ILN_224 | ||
| 912 | |a GBV_ILN_370 | ||
| 912 | |a GBV_ILN_602 | ||
| 912 | |a GBV_ILN_702 | ||
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| 912 | |a GBV_ILN_2044 | ||
| 912 | |a GBV_ILN_2048 | ||
| 912 | |a GBV_ILN_2049 | ||
| 912 | |a GBV_ILN_2050 | ||
| 912 | |a GBV_ILN_2056 | ||
| 912 | |a GBV_ILN_2059 | ||
| 912 | |a GBV_ILN_2061 | ||
| 912 | |a GBV_ILN_2064 | ||
| 912 | |a GBV_ILN_2065 | ||
| 912 | |a GBV_ILN_2068 | ||
| 912 | |a GBV_ILN_2111 | ||
| 912 | |a GBV_ILN_2112 | ||
| 912 | |a GBV_ILN_2113 | ||
| 912 | |a GBV_ILN_2118 | ||
| 912 | |a GBV_ILN_2122 | ||
| 912 | |a GBV_ILN_2129 | ||
| 912 | |a GBV_ILN_2143 | ||
| 912 | |a GBV_ILN_2147 | ||
| 912 | |a GBV_ILN_2148 | ||
| 912 | |a GBV_ILN_2152 | ||
| 912 | |a GBV_ILN_2153 | ||
| 912 | |a GBV_ILN_2190 | ||
| 912 | |a GBV_ILN_2336 | ||
| 912 | |a GBV_ILN_2507 | ||
| 912 | |a GBV_ILN_2522 | ||
| 912 | |a GBV_ILN_4035 | ||
| 912 | |a GBV_ILN_4037 | ||
| 912 | |a GBV_ILN_4112 | ||
| 912 | |a GBV_ILN_4125 | ||
| 912 | |a GBV_ILN_4126 | ||
| 912 | |a GBV_ILN_4242 | ||
| 912 | |a GBV_ILN_4251 | ||
| 912 | |a GBV_ILN_4305 | ||
| 912 | |a GBV_ILN_4313 | ||
| 912 | |a GBV_ILN_4323 | ||
| 912 | |a GBV_ILN_4324 | ||
| 912 | |a GBV_ILN_4325 | ||
| 912 | |a GBV_ILN_4326 | ||
| 912 | |a GBV_ILN_4333 | ||
| 912 | |a GBV_ILN_4334 | ||
| 912 | |a GBV_ILN_4335 | ||
| 912 | |a GBV_ILN_4338 | ||
| 912 | |a GBV_ILN_4393 | ||
| 936 | b | k | |a 33.00 |j Physik: Allgemeines |
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10.1016/j.physleta.2022.128020 doi (DE-627)ELV007517963 (ELSEVIER)S0375-9601(22)00102-5 DE-627 ger DE-627 rda eng 530 DE-600 33.00 bkl Chen, DeLi verfasserin aut Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. Photonic crystal Dual-parameter Multi-beam Lithography Wang, Zhan verfasserin (orcid)0000-0002-6458-4653 aut Zeng, Yong verfasserin aut Zhang, XiaoRong verfasserin aut Sun, XiaoHong verfasserin aut Enthalten in Physics letters / A Amsterdam : North-Holland Publ., 1967 432 Online-Ressource (DE-627)266015298 (DE-600)1466603-0 (DE-576)074959905 1873-2429 nnns volume:432 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.00 Physik: Allgemeines AR 432 |
| spelling |
10.1016/j.physleta.2022.128020 doi (DE-627)ELV007517963 (ELSEVIER)S0375-9601(22)00102-5 DE-627 ger DE-627 rda eng 530 DE-600 33.00 bkl Chen, DeLi verfasserin aut Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. Photonic crystal Dual-parameter Multi-beam Lithography Wang, Zhan verfasserin (orcid)0000-0002-6458-4653 aut Zeng, Yong verfasserin aut Zhang, XiaoRong verfasserin aut Sun, XiaoHong verfasserin aut Enthalten in Physics letters / A Amsterdam : North-Holland Publ., 1967 432 Online-Ressource (DE-627)266015298 (DE-600)1466603-0 (DE-576)074959905 1873-2429 nnns volume:432 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.00 Physik: Allgemeines AR 432 |
| allfields_unstemmed |
10.1016/j.physleta.2022.128020 doi (DE-627)ELV007517963 (ELSEVIER)S0375-9601(22)00102-5 DE-627 ger DE-627 rda eng 530 DE-600 33.00 bkl Chen, DeLi verfasserin aut Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. Photonic crystal Dual-parameter Multi-beam Lithography Wang, Zhan verfasserin (orcid)0000-0002-6458-4653 aut Zeng, Yong verfasserin aut Zhang, XiaoRong verfasserin aut Sun, XiaoHong verfasserin aut Enthalten in Physics letters / A Amsterdam : North-Holland Publ., 1967 432 Online-Ressource (DE-627)266015298 (DE-600)1466603-0 (DE-576)074959905 1873-2429 nnns volume:432 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.00 Physik: Allgemeines AR 432 |
| allfieldsGer |
10.1016/j.physleta.2022.128020 doi (DE-627)ELV007517963 (ELSEVIER)S0375-9601(22)00102-5 DE-627 ger DE-627 rda eng 530 DE-600 33.00 bkl Chen, DeLi verfasserin aut Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. Photonic crystal Dual-parameter Multi-beam Lithography Wang, Zhan verfasserin (orcid)0000-0002-6458-4653 aut Zeng, Yong verfasserin aut Zhang, XiaoRong verfasserin aut Sun, XiaoHong verfasserin aut Enthalten in Physics letters / A Amsterdam : North-Holland Publ., 1967 432 Online-Ressource (DE-627)266015298 (DE-600)1466603-0 (DE-576)074959905 1873-2429 nnns volume:432 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.00 Physik: Allgemeines AR 432 |
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preparation of graded photonic structure by using multi-beam interfering method based on dual-parameter hexagonal prism |
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Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism |
| abstract |
In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. |
| abstractGer |
In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. |
| abstract_unstemmed |
In this paper, a double-cone interfering system is constructed by using a dual-parameter top-cut hexagonal prism (TCHP), which is independently designed by our group. By using the system, a large area of SU-8 photoresist material is subjected to a single holographic exposure to prepare the gradient photonic crystal (GPC) superlattice structures and array. Through the AFM measurement of the sample, a double-period hexagonal GPC structure with a small lattice of sub-micron size is observed. Compared with the structures obtained by CCD microscope camera system monitoring and theoretical design, the experiment has achieved a relatively good consistency. The method is simple and easy to prepare GPC structures and array in a large area through a single exposure, which provides a new way for the rapid preparation of GPC. |
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| title_short |
Preparation of Graded Photonic Structure by using multi-beam interfering method based on dual-parameter hexagonal prism |
| remote_bool |
true |
| author2 |
Wang, Zhan Zeng, Yong Zhang, XiaoRong Sun, XiaoHong |
| author2Str |
Wang, Zhan Zeng, Yong Zhang, XiaoRong Sun, XiaoHong |
| ppnlink |
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| doi_str |
10.1016/j.physleta.2022.128020 |
| up_date |
2024-07-06T16:32:14.843Z |
| _version_ |
1803848027833630720 |
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