Design and testing of LGAD sensor with shallow carbon implantation

The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at...
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Autor*in:	Wu, Kewei [verfasserIn] Jia, Xuewei [verfasserIn] Yang, Tao [verfasserIn] Li, Mengzhao [verfasserIn] Wang, Wei [verfasserIn] Zhao, Mei [verfasserIn] Liang, Zhijun [verfasserIn] Guimaraes da Costa, João [verfasserIn] Fan, Yunyun [verfasserIn] Cui, Han [verfasserIn] Howard, Alissa [verfasserIn] Kramberger, Gregor [verfasserIn] Shi, Xin [verfasserIn] Heng, Yuekun [verfasserIn] Tan, Yuhang [verfasserIn] Liu, Bo [verfasserIn] Feng, Yuan [verfasserIn] Li, Shuqi [verfasserIn] Li, Mengran [verfasserIn] Yu, Chengjun [verfasserIn] Yang, Xuan [verfasserIn] Zhai, Mingjie [verfasserIn] Xu, Gaobo [verfasserIn] Yan, Gangping [verfasserIn] Zhai, Qionghua [verfasserIn] Ding, Mingzheng [verfasserIn] Luo, Jun [verfasserIn] Yin, Huaxiang [verfasserIn] Li, Junfeng [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2022

Schlagwörter:	Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal

Übergeordnetes Werk:	Enthalten in: Nuclear instruments & methods in physics research / A - Amsterdam : North-Holland Publ. Co., 1984, 1046
Übergeordnetes Werk:	volume:1046

DOI / URN:	10.1016/j.nima.2022.167697

Katalog-ID:	ELV008874964

Internformat


LEADER	01000caa a22002652 4500
001	ELV008874964
003	DE-627
005	20240216093004.0
007	cr uuu---uuuuu
008	230509s2022 xx \|\|\|\|\|o 00\| \|\|eng c
024	7		\|a 10.1016/j.nima.2022.167697 \|2 doi
035			\|a (DE-627)ELV008874964
035			\|a (ELSEVIER)S0168-9002(22)00989-5
040			\|a DE-627 \|b ger \|c DE-627 \|e rda
041			\|a eng
082	0	4	\|a 530 \|q VZ
084			\|a 33.05 \|2 bkl
084			\|a 33.07 \|2 bkl
084			\|a 33.40 \|2 bkl
100	1		\|a Wu, Kewei \|e verfasserin \|0 (orcid)0000-0001-6818-9573 \|4 aut
245	1	0	\|a Design and testing of LGAD sensor with shallow carbon implantation
264		1	\|c 2022
336			\|a nicht spezifiziert \|b zzz \|2 rdacontent
337			\|a Computermedien \|b c \|2 rdamedia
338			\|a Online-Ressource \|b cr \|2 rdacarrier
520			\|a The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur.
650		4	\|a Low Gain Avalanche Detectors (LGAD)
650		4	\|a Carbon implantation
650		4	\|a Silicon detector
650		4	\|a Radiation hardness
650		4	\|a Acceptor removal
700	1		\|a Jia, Xuewei \|e verfasserin \|4 aut
700	1		\|a Yang, Tao \|e verfasserin \|4 aut
700	1		\|a Li, Mengzhao \|e verfasserin \|4 aut
700	1		\|a Wang, Wei \|e verfasserin \|4 aut
700	1		\|a Zhao, Mei \|e verfasserin \|4 aut
700	1		\|a Liang, Zhijun \|e verfasserin \|4 aut
700	1		\|a Guimaraes da Costa, João \|e verfasserin \|4 aut
700	1		\|a Fan, Yunyun \|e verfasserin \|4 aut
700	1		\|a Cui, Han \|e verfasserin \|4 aut
700	1		\|a Howard, Alissa \|e verfasserin \|0 (orcid)0000-0003-0625-8996 \|4 aut
700	1		\|a Kramberger, Gregor \|e verfasserin \|0 (orcid)0000-0002-7580-384X \|4 aut
700	1		\|a Shi, Xin \|e verfasserin \|0 (orcid)0000-0001-9910-9345 \|4 aut
700	1		\|a Heng, Yuekun \|e verfasserin \|4 aut
700	1		\|a Tan, Yuhang \|e verfasserin \|4 aut
700	1		\|a Liu, Bo \|e verfasserin \|0 (orcid)0000-0003-2823-9307 \|4 aut
700	1		\|a Feng, Yuan \|e verfasserin \|4 aut
700	1		\|a Li, Shuqi \|e verfasserin \|4 aut
700	1		\|a Li, Mengran \|e verfasserin \|0 (orcid)0000-0003-4317-3203 \|4 aut
700	1		\|a Yu, Chengjun \|e verfasserin \|4 aut
700	1		\|a Yang, Xuan \|e verfasserin \|4 aut
700	1		\|a Zhai, Mingjie \|e verfasserin \|4 aut
700	1		\|a Xu, Gaobo \|e verfasserin \|4 aut
700	1		\|a Yan, Gangping \|e verfasserin \|4 aut
700	1		\|a Zhai, Qionghua \|e verfasserin \|4 aut
700	1		\|a Ding, Mingzheng \|e verfasserin \|4 aut
700	1		\|a Luo, Jun \|e verfasserin \|4 aut
700	1		\|a Yin, Huaxiang \|e verfasserin \|4 aut
700	1		\|a Li, Junfeng \|e verfasserin \|4 aut
773	0	8	\|i Enthalten in \|t Nuclear instruments & methods in physics research / A \|d Amsterdam : North-Holland Publ. Co., 1984 \|g 1046 \|h Online-Ressource \|w (DE-627)266014666 \|w (DE-600)1466532-3 \|w (DE-576)074959743 \|x 0168-9002 \|7 nnns
773	1	8	\|g volume:1046
912			\|a GBV_USEFLAG_U
912			\|a GBV_ELV
912			\|a SYSFLAG_U
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_24
912			\|a GBV_ILN_31
912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_60
912			\|a GBV_ILN_62
912			\|a GBV_ILN_63
912			\|a GBV_ILN_65
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_73
912			\|a GBV_ILN_74
912			\|a GBV_ILN_90
912			\|a GBV_ILN_95
912			\|a GBV_ILN_100
912			\|a GBV_ILN_101
912			\|a GBV_ILN_105
912			\|a GBV_ILN_110
912			\|a GBV_ILN_150
912			\|a GBV_ILN_151
912			\|a GBV_ILN_224
912			\|a GBV_ILN_370
912			\|a GBV_ILN_602
912			\|a GBV_ILN_702
912			\|a GBV_ILN_2003
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2005
912			\|a GBV_ILN_2011
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2015
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_2025
912			\|a GBV_ILN_2027
912			\|a GBV_ILN_2034
912			\|a GBV_ILN_2038
912			\|a GBV_ILN_2044
912			\|a GBV_ILN_2048
912			\|a GBV_ILN_2049
912			\|a GBV_ILN_2050
912			\|a GBV_ILN_2056
912			\|a GBV_ILN_2059
912			\|a GBV_ILN_2061
912			\|a GBV_ILN_2064
912			\|a GBV_ILN_2065
912			\|a GBV_ILN_2068
912			\|a GBV_ILN_2111
912			\|a GBV_ILN_2112
912			\|a GBV_ILN_2113
912			\|a GBV_ILN_2118
912			\|a GBV_ILN_2122
912			\|a GBV_ILN_2129
912			\|a GBV_ILN_2143
912			\|a GBV_ILN_2147
912			\|a GBV_ILN_2148
912			\|a GBV_ILN_2152
912			\|a GBV_ILN_2153
912			\|a GBV_ILN_2190
912			\|a GBV_ILN_2336
912			\|a GBV_ILN_2507
912			\|a GBV_ILN_2522
912			\|a GBV_ILN_4035
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4112
912			\|a GBV_ILN_4125
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4242
912			\|a GBV_ILN_4251
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4324
912			\|a GBV_ILN_4325
912			\|a GBV_ILN_4326
912			\|a GBV_ILN_4333
912			\|a GBV_ILN_4334
912			\|a GBV_ILN_4335
912			\|a GBV_ILN_4338
912			\|a GBV_ILN_4393
936	b	k	\|a 33.05 \|j Experimentalphysik \|q VZ
936	b	k	\|a 33.07 \|j Spektroskopie \|q VZ
936	b	k	\|a 33.40 \|j Kernphysik \|q VZ
951			\|a AR
952			\|d 1046

Indexfelder

author_variant	k w kw x j xj t y ty m l ml w w ww m z mz z l zl d c j g dcj dcjg y f yf h c hc a h ah g k gk x s xs y h yh y t yt b l bl y f yf s l sl m l ml c y cy x y xy m z mz g x gx g y gy q z qz m d md j l jl h y hy j l jl
matchkey_str	article:01689002:2022----::einntsigfgdesrihhlocr
hierarchy_sort_str	2022
bklnumber	33.05 33.07 33.40
publishDate	2022
allfields	10.1016/j.nima.2022.167697 doi (DE-627)ELV008874964 (ELSEVIER)S0168-9002(22)00989-5 DE-627 ger DE-627 rda eng 530 VZ 33.05 bkl 33.07 bkl 33.40 bkl Wu, Kewei verfasserin (orcid)0000-0001-6818-9573 aut Design and testing of LGAD sensor with shallow carbon implantation 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur. Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal Jia, Xuewei verfasserin aut Yang, Tao verfasserin aut Li, Mengzhao verfasserin aut Wang, Wei verfasserin aut Zhao, Mei verfasserin aut Liang, Zhijun verfasserin aut Guimaraes da Costa, João verfasserin aut Fan, Yunyun verfasserin aut Cui, Han verfasserin aut Howard, Alissa verfasserin (orcid)0000-0003-0625-8996 aut Kramberger, Gregor verfasserin (orcid)0000-0002-7580-384X aut Shi, Xin verfasserin (orcid)0000-0001-9910-9345 aut Heng, Yuekun verfasserin aut Tan, Yuhang verfasserin aut Liu, Bo verfasserin (orcid)0000-0003-2823-9307 aut Feng, Yuan verfasserin aut Li, Shuqi verfasserin aut Li, Mengran verfasserin (orcid)0000-0003-4317-3203 aut Yu, Chengjun verfasserin aut Yang, Xuan verfasserin aut Zhai, Mingjie verfasserin aut Xu, Gaobo verfasserin aut Yan, Gangping verfasserin aut Zhai, Qionghua verfasserin aut Ding, Mingzheng verfasserin aut Luo, Jun verfasserin aut Yin, Huaxiang verfasserin aut Li, Junfeng verfasserin aut Enthalten in Nuclear instruments & methods in physics research / A Amsterdam : North-Holland Publ. Co., 1984 1046 Online-Ressource (DE-627)266014666 (DE-600)1466532-3 (DE-576)074959743 0168-9002 nnns volume:1046 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.05 Experimentalphysik VZ 33.07 Spektroskopie VZ 33.40 Kernphysik VZ AR 1046
spelling	10.1016/j.nima.2022.167697 doi (DE-627)ELV008874964 (ELSEVIER)S0168-9002(22)00989-5 DE-627 ger DE-627 rda eng 530 VZ 33.05 bkl 33.07 bkl 33.40 bkl Wu, Kewei verfasserin (orcid)0000-0001-6818-9573 aut Design and testing of LGAD sensor with shallow carbon implantation 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur. Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal Jia, Xuewei verfasserin aut Yang, Tao verfasserin aut Li, Mengzhao verfasserin aut Wang, Wei verfasserin aut Zhao, Mei verfasserin aut Liang, Zhijun verfasserin aut Guimaraes da Costa, João verfasserin aut Fan, Yunyun verfasserin aut Cui, Han verfasserin aut Howard, Alissa verfasserin (orcid)0000-0003-0625-8996 aut Kramberger, Gregor verfasserin (orcid)0000-0002-7580-384X aut Shi, Xin verfasserin (orcid)0000-0001-9910-9345 aut Heng, Yuekun verfasserin aut Tan, Yuhang verfasserin aut Liu, Bo verfasserin (orcid)0000-0003-2823-9307 aut Feng, Yuan verfasserin aut Li, Shuqi verfasserin aut Li, Mengran verfasserin (orcid)0000-0003-4317-3203 aut Yu, Chengjun verfasserin aut Yang, Xuan verfasserin aut Zhai, Mingjie verfasserin aut Xu, Gaobo verfasserin aut Yan, Gangping verfasserin aut Zhai, Qionghua verfasserin aut Ding, Mingzheng verfasserin aut Luo, Jun verfasserin aut Yin, Huaxiang verfasserin aut Li, Junfeng verfasserin aut Enthalten in Nuclear instruments & methods in physics research / A Amsterdam : North-Holland Publ. Co., 1984 1046 Online-Ressource (DE-627)266014666 (DE-600)1466532-3 (DE-576)074959743 0168-9002 nnns volume:1046 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.05 Experimentalphysik VZ 33.07 Spektroskopie VZ 33.40 Kernphysik VZ AR 1046
allfields_unstemmed	10.1016/j.nima.2022.167697 doi (DE-627)ELV008874964 (ELSEVIER)S0168-9002(22)00989-5 DE-627 ger DE-627 rda eng 530 VZ 33.05 bkl 33.07 bkl 33.40 bkl Wu, Kewei verfasserin (orcid)0000-0001-6818-9573 aut Design and testing of LGAD sensor with shallow carbon implantation 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur. Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal Jia, Xuewei verfasserin aut Yang, Tao verfasserin aut Li, Mengzhao verfasserin aut Wang, Wei verfasserin aut Zhao, Mei verfasserin aut Liang, Zhijun verfasserin aut Guimaraes da Costa, João verfasserin aut Fan, Yunyun verfasserin aut Cui, Han verfasserin aut Howard, Alissa verfasserin (orcid)0000-0003-0625-8996 aut Kramberger, Gregor verfasserin (orcid)0000-0002-7580-384X aut Shi, Xin verfasserin (orcid)0000-0001-9910-9345 aut Heng, Yuekun verfasserin aut Tan, Yuhang verfasserin aut Liu, Bo verfasserin (orcid)0000-0003-2823-9307 aut Feng, Yuan verfasserin aut Li, Shuqi verfasserin aut Li, Mengran verfasserin (orcid)0000-0003-4317-3203 aut Yu, Chengjun verfasserin aut Yang, Xuan verfasserin aut Zhai, Mingjie verfasserin aut Xu, Gaobo verfasserin aut Yan, Gangping verfasserin aut Zhai, Qionghua verfasserin aut Ding, Mingzheng verfasserin aut Luo, Jun verfasserin aut Yin, Huaxiang verfasserin aut Li, Junfeng verfasserin aut Enthalten in Nuclear instruments & methods in physics research / A Amsterdam : North-Holland Publ. Co., 1984 1046 Online-Ressource (DE-627)266014666 (DE-600)1466532-3 (DE-576)074959743 0168-9002 nnns volume:1046 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.05 Experimentalphysik VZ 33.07 Spektroskopie VZ 33.40 Kernphysik VZ AR 1046
allfieldsGer	10.1016/j.nima.2022.167697 doi (DE-627)ELV008874964 (ELSEVIER)S0168-9002(22)00989-5 DE-627 ger DE-627 rda eng 530 VZ 33.05 bkl 33.07 bkl 33.40 bkl Wu, Kewei verfasserin (orcid)0000-0001-6818-9573 aut Design and testing of LGAD sensor with shallow carbon implantation 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur. Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal Jia, Xuewei verfasserin aut Yang, Tao verfasserin aut Li, Mengzhao verfasserin aut Wang, Wei verfasserin aut Zhao, Mei verfasserin aut Liang, Zhijun verfasserin aut Guimaraes da Costa, João verfasserin aut Fan, Yunyun verfasserin aut Cui, Han verfasserin aut Howard, Alissa verfasserin (orcid)0000-0003-0625-8996 aut Kramberger, Gregor verfasserin (orcid)0000-0002-7580-384X aut Shi, Xin verfasserin (orcid)0000-0001-9910-9345 aut Heng, Yuekun verfasserin aut Tan, Yuhang verfasserin aut Liu, Bo verfasserin (orcid)0000-0003-2823-9307 aut Feng, Yuan verfasserin aut Li, Shuqi verfasserin aut Li, Mengran verfasserin (orcid)0000-0003-4317-3203 aut Yu, Chengjun verfasserin aut Yang, Xuan verfasserin aut Zhai, Mingjie verfasserin aut Xu, Gaobo verfasserin aut Yan, Gangping verfasserin aut Zhai, Qionghua verfasserin aut Ding, Mingzheng verfasserin aut Luo, Jun verfasserin aut Yin, Huaxiang verfasserin aut Li, Junfeng verfasserin aut Enthalten in Nuclear instruments & methods in physics research / A Amsterdam : North-Holland Publ. Co., 1984 1046 Online-Ressource (DE-627)266014666 (DE-600)1466532-3 (DE-576)074959743 0168-9002 nnns volume:1046 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.05 Experimentalphysik VZ 33.07 Spektroskopie VZ 33.40 Kernphysik VZ AR 1046
allfieldsSound	10.1016/j.nima.2022.167697 doi (DE-627)ELV008874964 (ELSEVIER)S0168-9002(22)00989-5 DE-627 ger DE-627 rda eng 530 VZ 33.05 bkl 33.07 bkl 33.40 bkl Wu, Kewei verfasserin (orcid)0000-0001-6818-9573 aut Design and testing of LGAD sensor with shallow carbon implantation 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur. Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal Jia, Xuewei verfasserin aut Yang, Tao verfasserin aut Li, Mengzhao verfasserin aut Wang, Wei verfasserin aut Zhao, Mei verfasserin aut Liang, Zhijun verfasserin aut Guimaraes da Costa, João verfasserin aut Fan, Yunyun verfasserin aut Cui, Han verfasserin aut Howard, Alissa verfasserin (orcid)0000-0003-0625-8996 aut Kramberger, Gregor verfasserin (orcid)0000-0002-7580-384X aut Shi, Xin verfasserin (orcid)0000-0001-9910-9345 aut Heng, Yuekun verfasserin aut Tan, Yuhang verfasserin aut Liu, Bo verfasserin (orcid)0000-0003-2823-9307 aut Feng, Yuan verfasserin aut Li, Shuqi verfasserin aut Li, Mengran verfasserin (orcid)0000-0003-4317-3203 aut Yu, Chengjun verfasserin aut Yang, Xuan verfasserin aut Zhai, Mingjie verfasserin aut Xu, Gaobo verfasserin aut Yan, Gangping verfasserin aut Zhai, Qionghua verfasserin aut Ding, Mingzheng verfasserin aut Luo, Jun verfasserin aut Yin, Huaxiang verfasserin aut Li, Junfeng verfasserin aut Enthalten in Nuclear instruments & methods in physics research / A Amsterdam : North-Holland Publ. Co., 1984 1046 Online-Ressource (DE-627)266014666 (DE-600)1466532-3 (DE-576)074959743 0168-9002 nnns volume:1046 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 33.05 Experimentalphysik VZ 33.07 Spektroskopie VZ 33.40 Kernphysik VZ AR 1046
language	English
source	Enthalten in Nuclear instruments & methods in physics research / A 1046 volume:1046
sourceStr	Enthalten in Nuclear instruments & methods in physics research / A 1046 volume:1046
format_phy_str_mv	Article
bklname	Experimentalphysik Spektroskopie Kernphysik
institution	findex.gbv.de
topic_facet	Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal
dewey-raw	530
isfreeaccess_bool	false
container_title	Nuclear instruments & methods in physics research / A
authorswithroles_txt_mv	Wu, Kewei @@aut@@ Jia, Xuewei @@aut@@ Yang, Tao @@aut@@ Li, Mengzhao @@aut@@ Wang, Wei @@aut@@ Zhao, Mei @@aut@@ Liang, Zhijun @@aut@@ Guimaraes da Costa, João @@aut@@ Fan, Yunyun @@aut@@ Cui, Han @@aut@@ Howard, Alissa @@aut@@ Kramberger, Gregor @@aut@@ Shi, Xin @@aut@@ Heng, Yuekun @@aut@@ Tan, Yuhang @@aut@@ Liu, Bo @@aut@@ Feng, Yuan @@aut@@ Li, Shuqi @@aut@@ Li, Mengran @@aut@@ Yu, Chengjun @@aut@@ Yang, Xuan @@aut@@ Zhai, Mingjie @@aut@@ Xu, Gaobo @@aut@@ Yan, Gangping @@aut@@ Zhai, Qionghua @@aut@@ Ding, Mingzheng @@aut@@ Luo, Jun @@aut@@ Yin, Huaxiang @@aut@@ Li, Junfeng @@aut@@
publishDateDaySort_date	2022-01-01T00:00:00Z
hierarchy_top_id	266014666
dewey-sort	3530
id	ELV008874964
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV008874964</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240216093004.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230509s2022 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.nima.2022.167697</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV008874964</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S0168-9002(22)00989-5</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">33.05</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">33.07</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">33.40</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Wu, Kewei</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0001-6818-9573</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Design and testing of LGAD sensor with shallow carbon implantation</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Low Gain Avalanche Detectors (LGAD)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Carbon implantation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon detector</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Radiation hardness</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Acceptor removal</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jia, Xuewei</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yang, Tao</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Mengzhao</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wang, Wei</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zhao, Mei</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Liang, Zhijun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Guimaraes da Costa, João</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Fan, Yunyun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cui, Han</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Howard, Alissa</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0003-0625-8996</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kramberger, Gregor</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0002-7580-384X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shi, Xin</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0001-9910-9345</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Heng, Yuekun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tan, Yuhang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Liu, Bo</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0003-2823-9307</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Feng, Yuan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Shuqi</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Mengran</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0003-4317-3203</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yu, Chengjun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yang, Xuan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zhai, Mingjie</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Xu, Gaobo</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yan, Gangping</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zhai, Qionghua</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ding, Mingzheng</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Luo, Jun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yin, Huaxiang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Junfeng</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Nuclear instruments & methods in physics research / A</subfield><subfield code="d">Amsterdam : North-Holland Publ. Co., 1984</subfield><subfield code="g">1046</subfield><subfield code="h">Online-Ressource</subfield><subfield code="w">(DE-627)266014666</subfield><subfield code="w">(DE-600)1466532-3</subfield><subfield code="w">(DE-576)074959743</subfield><subfield code="x">0168-9002</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:1046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_74</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_90</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_101</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_224</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_702</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2003</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2011</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2025</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2034</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2038</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2044</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2049</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2050</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2056</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2059</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2061</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2064</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2065</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2068</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2113</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2118</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2122</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2129</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2143</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2147</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2148</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2152</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2153</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2190</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2336</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2507</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2522</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4242</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4251</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4326</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4333</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4334</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4393</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">33.05</subfield><subfield code="j">Experimentalphysik</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">33.07</subfield><subfield code="j">Spektroskopie</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">33.40</subfield><subfield code="j">Kernphysik</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">1046</subfield></datafield></record></collection>
author	Wu, Kewei
spellingShingle	Wu, Kewei ddc 530 bkl 33.05 bkl 33.07 bkl 33.40 misc Low Gain Avalanche Detectors (LGAD) misc Carbon implantation misc Silicon detector misc Radiation hardness misc Acceptor removal Design and testing of LGAD sensor with shallow carbon implantation
authorStr	Wu, Kewei
ppnlink_with_tag_str_mv	@@773@@(DE-627)266014666
format	electronic Article
dewey-ones	530 - Physics
delete_txt_mv	keep
author_role	aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut aut
collection	elsevier
remote_str	true
illustrated	Not Illustrated
issn	0168-9002
topic_title	530 VZ 33.05 bkl 33.07 bkl 33.40 bkl Design and testing of LGAD sensor with shallow carbon implantation Low Gain Avalanche Detectors (LGAD) Carbon implantation Silicon detector Radiation hardness Acceptor removal
topic	ddc 530 bkl 33.05 bkl 33.07 bkl 33.40 misc Low Gain Avalanche Detectors (LGAD) misc Carbon implantation misc Silicon detector misc Radiation hardness misc Acceptor removal
topic_unstemmed	ddc 530 bkl 33.05 bkl 33.07 bkl 33.40 misc Low Gain Avalanche Detectors (LGAD) misc Carbon implantation misc Silicon detector misc Radiation hardness misc Acceptor removal
topic_browse	ddc 530 bkl 33.05 bkl 33.07 bkl 33.40 misc Low Gain Avalanche Detectors (LGAD) misc Carbon implantation misc Silicon detector misc Radiation hardness misc Acceptor removal
format_facet	Elektronische Aufsätze Aufsätze Elektronische Ressource
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	cr
hierarchy_parent_title	Nuclear instruments & methods in physics research / A
hierarchy_parent_id	266014666
dewey-tens	530 - Physics
hierarchy_top_title	Nuclear instruments & methods in physics research / A
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)266014666 (DE-600)1466532-3 (DE-576)074959743
title	Design and testing of LGAD sensor with shallow carbon implantation
ctrlnum	(DE-627)ELV008874964 (ELSEVIER)S0168-9002(22)00989-5
title_full	Design and testing of LGAD sensor with shallow carbon implantation
author_sort	Wu, Kewei
journal	Nuclear instruments & methods in physics research / A
journalStr	Nuclear instruments & methods in physics research / A
lang_code	eng
isOA_bool	false
dewey-hundreds	500 - Science
recordtype	marc
publishDateSort	2022
contenttype_str_mv	zzz
author_browse	Wu, Kewei Jia, Xuewei Yang, Tao Li, Mengzhao Wang, Wei Zhao, Mei Liang, Zhijun Guimaraes da Costa, João Fan, Yunyun Cui, Han Howard, Alissa Kramberger, Gregor Shi, Xin Heng, Yuekun Tan, Yuhang Liu, Bo Feng, Yuan Li, Shuqi Li, Mengran Yu, Chengjun Yang, Xuan Zhai, Mingjie Xu, Gaobo Yan, Gangping Zhai, Qionghua Ding, Mingzheng Luo, Jun Yin, Huaxiang Li, Junfeng
container_volume	1046
class	530 VZ 33.05 bkl 33.07 bkl 33.40 bkl
format_se	Elektronische Aufsätze
author-letter	Wu, Kewei
doi_str_mv	10.1016/j.nima.2022.167697
normlink	(ORCID)0000-0001-6818-9573 (ORCID)0000-0003-0625-8996 (ORCID)0000-0002-7580-384X (ORCID)0000-0001-9910-9345 (ORCID)0000-0003-2823-9307 (ORCID)0000-0003-4317-3203
normlink_prefix_str_mv	(orcid)0000-0001-6818-9573 (orcid)0000-0003-0625-8996 (orcid)0000-0002-7580-384X (orcid)0000-0001-9910-9345 (orcid)0000-0003-2823-9307 (orcid)0000-0003-4317-3203
dewey-full	530
author2-role	verfasserin
title_sort	design and testing of lgad sensor with shallow carbon implantation
title_auth	Design and testing of LGAD sensor with shallow carbon implantation
abstract	The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur.
abstractGer	The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur.
abstract_unstemmed	The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur.
collection_details	GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393
title_short	Design and testing of LGAD sensor with shallow carbon implantation
remote_bool	true
author2	Jia, Xuewei Yang, Tao Li, Mengzhao Wang, Wei Zhao, Mei Liang, Zhijun Guimaraes da Costa, João Fan, Yunyun Cui, Han Howard, Alissa Kramberger, Gregor Shi, Xin Heng, Yuekun Tan, Yuhang Liu, Bo Feng, Yuan Li, Shuqi Li, Mengran Yu, Chengjun Yang, Xuan Zhai, Mingjie Xu, Gaobo Yan, Gangping Zhai, Qionghua Ding, Mingzheng Luo, Jun Yin, Huaxiang Li, Junfeng
author2Str	Jia, Xuewei Yang, Tao Li, Mengzhao Wang, Wei Zhao, Mei Liang, Zhijun Guimaraes da Costa, João Fan, Yunyun Cui, Han Howard, Alissa Kramberger, Gregor Shi, Xin Heng, Yuekun Tan, Yuhang Liu, Bo Feng, Yuan Li, Shuqi Li, Mengran Yu, Chengjun Yang, Xuan Zhai, Mingjie Xu, Gaobo Yan, Gangping Zhai, Qionghua Ding, Mingzheng Luo, Jun Yin, Huaxiang Li, Junfeng
ppnlink	266014666
mediatype_str_mv	c
isOA_txt	false
hochschulschrift_bool	false
doi_str	10.1016/j.nima.2022.167697
up_date	2024-07-06T21:12:20.083Z
_version_	1803865649404968960
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV008874964</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240216093004.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">230509s2022 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.nima.2022.167697</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV008874964</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S0168-9002(22)00989-5</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">33.05</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">33.07</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">33.40</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Wu, Kewei</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0001-6818-9573</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Design and testing of LGAD sensor with shallow carbon implantation</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps for Minimum Ionizing Particles (MIP). High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5 × 1015 n e q /cm2, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 μ m LGAD sensors already deliver adequate charge collection >4 fC and time resolution <50 ps at voltages <400 V. The operation voltages of these 50 μ m devices are well below those at which single event burnout may occur.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Low Gain Avalanche Detectors (LGAD)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Carbon implantation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon detector</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Radiation hardness</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Acceptor removal</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jia, Xuewei</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yang, Tao</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Mengzhao</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wang, Wei</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zhao, Mei</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Liang, Zhijun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Guimaraes da Costa, João</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Fan, Yunyun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cui, Han</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Howard, Alissa</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0003-0625-8996</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kramberger, Gregor</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0002-7580-384X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shi, Xin</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0001-9910-9345</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Heng, Yuekun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tan, Yuhang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Liu, Bo</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0003-2823-9307</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Feng, Yuan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Shuqi</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Mengran</subfield><subfield code="e">verfasserin</subfield><subfield code="0">(orcid)0000-0003-4317-3203</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yu, Chengjun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yang, Xuan</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zhai, Mingjie</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Xu, Gaobo</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yan, Gangping</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zhai, Qionghua</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ding, Mingzheng</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Luo, Jun</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yin, Huaxiang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Junfeng</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Nuclear instruments & methods in physics research / A</subfield><subfield code="d">Amsterdam : North-Holland Publ. Co., 1984</subfield><subfield code="g">1046</subfield><subfield code="h">Online-Ressource</subfield><subfield code="w">(DE-627)266014666</subfield><subfield code="w">(DE-600)1466532-3</subfield><subfield code="w">(DE-576)074959743</subfield><subfield code="x">0168-9002</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:1046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_24</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_63</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_73</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_74</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_90</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_95</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_101</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_151</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_224</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_602</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_702</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2003</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2011</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2025</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2034</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2038</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2044</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2048</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2049</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2050</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2056</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2059</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2061</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2064</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2065</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2068</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2113</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2118</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2122</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2129</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2143</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2147</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2148</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2152</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2153</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2190</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2336</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2507</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2522</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4112</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4125</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4242</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4251</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4324</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4325</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4326</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4333</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4334</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4335</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4338</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4393</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">33.05</subfield><subfield code="j">Experimentalphysik</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">33.07</subfield><subfield code="j">Spektroskopie</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">33.40</subfield><subfield code="j">Kernphysik</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">1046</subfield></datafield></record></collection>
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Design and testing of LGAD sensor with shallow carbon implantation

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