Scanning strategy for surface defects evaluation of large fine optical components

Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aper...
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Autor*in:	Wang, Shiling [verfasserIn] Sun, Huanyu [verfasserIn] Hu, Xiaobo [verfasserIn] Zou, Sirui [verfasserIn] Guo, Shiwei [verfasserIn] Wang, Hongxia [verfasserIn] Sun, Feng [verfasserIn] Cheng, Xinglei [verfasserIn] Zhang, Junan [verfasserIn] Liu, Dong [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2022

Schlagwörter:	Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning

Übergeordnetes Werk:	Enthalten in: Optics & laser technology - Amsterdam [u.a.] : Elsevier Science, 1971, 156
Übergeordnetes Werk:	volume:156

DOI / URN:	10.1016/j.optlastec.2022.108473

Katalog-ID:	ELV009686495

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520			\|a Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically.
650		4	\|a Optical components
650		4	\|a Defect detection
650		4	\|a Dark field microscopic imaging
650		4	\|a Sub-region and sub-aperture scanning
700	1		\|a Sun, Huanyu \|e verfasserin \|4 aut
700	1		\|a Hu, Xiaobo \|e verfasserin \|4 aut
700	1		\|a Zou, Sirui \|e verfasserin \|4 aut
700	1		\|a Guo, Shiwei \|e verfasserin \|4 aut
700	1		\|a Wang, Hongxia \|e verfasserin \|4 aut
700	1		\|a Sun, Feng \|e verfasserin \|4 aut
700	1		\|a Cheng, Xinglei \|e verfasserin \|4 aut
700	1		\|a Zhang, Junan \|e verfasserin \|4 aut
700	1		\|a Liu, Dong \|e verfasserin \|4 aut
773	0	8	\|i Enthalten in \|t Optics & laser technology \|d Amsterdam [u.a.] : Elsevier Science, 1971 \|g 156 \|h Online-Ressource \|w (DE-627)319950689 \|w (DE-600)2000654-8 \|w (DE-576)255266731 \|x 1879-2545 \|7 nnns
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allfields	10.1016/j.optlastec.2022.108473 doi (DE-627)ELV009686495 (ELSEVIER)S0030-3992(22)00629-6 DE-627 ger DE-627 rda eng 530 620 VZ 50.37 bkl 53.75 bkl 33.18 bkl 33.38 bkl Wang, Shiling verfasserin aut Scanning strategy for surface defects evaluation of large fine optical components 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically. Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning Sun, Huanyu verfasserin aut Hu, Xiaobo verfasserin aut Zou, Sirui verfasserin aut Guo, Shiwei verfasserin aut Wang, Hongxia verfasserin aut Sun, Feng verfasserin aut Cheng, Xinglei verfasserin aut Zhang, Junan verfasserin aut Liu, Dong verfasserin aut Enthalten in Optics & laser technology Amsterdam [u.a.] : Elsevier Science, 1971 156 Online-Ressource (DE-627)319950689 (DE-600)2000654-8 (DE-576)255266731 1879-2545 nnns volume:156 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 50.37 Technische Optik VZ 53.75 Optische Nachrichtentechnik VZ 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ AR 156
spelling	10.1016/j.optlastec.2022.108473 doi (DE-627)ELV009686495 (ELSEVIER)S0030-3992(22)00629-6 DE-627 ger DE-627 rda eng 530 620 VZ 50.37 bkl 53.75 bkl 33.18 bkl 33.38 bkl Wang, Shiling verfasserin aut Scanning strategy for surface defects evaluation of large fine optical components 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically. Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning Sun, Huanyu verfasserin aut Hu, Xiaobo verfasserin aut Zou, Sirui verfasserin aut Guo, Shiwei verfasserin aut Wang, Hongxia verfasserin aut Sun, Feng verfasserin aut Cheng, Xinglei verfasserin aut Zhang, Junan verfasserin aut Liu, Dong verfasserin aut Enthalten in Optics & laser technology Amsterdam [u.a.] : Elsevier Science, 1971 156 Online-Ressource (DE-627)319950689 (DE-600)2000654-8 (DE-576)255266731 1879-2545 nnns volume:156 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 50.37 Technische Optik VZ 53.75 Optische Nachrichtentechnik VZ 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ AR 156
allfields_unstemmed	10.1016/j.optlastec.2022.108473 doi (DE-627)ELV009686495 (ELSEVIER)S0030-3992(22)00629-6 DE-627 ger DE-627 rda eng 530 620 VZ 50.37 bkl 53.75 bkl 33.18 bkl 33.38 bkl Wang, Shiling verfasserin aut Scanning strategy for surface defects evaluation of large fine optical components 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically. Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning Sun, Huanyu verfasserin aut Hu, Xiaobo verfasserin aut Zou, Sirui verfasserin aut Guo, Shiwei verfasserin aut Wang, Hongxia verfasserin aut Sun, Feng verfasserin aut Cheng, Xinglei verfasserin aut Zhang, Junan verfasserin aut Liu, Dong verfasserin aut Enthalten in Optics & laser technology Amsterdam [u.a.] : Elsevier Science, 1971 156 Online-Ressource (DE-627)319950689 (DE-600)2000654-8 (DE-576)255266731 1879-2545 nnns volume:156 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 50.37 Technische Optik VZ 53.75 Optische Nachrichtentechnik VZ 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ AR 156
allfieldsGer	10.1016/j.optlastec.2022.108473 doi (DE-627)ELV009686495 (ELSEVIER)S0030-3992(22)00629-6 DE-627 ger DE-627 rda eng 530 620 VZ 50.37 bkl 53.75 bkl 33.18 bkl 33.38 bkl Wang, Shiling verfasserin aut Scanning strategy for surface defects evaluation of large fine optical components 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically. Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning Sun, Huanyu verfasserin aut Hu, Xiaobo verfasserin aut Zou, Sirui verfasserin aut Guo, Shiwei verfasserin aut Wang, Hongxia verfasserin aut Sun, Feng verfasserin aut Cheng, Xinglei verfasserin aut Zhang, Junan verfasserin aut Liu, Dong verfasserin aut Enthalten in Optics & laser technology Amsterdam [u.a.] : Elsevier Science, 1971 156 Online-Ressource (DE-627)319950689 (DE-600)2000654-8 (DE-576)255266731 1879-2545 nnns volume:156 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 50.37 Technische Optik VZ 53.75 Optische Nachrichtentechnik VZ 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ AR 156
allfieldsSound	10.1016/j.optlastec.2022.108473 doi (DE-627)ELV009686495 (ELSEVIER)S0030-3992(22)00629-6 DE-627 ger DE-627 rda eng 530 620 VZ 50.37 bkl 53.75 bkl 33.18 bkl 33.38 bkl Wang, Shiling verfasserin aut Scanning strategy for surface defects evaluation of large fine optical components 2022 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically. Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning Sun, Huanyu verfasserin aut Hu, Xiaobo verfasserin aut Zou, Sirui verfasserin aut Guo, Shiwei verfasserin aut Wang, Hongxia verfasserin aut Sun, Feng verfasserin aut Cheng, Xinglei verfasserin aut Zhang, Junan verfasserin aut Liu, Dong verfasserin aut Enthalten in Optics & laser technology Amsterdam [u.a.] : Elsevier Science, 1971 156 Online-Ressource (DE-627)319950689 (DE-600)2000654-8 (DE-576)255266731 1879-2545 nnns volume:156 GBV_USEFLAG_U SYSFLAG_U GBV_ELV GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_224 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2038 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2336 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4313 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4338 GBV_ILN_4393 50.37 Technische Optik VZ 53.75 Optische Nachrichtentechnik VZ 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ AR 156
language	English
source	Enthalten in Optics & laser technology 156 volume:156
sourceStr	Enthalten in Optics & laser technology 156 volume:156
format_phy_str_mv	Article
bklname	Technische Optik Optische Nachrichtentechnik Optik Quantenoptik nichtlineare Optik
institution	findex.gbv.de
topic_facet	Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning
dewey-raw	530
isfreeaccess_bool	false
container_title	Optics & laser technology
authorswithroles_txt_mv	Wang, Shiling @@aut@@ Sun, Huanyu @@aut@@ Hu, Xiaobo @@aut@@ Zou, Sirui @@aut@@ Guo, Shiwei @@aut@@ Wang, Hongxia @@aut@@ Sun, Feng @@aut@@ Cheng, Xinglei @@aut@@ Zhang, Junan @@aut@@ Liu, Dong @@aut@@
publishDateDaySort_date	2022-01-01T00:00:00Z
hierarchy_top_id	319950689
dewey-sort	3530
id	ELV009686495
language_de	englisch
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author	Wang, Shiling
spellingShingle	Wang, Shiling ddc 530 bkl 50.37 bkl 53.75 bkl 33.18 bkl 33.38 misc Optical components misc Defect detection misc Dark field microscopic imaging misc Sub-region and sub-aperture scanning Scanning strategy for surface defects evaluation of large fine optical components
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topic_title	530 620 VZ 50.37 bkl 53.75 bkl 33.18 bkl 33.38 bkl Scanning strategy for surface defects evaluation of large fine optical components Optical components Defect detection Dark field microscopic imaging Sub-region and sub-aperture scanning
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title	Scanning strategy for surface defects evaluation of large fine optical components
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title_full	Scanning strategy for surface defects evaluation of large fine optical components
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title_sort	scanning strategy for surface defects evaluation of large fine optical components
title_auth	Scanning strategy for surface defects evaluation of large fine optical components
abstract	Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically.
abstractGer	Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically.
abstract_unstemmed	Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aperture of the test parts and sub-aperture scanning is usually employed to increase the detection aperture while ensuring the system resolution. The problems that classic “S” Shape Sub-Aperture (SSSA) strategy faces are the high positioning accuracy requirement for the translation stage and the time-consuming processing of huge number of sub-apertures. Herein, a Sub-Region and Sub-Aperture (SRSA) scanning strategy is proposed. It divides the aperture of test part into sub-regions. Within each sub-region, classic scanning strategies and stitching methods can be employed the same time when next sub-region is being scanned. The whole aperture of the test part can be obtained when all the sub-regions are stitched together. Thus the positioning accuracy requirement of translation stage is reduced from the whole aperture to a sub-region while most of the sub-aperture stitching and processing time is covered within the scanning process. The relationship between the positioning accuracy of translation stage and the sizes of sub-aperture/sub-region is discussed in detail. Comparison experiments show the superiority of the proposed SRSA scanning strategy with which large-aperture, high precision scanning detection of large-aperture optical components can be accomplished efficiently and economically.
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title_short	Scanning strategy for surface defects evaluation of large fine optical components
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author2	Sun, Huanyu Hu, Xiaobo Zou, Sirui Guo, Shiwei Wang, Hongxia Sun, Feng Cheng, Xinglei Zhang, Junan Liu, Dong
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Scanning strategy for surface defects evaluation of large fine optical components

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