Scanning strategy for surface defects evaluation of large fine optical components

Defects, such as scratches and digs etc., play an important role in quality control of fine optical components. Dark field microscopic imaging has become one of the most commonly means for surface defects detection. However, the imaging field of view is very limited compared with the increasing aper...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Wang, Shiling [verfasserIn]

Sun, Huanyu [verfasserIn]

Hu, Xiaobo [verfasserIn]

Zou, Sirui [verfasserIn]

Guo, Shiwei [verfasserIn]

Wang, Hongxia [verfasserIn]

Sun, Feng [verfasserIn]

Cheng, Xinglei [verfasserIn]

Zhang, Junan [verfasserIn]

Liu, Dong [verfasserIn]

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2022

Schlagwörter:

Optical components

Defect detection

Dark field microscopic imaging

Sub-region and sub-aperture scanning

Übergeordnetes Werk:

Enthalten in: Optics & laser technology - Amsterdam [u.a.] : Elsevier Science, 1971, 156

Übergeordnetes Werk:

volume:156

DOI / URN:

10.1016/j.optlastec.2022.108473

Katalog-ID:

ELV009686495

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