Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition
• Mechanical and optical properties of films produced by PECVD and PIIID films were compared. The films studied were a-C:H, a-C:H:F, a-C:H:N, a-C:H:Cl and a-C:H:Si:O. • Except for the a-C:H:Si:O films, the PIIID films were thinner, possess refractive indices greater than those of the PECVD films, an...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Turri, Rafael G. [verfasserIn] |
|---|
| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2013 |
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| Schlagwörter: |
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| Umfang: |
8 |
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| Übergeordnetes Werk: |
Enthalten in: Characterising shape patterns using features derived from best-fitting ellipsoids - Gontar, Amelia ELSEVIER, 2018, a journal devoted to applied physics and chemistry of surfaces and interfaces, Amsterdam |
|---|---|
| Übergeordnetes Werk: |
volume:280 ; year:2013 ; day:1 ; month:09 ; pages:474-481 ; extent:8 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.apsusc.2013.05.013 |
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| 520 | |a • Mechanical and optical properties of films produced by PECVD and PIIID films were compared. The films studied were a-C:H, a-C:H:F, a-C:H:N, a-C:H:Cl and a-C:H:Si:O. • Except for the a-C:H:Si:O films, the PIIID films were thinner, possess refractive indices greater than those of the PECVD films, and have comparable or greater optical gaps. • The hardness of a-C:H:Cl films was increased from about 1.0 to 3.0GPa upon ion implantation. | ||
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| 650 | 7 | |a Surface energy |2 Elsevier | |
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Characterising shape patterns using features derived from best-fitting ellipsoids |
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Characterising shape patterns using features derived from best-fitting ellipsoids |
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eng |
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2013 |
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Turri, Rafael G. |
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Elektronische Aufsätze |
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Turri, Rafael G. |
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10.1016/j.apsusc.2013.05.013 |
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670 530 660 000 150 |
| title_sort |
optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition |
| title_auth |
Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition |
| abstract |
• Mechanical and optical properties of films produced by PECVD and PIIID films were compared. The films studied were a-C:H, a-C:H:F, a-C:H:N, a-C:H:Cl and a-C:H:Si:O. • Except for the a-C:H:Si:O films, the PIIID films were thinner, possess refractive indices greater than those of the PECVD films, and have comparable or greater optical gaps. • The hardness of a-C:H:Cl films was increased from about 1.0 to 3.0GPa upon ion implantation. |
| abstractGer |
• Mechanical and optical properties of films produced by PECVD and PIIID films were compared. The films studied were a-C:H, a-C:H:F, a-C:H:N, a-C:H:Cl and a-C:H:Si:O. • Except for the a-C:H:Si:O films, the PIIID films were thinner, possess refractive indices greater than those of the PECVD films, and have comparable or greater optical gaps. • The hardness of a-C:H:Cl films was increased from about 1.0 to 3.0GPa upon ion implantation. |
| abstract_unstemmed |
• Mechanical and optical properties of films produced by PECVD and PIIID films were compared. The films studied were a-C:H, a-C:H:F, a-C:H:N, a-C:H:Cl and a-C:H:Si:O. • Except for the a-C:H:Si:O films, the PIIID films were thinner, possess refractive indices greater than those of the PECVD films, and have comparable or greater optical gaps. • The hardness of a-C:H:Cl films was increased from about 1.0 to 3.0GPa upon ion implantation. |
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| title_short |
Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition |
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https://doi.org/10.1016/j.apsusc.2013.05.013 |
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Santos, Ricardo M. Rangel, Elidiane C. da Cruz, Nilson C. Bortoleto, José R.R. Dias da Silva, José H. Antonio, César Augusto Durrant, Steven F. |
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Santos, Ricardo M. Rangel, Elidiane C. da Cruz, Nilson C. Bortoleto, José R.R. Dias da Silva, José H. Antonio, César Augusto Durrant, Steven F. |
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