Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers
We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Soares, T.P. [verfasserIn] |
|---|
| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2013transfer abstract |
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| Umfang: |
6 |
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| Übergeordnetes Werk: |
Enthalten in: A high efficiency solar steam generation system with using residual heat to enhance steam escape - Bai, Binglin ELSEVIER, 2020, Amsterdam [u.a.] |
|---|---|
| Übergeordnetes Werk: |
volume:237 ; year:2013 ; day:25 ; month:12 ; pages:170-175 ; extent:6 |
| Links: |
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| DOI / URN: |
10.1016/j.surfcoat.2013.09.061 |
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ELV016755936 |
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| 245 | 1 | 0 | |a Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers |
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| 520 | |a We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. | ||
| 520 | |a We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. | ||
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| 700 | 1 | |a Soares, G.V. |4 oth | |
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| 700 | 1 | |a Baumvol, I.J.R. |4 oth | |
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10.1016/j.surfcoat.2013.09.061 doi GBVA2013007000030.pica (DE-627)ELV016755936 (ELSEVIER)S0257-8972(13)00924-9 DE-627 ger DE-627 rakwb eng 620 670 620 DE-600 670 DE-600 570 690 VZ 58.51 bkl Soares, T.P. verfasserin aut Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers 2013transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. Aguzzoli, C. oth Soares, G.V. oth Figueroa, C.A. oth Baumvol, I.J.R. oth Enthalten in Elsevier Science Bai, Binglin ELSEVIER A high efficiency solar steam generation system with using residual heat to enhance steam escape 2020 Amsterdam [u.a.] (DE-627)ELV004415906 volume:237 year:2013 day:25 month:12 pages:170-175 extent:6 https://doi.org/10.1016/j.surfcoat.2013.09.061 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA 58.51 Abwassertechnik Wasseraufbereitung VZ AR 237 2013 25 1225 170-175 6 045F 620 |
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10.1016/j.surfcoat.2013.09.061 doi GBVA2013007000030.pica (DE-627)ELV016755936 (ELSEVIER)S0257-8972(13)00924-9 DE-627 ger DE-627 rakwb eng 620 670 620 DE-600 670 DE-600 570 690 VZ 58.51 bkl Soares, T.P. verfasserin aut Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers 2013transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. Aguzzoli, C. oth Soares, G.V. oth Figueroa, C.A. oth Baumvol, I.J.R. oth Enthalten in Elsevier Science Bai, Binglin ELSEVIER A high efficiency solar steam generation system with using residual heat to enhance steam escape 2020 Amsterdam [u.a.] (DE-627)ELV004415906 volume:237 year:2013 day:25 month:12 pages:170-175 extent:6 https://doi.org/10.1016/j.surfcoat.2013.09.061 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA 58.51 Abwassertechnik Wasseraufbereitung VZ AR 237 2013 25 1225 170-175 6 045F 620 |
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10.1016/j.surfcoat.2013.09.061 doi GBVA2013007000030.pica (DE-627)ELV016755936 (ELSEVIER)S0257-8972(13)00924-9 DE-627 ger DE-627 rakwb eng 620 670 620 DE-600 670 DE-600 570 690 VZ 58.51 bkl Soares, T.P. verfasserin aut Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers 2013transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. Aguzzoli, C. oth Soares, G.V. oth Figueroa, C.A. oth Baumvol, I.J.R. oth Enthalten in Elsevier Science Bai, Binglin ELSEVIER A high efficiency solar steam generation system with using residual heat to enhance steam escape 2020 Amsterdam [u.a.] (DE-627)ELV004415906 volume:237 year:2013 day:25 month:12 pages:170-175 extent:6 https://doi.org/10.1016/j.surfcoat.2013.09.061 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA 58.51 Abwassertechnik Wasseraufbereitung VZ AR 237 2013 25 1225 170-175 6 045F 620 |
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10.1016/j.surfcoat.2013.09.061 doi GBVA2013007000030.pica (DE-627)ELV016755936 (ELSEVIER)S0257-8972(13)00924-9 DE-627 ger DE-627 rakwb eng 620 670 620 DE-600 670 DE-600 570 690 VZ 58.51 bkl Soares, T.P. verfasserin aut Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers 2013transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. Aguzzoli, C. oth Soares, G.V. oth Figueroa, C.A. oth Baumvol, I.J.R. oth Enthalten in Elsevier Science Bai, Binglin ELSEVIER A high efficiency solar steam generation system with using residual heat to enhance steam escape 2020 Amsterdam [u.a.] (DE-627)ELV004415906 volume:237 year:2013 day:25 month:12 pages:170-175 extent:6 https://doi.org/10.1016/j.surfcoat.2013.09.061 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA 58.51 Abwassertechnik Wasseraufbereitung VZ AR 237 2013 25 1225 170-175 6 045F 620 |
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10.1016/j.surfcoat.2013.09.061 doi GBVA2013007000030.pica (DE-627)ELV016755936 (ELSEVIER)S0257-8972(13)00924-9 DE-627 ger DE-627 rakwb eng 620 670 620 DE-600 670 DE-600 570 690 VZ 58.51 bkl Soares, T.P. verfasserin aut Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers 2013transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. Aguzzoli, C. oth Soares, G.V. oth Figueroa, C.A. oth Baumvol, I.J.R. oth Enthalten in Elsevier Science Bai, Binglin ELSEVIER A high efficiency solar steam generation system with using residual heat to enhance steam escape 2020 Amsterdam [u.a.] (DE-627)ELV004415906 volume:237 year:2013 day:25 month:12 pages:170-175 extent:6 https://doi.org/10.1016/j.surfcoat.2013.09.061 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA 58.51 Abwassertechnik Wasseraufbereitung VZ AR 237 2013 25 1225 170-175 6 045F 620 |
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620 670 620 DE-600 670 DE-600 570 690 VZ 58.51 bkl Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers |
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Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers |
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Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers |
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Soares, T.P. |
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A high efficiency solar steam generation system with using residual heat to enhance steam escape |
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physicochemical and mechanical properties of crystalline/amorphous crn/si3n4 multilayers |
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Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers |
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We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. |
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We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. |
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We investigated the mechanical and physicochemical properties of CrN/Si3N4 multilayered coatings in the bilayer period interval from 2 to 10nm, produced by depositing the thin film multilayer structure by reactive sputtering at 300°C, a temperature superior to those used in previously reported works on this specific structure. This resulted in an appreciable increase in hardness for a bilayer period around 4nm, as well as a corresponding increase in the resistance to plastic deformation of the coating for bilayer periods around 4 to 6nm. Various physicochemical characterization techniques used here indicated that the individual CrN and Si3N4 layers were stoichiometric and the interfaces of the multilayer structures were abrupt. The Si3N4 layers were amorphous while the CrN ones were polycrystalline. Furthermore, Si was mainly bonded to N as Si3N4, whereas Cr was bonded as CrN and chromium oxides. |
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Physicochemical and mechanical properties of crystalline/amorphous CrN/Si3N4 multilayers |
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