Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition

Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Wang, Fangwei [verfasserIn]

Chen, Lei

Wang, Yujin

Yao, Mianyi

Hao, Sue

Ouyang, Jiahu

Huang, Zhenkun

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2017transfer abstract

Schlagwörter:

Composite coating

Morphology

Chemical vapor deposition

Mechanism

Umfang:

6

Übergeordnetes Werk:

Enthalten in: Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration - Rey, F. ELSEVIER, 2018, Amsterdam [u.a.]

Übergeordnetes Werk:

volume:43 ; year:2017 ; number:2 ; day:1 ; month:02 ; pages:2853-2858 ; extent:6

Links:

Volltext

DOI / URN:

10.1016/j.ceramint.2016.10.187

Katalog-ID:

ELV020149581

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