Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition
Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Wang, Fangwei [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2017transfer abstract |
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| Schlagwörter: |
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| Umfang: |
6 |
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| Übergeordnetes Werk: |
Enthalten in: Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration - Rey, F. ELSEVIER, 2018, Amsterdam [u.a.] |
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| Übergeordnetes Werk: |
volume:43 ; year:2017 ; number:2 ; day:1 ; month:02 ; pages:2853-2858 ; extent:6 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.ceramint.2016.10.187 |
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ELV020149581 |
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| 245 | 1 | 0 | |a Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition |
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| 520 | |a Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. | ||
| 520 | |a Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. | ||
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| 700 | 1 | |a Chen, Lei |4 oth | |
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10.1016/j.ceramint.2016.10.187 doi GBV00000000000120A.pica (DE-627)ELV020149581 (ELSEVIER)S0272-8842(16)31939-3 DE-627 ger DE-627 rakwb eng 670 670 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Wang, Fangwei verfasserin aut Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition 2017transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Composite coating Elsevier Morphology Elsevier Chemical vapor deposition Elsevier Mechanism Elsevier Chen, Lei oth Wang, Yujin oth Yao, Mianyi oth Hao, Sue oth Ouyang, Jiahu oth Huang, Zhenkun oth Enthalten in Elsevier Science Rey, F. ELSEVIER Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration 2018 Amsterdam [u.a.] (DE-627)ELV000899798 volume:43 year:2017 number:2 day:1 month:02 pages:2853-2858 extent:6 https://doi.org/10.1016/j.ceramint.2016.10.187 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 43 2017 2 1 0201 2853-2858 6 045F 670 |
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10.1016/j.ceramint.2016.10.187 doi GBV00000000000120A.pica (DE-627)ELV020149581 (ELSEVIER)S0272-8842(16)31939-3 DE-627 ger DE-627 rakwb eng 670 670 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Wang, Fangwei verfasserin aut Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition 2017transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Composite coating Elsevier Morphology Elsevier Chemical vapor deposition Elsevier Mechanism Elsevier Chen, Lei oth Wang, Yujin oth Yao, Mianyi oth Hao, Sue oth Ouyang, Jiahu oth Huang, Zhenkun oth Enthalten in Elsevier Science Rey, F. ELSEVIER Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration 2018 Amsterdam [u.a.] (DE-627)ELV000899798 volume:43 year:2017 number:2 day:1 month:02 pages:2853-2858 extent:6 https://doi.org/10.1016/j.ceramint.2016.10.187 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 43 2017 2 1 0201 2853-2858 6 045F 670 |
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10.1016/j.ceramint.2016.10.187 doi GBV00000000000120A.pica (DE-627)ELV020149581 (ELSEVIER)S0272-8842(16)31939-3 DE-627 ger DE-627 rakwb eng 670 670 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Wang, Fangwei verfasserin aut Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition 2017transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Composite coating Elsevier Morphology Elsevier Chemical vapor deposition Elsevier Mechanism Elsevier Chen, Lei oth Wang, Yujin oth Yao, Mianyi oth Hao, Sue oth Ouyang, Jiahu oth Huang, Zhenkun oth Enthalten in Elsevier Science Rey, F. ELSEVIER Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration 2018 Amsterdam [u.a.] (DE-627)ELV000899798 volume:43 year:2017 number:2 day:1 month:02 pages:2853-2858 extent:6 https://doi.org/10.1016/j.ceramint.2016.10.187 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 43 2017 2 1 0201 2853-2858 6 045F 670 |
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10.1016/j.ceramint.2016.10.187 doi GBV00000000000120A.pica (DE-627)ELV020149581 (ELSEVIER)S0272-8842(16)31939-3 DE-627 ger DE-627 rakwb eng 670 670 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Wang, Fangwei verfasserin aut Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition 2017transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Composite coating Elsevier Morphology Elsevier Chemical vapor deposition Elsevier Mechanism Elsevier Chen, Lei oth Wang, Yujin oth Yao, Mianyi oth Hao, Sue oth Ouyang, Jiahu oth Huang, Zhenkun oth Enthalten in Elsevier Science Rey, F. ELSEVIER Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration 2018 Amsterdam [u.a.] (DE-627)ELV000899798 volume:43 year:2017 number:2 day:1 month:02 pages:2853-2858 extent:6 https://doi.org/10.1016/j.ceramint.2016.10.187 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 43 2017 2 1 0201 2853-2858 6 045F 670 |
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10.1016/j.ceramint.2016.10.187 doi GBV00000000000120A.pica (DE-627)ELV020149581 (ELSEVIER)S0272-8842(16)31939-3 DE-627 ger DE-627 rakwb eng 670 670 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Wang, Fangwei verfasserin aut Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition 2017transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. Composite coating Elsevier Morphology Elsevier Chemical vapor deposition Elsevier Mechanism Elsevier Chen, Lei oth Wang, Yujin oth Yao, Mianyi oth Hao, Sue oth Ouyang, Jiahu oth Huang, Zhenkun oth Enthalten in Elsevier Science Rey, F. ELSEVIER Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration 2018 Amsterdam [u.a.] (DE-627)ELV000899798 volume:43 year:2017 number:2 day:1 month:02 pages:2853-2858 extent:6 https://doi.org/10.1016/j.ceramint.2016.10.187 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 43 2017 2 1 0201 2853-2858 6 045F 670 |
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Enthalten in Soil and water bioengineering: Practice and research needs for reconciling natural hazard control and ecological restoration Amsterdam [u.a.] volume:43 year:2017 number:2 day:1 month:02 pages:2853-2858 extent:6 |
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effect of deposition time on growth of zrc/sic composite coating synthesized by low pressure chemical vapor deposition |
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Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition |
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Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. |
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Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. |
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Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail. |
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