Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography
The hybrid cleaning process for UV cured resin removal.
Gespeichert in:
| Autor*in: |
Kim, Min-Su [verfasserIn] |
|---|
| Format: |
E-Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
2014 |
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| Schlagwörter: |
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| Umfang: |
5 |
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| Übergeordnetes Werk: |
Enthalten in: Brain emotional learning impedance control of uncertain nonlinear systems with time delay: Experiments on a hybrid elastic joint robot in telesurgery - Souzanchi-K, M. ELSEVIER, 2021, [S.l.] |
|---|---|
| Übergeordnetes Werk: |
volume:114 ; year:2014 ; pages:126-130 ; extent:5 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.mee.2013.05.005 |
|---|
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ELV022447423 |
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