Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83MHz megasonic of interest to wafer cleaning
• The acoustic bubble growth rate of gas dissolved waters is theoretically calculated. • The acoustic bubble growth rate depends on the physical properties of dissolved gas. • The higher growth rate of acoustic bubble, the stronger cavitation intensity. • H2-DIW has a higher PRE and more pattern dam...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Kang, Bong-Kyun [verfasserIn] |
|---|
| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2014 |
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| Schlagwörter: |
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| Umfang: |
8 |
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| Übergeordnetes Werk: |
Enthalten in: Apparent Progression of Presbyopia After Laser In Situ Keratomileusis in Patients With Early Presbyopia - Tsuneyoshi, Yukari ELSEVIER, 2014, Amsterdam [u.a.] |
|---|---|
| Übergeordnetes Werk: |
volume:21 ; year:2014 ; number:4 ; pages:1496-1503 ; extent:8 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.ultsonch.2014.01.012 |
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ELV02295998X |
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| 245 | 1 | 0 | |a Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83MHz megasonic of interest to wafer cleaning |
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| 520 | |a • The acoustic bubble growth rate of gas dissolved waters is theoretically calculated. • The acoustic bubble growth rate depends on the physical properties of dissolved gas. • The higher growth rate of acoustic bubble, the stronger cavitation intensity. • H2-DIW has a higher PRE and more pattern damages due to a higher bubble growth rate. • The transient cavitation behavior is considerably reduced in Ar-DIW with high frequency megasonic (0.83MHz). | ||
| 650 | 7 | |a Acoustic bubble growth rate |2 Elsevier | |
| 650 | 7 | |a Pattern damage |2 Elsevier | |
| 650 | 7 | |a Megasonic cleaning |2 Elsevier | |
| 650 | 7 | |a Gas dissolved water |2 Elsevier | |
| 650 | 7 | |a Acoustic cavitation |2 Elsevier | |
| 650 | 7 | |a Particle removal |2 Elsevier | |
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| 700 | 1 | |a Park, Jin-Goo |4 oth | |
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effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83mhz megasonic of interest to wafer cleaning |
| title_auth |
Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83MHz megasonic of interest to wafer cleaning |
| abstract |
• The acoustic bubble growth rate of gas dissolved waters is theoretically calculated. • The acoustic bubble growth rate depends on the physical properties of dissolved gas. • The higher growth rate of acoustic bubble, the stronger cavitation intensity. • H2-DIW has a higher PRE and more pattern damages due to a higher bubble growth rate. • The transient cavitation behavior is considerably reduced in Ar-DIW with high frequency megasonic (0.83MHz). |
| abstractGer |
• The acoustic bubble growth rate of gas dissolved waters is theoretically calculated. • The acoustic bubble growth rate depends on the physical properties of dissolved gas. • The higher growth rate of acoustic bubble, the stronger cavitation intensity. • H2-DIW has a higher PRE and more pattern damages due to a higher bubble growth rate. • The transient cavitation behavior is considerably reduced in Ar-DIW with high frequency megasonic (0.83MHz). |
| abstract_unstemmed |
• The acoustic bubble growth rate of gas dissolved waters is theoretically calculated. • The acoustic bubble growth rate depends on the physical properties of dissolved gas. • The higher growth rate of acoustic bubble, the stronger cavitation intensity. • H2-DIW has a higher PRE and more pattern damages due to a higher bubble growth rate. • The transient cavitation behavior is considerably reduced in Ar-DIW with high frequency megasonic (0.83MHz). |
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4 |
| title_short |
Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83MHz megasonic of interest to wafer cleaning |
| url |
https://doi.org/10.1016/j.ultsonch.2014.01.012 |
| remote_bool |
true |
| author2 |
Kim, Min-Su Park, Jin-Goo |
| author2Str |
Kim, Min-Su Park, Jin-Goo |
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| doi_str |
10.1016/j.ultsonch.2014.01.012 |
| up_date |
2024-07-06T17:36:01.620Z |
| _version_ |
1803852040499101697 |
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