A prism-based non-linear optical readout method for MEMS cantilever arrays

• A single right-angle prism was used for the optical readout of micro-electro-mechanical systems (MEMS) cantilever arrays. • The deflections of the cantilevers were measured by using the non-linear reflectivity arisen from the internal reflection. • The non-linear nature of the detection enables th...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Adiyan, Ulas [verfasserIn]

Civitci, Fehmi

Yaralioglu, Goksen G.

Urey, Hakan

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2016transfer abstract

Schlagwörter:

Critical angle

MEMS cantilever sensor arrays

Non-linear optical readout

Self-sustained oscillations

Umfang:

10

Übergeordnetes Werk:

Enthalten in: Antioxidant activity of propolis extracts from Serbia: A polarographic approach - 2012, Amsterdam [u.a.]

Übergeordnetes Werk:

volume:250 ; year:2016 ; day:15 ; month:10 ; pages:219-228 ; extent:10

Links:

Volltext

DOI / URN:

10.1016/j.sna.2016.09.018

Katalog-ID:

ELV029864925

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