Hybrid co-deposition of mixed-valent molybdenum–germanium oxides (MoxGeyOz): A route to tunable optical transmission
Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variat...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Murphy, Neil R. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2015transfer abstract |
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| Umfang: |
12 |
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| Übergeordnetes Werk: |
Enthalten in: Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment - Zucker, Ines ELSEVIER, 2017, international journal on the science and technology of condensed matter films, Amsterdam [u.a.] |
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| Übergeordnetes Werk: |
volume:590 ; year:2015 ; day:1 ; month:09 ; pages:248-259 ; extent:12 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.tsf.2015.08.005 |
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ELV03430360X |
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| 520 | |a Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. | ||
| 520 | |a Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. | ||
| 700 | 1 | |a Sun, Lirong |4 oth | |
| 700 | 1 | |a Jones, John G. |4 oth | |
| 700 | 1 | |a Grant, John T. |4 oth | |
| 773 | 0 | 8 | |i Enthalten in |n Elsevier |a Zucker, Ines ELSEVIER |t Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment |d 2017 |d international journal on the science and technology of condensed matter films |g Amsterdam [u.a.] |w (DE-627)ELV000692654 |
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10.1016/j.tsf.2015.08.005 doi GBVA2015001000010.pica (DE-627)ELV03430360X (ELSEVIER)S0040-6090(15)00753-1 DE-627 ger DE-627 rakwb eng 070 660 070 DE-600 660 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Murphy, Neil R. verfasserin aut Hybrid co-deposition of mixed-valent molybdenum–germanium oxides (MoxGeyOz): A route to tunable optical transmission 2015transfer abstract 12 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Sun, Lirong oth Jones, John G. oth Grant, John T. oth Enthalten in Elsevier Zucker, Ines ELSEVIER Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment 2017 international journal on the science and technology of condensed matter films Amsterdam [u.a.] (DE-627)ELV000692654 volume:590 year:2015 day:1 month:09 pages:248-259 extent:12 https://doi.org/10.1016/j.tsf.2015.08.005 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 590 2015 1 0901 248-259 12 045F 070 |
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10.1016/j.tsf.2015.08.005 doi GBVA2015001000010.pica (DE-627)ELV03430360X (ELSEVIER)S0040-6090(15)00753-1 DE-627 ger DE-627 rakwb eng 070 660 070 DE-600 660 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Murphy, Neil R. verfasserin aut Hybrid co-deposition of mixed-valent molybdenum–germanium oxides (MoxGeyOz): A route to tunable optical transmission 2015transfer abstract 12 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Sun, Lirong oth Jones, John G. oth Grant, John T. oth Enthalten in Elsevier Zucker, Ines ELSEVIER Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment 2017 international journal on the science and technology of condensed matter films Amsterdam [u.a.] (DE-627)ELV000692654 volume:590 year:2015 day:1 month:09 pages:248-259 extent:12 https://doi.org/10.1016/j.tsf.2015.08.005 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 590 2015 1 0901 248-259 12 045F 070 |
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10.1016/j.tsf.2015.08.005 doi GBVA2015001000010.pica (DE-627)ELV03430360X (ELSEVIER)S0040-6090(15)00753-1 DE-627 ger DE-627 rakwb eng 070 660 070 DE-600 660 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Murphy, Neil R. verfasserin aut Hybrid co-deposition of mixed-valent molybdenum–germanium oxides (MoxGeyOz): A route to tunable optical transmission 2015transfer abstract 12 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Sun, Lirong oth Jones, John G. oth Grant, John T. oth Enthalten in Elsevier Zucker, Ines ELSEVIER Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment 2017 international journal on the science and technology of condensed matter films Amsterdam [u.a.] (DE-627)ELV000692654 volume:590 year:2015 day:1 month:09 pages:248-259 extent:12 https://doi.org/10.1016/j.tsf.2015.08.005 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 590 2015 1 0901 248-259 12 045F 070 |
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10.1016/j.tsf.2015.08.005 doi GBVA2015001000010.pica (DE-627)ELV03430360X (ELSEVIER)S0040-6090(15)00753-1 DE-627 ger DE-627 rakwb eng 070 660 070 DE-600 660 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Murphy, Neil R. verfasserin aut Hybrid co-deposition of mixed-valent molybdenum–germanium oxides (MoxGeyOz): A route to tunable optical transmission 2015transfer abstract 12 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Sun, Lirong oth Jones, John G. oth Grant, John T. oth Enthalten in Elsevier Zucker, Ines ELSEVIER Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment 2017 international journal on the science and technology of condensed matter films Amsterdam [u.a.] (DE-627)ELV000692654 volume:590 year:2015 day:1 month:09 pages:248-259 extent:12 https://doi.org/10.1016/j.tsf.2015.08.005 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 590 2015 1 0901 248-259 12 045F 070 |
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10.1016/j.tsf.2015.08.005 doi GBVA2015001000010.pica (DE-627)ELV03430360X (ELSEVIER)S0040-6090(15)00753-1 DE-627 ger DE-627 rakwb eng 070 660 070 DE-600 660 DE-600 333.7 610 VZ 43.12 bkl 43.13 bkl 44.13 bkl Murphy, Neil R. verfasserin aut Hybrid co-deposition of mixed-valent molybdenum–germanium oxides (MoxGeyOz): A route to tunable optical transmission 2015transfer abstract 12 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. Sun, Lirong oth Jones, John G. oth Grant, John T. oth Enthalten in Elsevier Zucker, Ines ELSEVIER Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment 2017 international journal on the science and technology of condensed matter films Amsterdam [u.a.] (DE-627)ELV000692654 volume:590 year:2015 day:1 month:09 pages:248-259 extent:12 https://doi.org/10.1016/j.tsf.2015.08.005 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA SSG-OPC-GGO 43.12 Umweltchemie VZ 43.13 Umwelttoxikologie VZ 44.13 Medizinische Ökologie VZ AR 590 2015 1 0901 248-259 12 045F 070 |
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Hybrid co-deposition of mixed-valent molybdenum–germanium oxides (MoxGeyOz): A route to tunable optical transmission |
| abstract |
Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. |
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Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. |
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Mixed-valent oxides of molybdenum and germanium were deposited simultaneously using reactive magnetron co-deposition within an oxygen–argon environment. The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared. |
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The films' stoichiometry, optical, and physical properties were varied through changes in oxygen partial pressure induced by systematic variation of the potential applied to the molybdenum cathode. The oxygen partial pressure was determined from the drop in pressure as measured by a capacitance manometer, assuming constant argon partial pressure. To facilitate deposition, a constant power of 100W DC was applied to the germanium cathode, while power was applied to the molybdenum target using a modulated pulse power supply. Modulated pulse power magnetron sputtering was used due to its ability to generate high target power densities, allowing for rapid reduction of oxygen on the surface of the “oxygen poisoned” molybdenum cathode, as well as for its highly metallic plasma resulting in increased oxygen-gettering capability. Changes in the modulated pulse power supply's capacitor bank voltage load, stepped from settings of 300 to 380V, resulted in films ranging from mixtures of transparent GeO2 (Ge4+) and MoO3 (Mo6+) to the introduction of various absorptive ionic species including Mo5+, Mo4+, Ge2+ and Ge0, as determined from X-ray photoelectron spectroscopy. The presence of each of the aforementioned ions results in characteristic changes in the films' band energies and optical absorption. As deposited MoxGeyOz thin films grown using this method have been shown to have optical gap energies that are able to be tailored between 3.57eV and 0.18eV, spanning useful ranges for devices operating in the visible and near-infrared.</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sun, Lirong</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jones, John G.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Grant, John T.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="n">Elsevier</subfield><subfield code="a">Zucker, Ines ELSEVIER</subfield><subfield code="t">Formation and degradation of N-oxide venlafaxine during ozonation and biological post-treatment</subfield><subfield code="d">2017</subfield><subfield code="d">international journal on the science and technology of condensed matter films</subfield><subfield code="g">Amsterdam [u.a.]</subfield><subfield code="w">(DE-627)ELV000692654</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:590</subfield><subfield code="g">year:2015</subfield><subfield code="g">day:1</subfield><subfield code="g">month:09</subfield><subfield code="g">pages:248-259</subfield><subfield code="g">extent:12</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/j.tsf.2015.08.005</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHA</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OPC-GGO</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">43.12</subfield><subfield code="j">Umweltchemie</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">43.13</subfield><subfield code="j">Umwelttoxikologie</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">44.13</subfield><subfield code="j">Medizinische Ökologie</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">590</subfield><subfield code="j">2015</subfield><subfield code="b">1</subfield><subfield code="c">0901</subfield><subfield code="h">248-259</subfield><subfield code="g">12</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">070</subfield></datafield></record></collection>
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