Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials
Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Muñoz-Rojas, David [verfasserIn] |
|---|
| Format: |
E-Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
2017transfer abstract |
|---|
| Schlagwörter: |
|---|
| Umfang: |
10 |
|---|
| Übergeordnetes Werk: |
Enthalten in: On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces - Benner, Peter ELSEVIER, 2016transfer abstract, Amsterdam [u.a.] |
|---|---|
| Übergeordnetes Werk: |
volume:18 ; year:2017 ; number:7 ; pages:391-400 ; extent:10 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.crhy.2017.09.004 |
|---|
| Katalog-ID: |
ELV041209117 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | ELV041209117 | ||
| 003 | DE-627 | ||
| 005 | 20230625234018.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 180726s2017 xx |||||o 00| ||eng c | ||
| 024 | 7 | |a 10.1016/j.crhy.2017.09.004 |2 doi | |
| 028 | 5 | 2 | |a GBV00000000000046A.pica |
| 035 | |a (DE-627)ELV041209117 | ||
| 035 | |a (ELSEVIER)S1631-0705(17)30056-7 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | |a 530 |a 520 | |
| 082 | 0 | 4 | |a 530 |q DE-600 |
| 082 | 0 | 4 | |a 520 |q DE-600 |
| 082 | 0 | 4 | |a 510 |q VZ |
| 082 | 0 | 4 | |a 690 |q VZ |
| 082 | 0 | 4 | |a 530 |a 620 |q VZ |
| 084 | |a 52.56 |2 bkl | ||
| 100 | 1 | |a Muñoz-Rojas, David |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials |
| 264 | 1 | |c 2017transfer abstract | |
| 300 | |a 10 | ||
| 336 | |a nicht spezifiziert |b zzz |2 rdacontent | ||
| 337 | |a nicht spezifiziert |b z |2 rdamedia | ||
| 338 | |a nicht spezifiziert |b zu |2 rdacarrier | ||
| 520 | |a Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. | ||
| 520 | |a Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. | ||
| 650 | 7 | |a Thin films |2 Elsevier | |
| 650 | 7 | |a Energy applications |2 Elsevier | |
| 650 | 7 | |a Conformal coating |2 Elsevier | |
| 650 | 7 | |a Transparent conductive materials |2 Elsevier | |
| 650 | 7 | |a Spatial Atomic Layer Deposition |2 Elsevier | |
| 700 | 1 | |a Nguyen, Viet Huong |4 oth | |
| 700 | 1 | |a Masse de la Huerta, César |4 oth | |
| 700 | 1 | |a Aghazadehchors, Sara |4 oth | |
| 700 | 1 | |a Jiménez, Carmen |4 oth | |
| 700 | 1 | |a Bellet, Daniel |4 oth | |
| 773 | 0 | 8 | |i Enthalten in |n Elsevier Science |a Benner, Peter ELSEVIER |t On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces |d 2016transfer abstract |g Amsterdam [u.a.] |w (DE-627)ELV024880523 |
| 773 | 1 | 8 | |g volume:18 |g year:2017 |g number:7 |g pages:391-400 |g extent:10 |
| 856 | 4 | 0 | |u https://doi.org/10.1016/j.crhy.2017.09.004 |3 Volltext |
| 912 | |a GBV_USEFLAG_U | ||
| 912 | |a GBV_ELV | ||
| 912 | |a SYSFLAG_U | ||
| 912 | |a GBV_ILN_11 | ||
| 912 | |a GBV_ILN_20 | ||
| 912 | |a GBV_ILN_21 | ||
| 912 | |a GBV_ILN_22 | ||
| 912 | |a GBV_ILN_26 | ||
| 912 | |a GBV_ILN_40 | ||
| 912 | |a GBV_ILN_60 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_90 | ||
| 912 | |a GBV_ILN_100 | ||
| 912 | |a GBV_ILN_110 | ||
| 912 | |a GBV_ILN_120 | ||
| 912 | |a GBV_ILN_130 | ||
| 912 | |a GBV_ILN_185 | ||
| 912 | |a GBV_ILN_640 | ||
| 912 | |a GBV_ILN_2001 | ||
| 912 | |a GBV_ILN_2004 | ||
| 912 | |a GBV_ILN_2005 | ||
| 912 | |a GBV_ILN_2007 | ||
| 912 | |a GBV_ILN_2008 | ||
| 912 | |a GBV_ILN_2009 | ||
| 912 | |a GBV_ILN_2014 | ||
| 912 | |a GBV_ILN_2018 | ||
| 912 | |a GBV_ILN_2026 | ||
| 912 | |a GBV_ILN_2035 | ||
| 912 | |a GBV_ILN_2055 | ||
| 912 | |a GBV_ILN_2063 | ||
| 912 | |a GBV_ILN_2206 | ||
| 936 | b | k | |a 52.56 |j Regenerative Energieformen |j alternative Energieformen |q VZ |
| 951 | |a AR | ||
| 952 | |d 18 |j 2017 |e 7 |h 391-400 |g 10 | ||
| 953 | |2 045F |a 530 | ||
| author_variant |
d m r dmr |
|---|---|
| matchkey_str |
muozrojasdavidnguyenviethuongmassedelahu:2017----:ptaaoilyreoiinadnmrigoloeegmtrasplctotnweeainhtvlace |
| hierarchy_sort_str |
2017transfer abstract |
| bklnumber |
52.56 |
| publishDate |
2017 |
| allfields |
10.1016/j.crhy.2017.09.004 doi GBV00000000000046A.pica (DE-627)ELV041209117 (ELSEVIER)S1631-0705(17)30056-7 DE-627 ger DE-627 rakwb eng 530 520 530 DE-600 520 DE-600 510 VZ 690 VZ 530 620 VZ 52.56 bkl Muñoz-Rojas, David verfasserin aut Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials 2017transfer abstract 10 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition Elsevier Nguyen, Viet Huong oth Masse de la Huerta, César oth Aghazadehchors, Sara oth Jiménez, Carmen oth Bellet, Daniel oth Enthalten in Elsevier Science Benner, Peter ELSEVIER On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces 2016transfer abstract Amsterdam [u.a.] (DE-627)ELV024880523 volume:18 year:2017 number:7 pages:391-400 extent:10 https://doi.org/10.1016/j.crhy.2017.09.004 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_26 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_90 GBV_ILN_100 GBV_ILN_110 GBV_ILN_120 GBV_ILN_130 GBV_ILN_185 GBV_ILN_640 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2014 GBV_ILN_2018 GBV_ILN_2026 GBV_ILN_2035 GBV_ILN_2055 GBV_ILN_2063 GBV_ILN_2206 52.56 Regenerative Energieformen alternative Energieformen VZ AR 18 2017 7 391-400 10 045F 530 |
| spelling |
10.1016/j.crhy.2017.09.004 doi GBV00000000000046A.pica (DE-627)ELV041209117 (ELSEVIER)S1631-0705(17)30056-7 DE-627 ger DE-627 rakwb eng 530 520 530 DE-600 520 DE-600 510 VZ 690 VZ 530 620 VZ 52.56 bkl Muñoz-Rojas, David verfasserin aut Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials 2017transfer abstract 10 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition Elsevier Nguyen, Viet Huong oth Masse de la Huerta, César oth Aghazadehchors, Sara oth Jiménez, Carmen oth Bellet, Daniel oth Enthalten in Elsevier Science Benner, Peter ELSEVIER On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces 2016transfer abstract Amsterdam [u.a.] (DE-627)ELV024880523 volume:18 year:2017 number:7 pages:391-400 extent:10 https://doi.org/10.1016/j.crhy.2017.09.004 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_26 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_90 GBV_ILN_100 GBV_ILN_110 GBV_ILN_120 GBV_ILN_130 GBV_ILN_185 GBV_ILN_640 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2014 GBV_ILN_2018 GBV_ILN_2026 GBV_ILN_2035 GBV_ILN_2055 GBV_ILN_2063 GBV_ILN_2206 52.56 Regenerative Energieformen alternative Energieformen VZ AR 18 2017 7 391-400 10 045F 530 |
| allfields_unstemmed |
10.1016/j.crhy.2017.09.004 doi GBV00000000000046A.pica (DE-627)ELV041209117 (ELSEVIER)S1631-0705(17)30056-7 DE-627 ger DE-627 rakwb eng 530 520 530 DE-600 520 DE-600 510 VZ 690 VZ 530 620 VZ 52.56 bkl Muñoz-Rojas, David verfasserin aut Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials 2017transfer abstract 10 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition Elsevier Nguyen, Viet Huong oth Masse de la Huerta, César oth Aghazadehchors, Sara oth Jiménez, Carmen oth Bellet, Daniel oth Enthalten in Elsevier Science Benner, Peter ELSEVIER On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces 2016transfer abstract Amsterdam [u.a.] (DE-627)ELV024880523 volume:18 year:2017 number:7 pages:391-400 extent:10 https://doi.org/10.1016/j.crhy.2017.09.004 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_26 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_90 GBV_ILN_100 GBV_ILN_110 GBV_ILN_120 GBV_ILN_130 GBV_ILN_185 GBV_ILN_640 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2014 GBV_ILN_2018 GBV_ILN_2026 GBV_ILN_2035 GBV_ILN_2055 GBV_ILN_2063 GBV_ILN_2206 52.56 Regenerative Energieformen alternative Energieformen VZ AR 18 2017 7 391-400 10 045F 530 |
| allfieldsGer |
10.1016/j.crhy.2017.09.004 doi GBV00000000000046A.pica (DE-627)ELV041209117 (ELSEVIER)S1631-0705(17)30056-7 DE-627 ger DE-627 rakwb eng 530 520 530 DE-600 520 DE-600 510 VZ 690 VZ 530 620 VZ 52.56 bkl Muñoz-Rojas, David verfasserin aut Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials 2017transfer abstract 10 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition Elsevier Nguyen, Viet Huong oth Masse de la Huerta, César oth Aghazadehchors, Sara oth Jiménez, Carmen oth Bellet, Daniel oth Enthalten in Elsevier Science Benner, Peter ELSEVIER On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces 2016transfer abstract Amsterdam [u.a.] (DE-627)ELV024880523 volume:18 year:2017 number:7 pages:391-400 extent:10 https://doi.org/10.1016/j.crhy.2017.09.004 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_26 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_90 GBV_ILN_100 GBV_ILN_110 GBV_ILN_120 GBV_ILN_130 GBV_ILN_185 GBV_ILN_640 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2014 GBV_ILN_2018 GBV_ILN_2026 GBV_ILN_2035 GBV_ILN_2055 GBV_ILN_2063 GBV_ILN_2206 52.56 Regenerative Energieformen alternative Energieformen VZ AR 18 2017 7 391-400 10 045F 530 |
| allfieldsSound |
10.1016/j.crhy.2017.09.004 doi GBV00000000000046A.pica (DE-627)ELV041209117 (ELSEVIER)S1631-0705(17)30056-7 DE-627 ger DE-627 rakwb eng 530 520 530 DE-600 520 DE-600 510 VZ 690 VZ 530 620 VZ 52.56 bkl Muñoz-Rojas, David verfasserin aut Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials 2017transfer abstract 10 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition Elsevier Nguyen, Viet Huong oth Masse de la Huerta, César oth Aghazadehchors, Sara oth Jiménez, Carmen oth Bellet, Daniel oth Enthalten in Elsevier Science Benner, Peter ELSEVIER On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces 2016transfer abstract Amsterdam [u.a.] (DE-627)ELV024880523 volume:18 year:2017 number:7 pages:391-400 extent:10 https://doi.org/10.1016/j.crhy.2017.09.004 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_26 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_90 GBV_ILN_100 GBV_ILN_110 GBV_ILN_120 GBV_ILN_130 GBV_ILN_185 GBV_ILN_640 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2014 GBV_ILN_2018 GBV_ILN_2026 GBV_ILN_2035 GBV_ILN_2055 GBV_ILN_2063 GBV_ILN_2206 52.56 Regenerative Energieformen alternative Energieformen VZ AR 18 2017 7 391-400 10 045F 530 |
| language |
English |
| source |
Enthalten in On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces Amsterdam [u.a.] volume:18 year:2017 number:7 pages:391-400 extent:10 |
| sourceStr |
Enthalten in On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces Amsterdam [u.a.] volume:18 year:2017 number:7 pages:391-400 extent:10 |
| format_phy_str_mv |
Article |
| bklname |
Regenerative Energieformen alternative Energieformen |
| institution |
findex.gbv.de |
| topic_facet |
Thin films Energy applications Conformal coating Transparent conductive materials Spatial Atomic Layer Deposition |
| dewey-raw |
530 |
| isfreeaccess_bool |
false |
| container_title |
On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces |
| authorswithroles_txt_mv |
Muñoz-Rojas, David @@aut@@ Nguyen, Viet Huong @@oth@@ Masse de la Huerta, César @@oth@@ Aghazadehchors, Sara @@oth@@ Jiménez, Carmen @@oth@@ Bellet, Daniel @@oth@@ |
| publishDateDaySort_date |
2017-01-01T00:00:00Z |
| hierarchy_top_id |
ELV024880523 |
| dewey-sort |
3530 |
| id |
ELV041209117 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV041209117</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230625234018.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">180726s2017 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.crhy.2017.09.004</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">GBV00000000000046A.pica</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV041209117</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S1631-0705(17)30056-7</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">530</subfield><subfield code="a">520</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">520</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">690</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">52.56</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Muñoz-Rojas, David</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2017transfer abstract</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">10</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Thin films</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Energy applications</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Conformal coating</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Transparent conductive materials</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Spatial Atomic Layer Deposition</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nguyen, Viet Huong</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Masse de la Huerta, César</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Aghazadehchors, Sara</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jiménez, Carmen</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bellet, Daniel</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="n">Elsevier Science</subfield><subfield code="a">Benner, Peter ELSEVIER</subfield><subfield code="t">On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces</subfield><subfield code="d">2016transfer abstract</subfield><subfield code="g">Amsterdam [u.a.]</subfield><subfield code="w">(DE-627)ELV024880523</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:18</subfield><subfield code="g">year:2017</subfield><subfield code="g">number:7</subfield><subfield code="g">pages:391-400</subfield><subfield code="g">extent:10</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/j.crhy.2017.09.004</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_26</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_90</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_120</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_640</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2001</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2008</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2009</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2026</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2055</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2063</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2206</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">52.56</subfield><subfield code="j">Regenerative Energieformen</subfield><subfield code="j">alternative Energieformen</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">18</subfield><subfield code="j">2017</subfield><subfield code="e">7</subfield><subfield code="h">391-400</subfield><subfield code="g">10</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">530</subfield></datafield></record></collection>
|
| author |
Muñoz-Rojas, David |
| spellingShingle |
Muñoz-Rojas, David ddc 530 ddc 520 ddc 510 ddc 690 bkl 52.56 Elsevier Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials |
| authorStr |
Muñoz-Rojas, David |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)ELV024880523 |
| format |
electronic Article |
| dewey-ones |
530 - Physics 520 - Astronomy & allied sciences 510 - Mathematics 690 - Buildings 620 - Engineering & allied operations |
| delete_txt_mv |
keep |
| author_role |
aut |
| collection |
elsevier |
| remote_str |
true |
| illustrated |
Not Illustrated |
| topic_title |
530 520 530 DE-600 520 DE-600 510 VZ 690 VZ 530 620 VZ 52.56 bkl Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition Elsevier |
| topic |
ddc 530 ddc 520 ddc 510 ddc 690 bkl 52.56 Elsevier Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition |
| topic_unstemmed |
ddc 530 ddc 520 ddc 510 ddc 690 bkl 52.56 Elsevier Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition |
| topic_browse |
ddc 530 ddc 520 ddc 510 ddc 690 bkl 52.56 Elsevier Thin films Elsevier Energy applications Elsevier Conformal coating Elsevier Transparent conductive materials Elsevier Spatial Atomic Layer Deposition |
| format_facet |
Elektronische Aufsätze Aufsätze Elektronische Ressource |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
zu |
| author2_variant |
v h n vh vhn d l h c m dlhc dlhcm s a sa c j cj d b db |
| hierarchy_parent_title |
On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces |
| hierarchy_parent_id |
ELV024880523 |
| dewey-tens |
530 - Physics 520 - Astronomy 510 - Mathematics 690 - Building & construction 620 - Engineering |
| hierarchy_top_title |
On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)ELV024880523 |
| title |
Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials |
| ctrlnum |
(DE-627)ELV041209117 (ELSEVIER)S1631-0705(17)30056-7 |
| title_full |
Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials |
| author_sort |
Muñoz-Rojas, David |
| journal |
On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces |
| journalStr |
On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
500 - Science 600 - Technology |
| recordtype |
marc |
| publishDateSort |
2017 |
| contenttype_str_mv |
zzz |
| container_start_page |
391 |
| author_browse |
Muñoz-Rojas, David |
| container_volume |
18 |
| physical |
10 |
| class |
530 520 530 DE-600 520 DE-600 510 VZ 690 VZ 530 620 VZ 52.56 bkl |
| format_se |
Elektronische Aufsätze |
| author-letter |
Muñoz-Rojas, David |
| doi_str_mv |
10.1016/j.crhy.2017.09.004 |
| dewey-full |
530 520 510 690 620 |
| title_sort |
spatial atomic layer deposition (sald), an emerging tool for energy materials. application to new-generation photovoltaic devices and transparent conductive materials |
| title_auth |
Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials |
| abstract |
Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. |
| abstractGer |
Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. |
| abstract_unstemmed |
Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration. |
| collection_details |
GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_26 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_90 GBV_ILN_100 GBV_ILN_110 GBV_ILN_120 GBV_ILN_130 GBV_ILN_185 GBV_ILN_640 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2014 GBV_ILN_2018 GBV_ILN_2026 GBV_ILN_2035 GBV_ILN_2055 GBV_ILN_2063 GBV_ILN_2206 |
| container_issue |
7 |
| title_short |
Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials |
| url |
https://doi.org/10.1016/j.crhy.2017.09.004 |
| remote_bool |
true |
| author2 |
Nguyen, Viet Huong Masse de la Huerta, César Aghazadehchors, Sara Jiménez, Carmen Bellet, Daniel |
| author2Str |
Nguyen, Viet Huong Masse de la Huerta, César Aghazadehchors, Sara Jiménez, Carmen Bellet, Daniel |
| ppnlink |
ELV024880523 |
| mediatype_str_mv |
z |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| author2_role |
oth oth oth oth oth |
| doi_str |
10.1016/j.crhy.2017.09.004 |
| up_date |
2024-07-06T19:30:45.586Z |
| _version_ |
1803859258859585536 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV041209117</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230625234018.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">180726s2017 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.crhy.2017.09.004</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">GBV00000000000046A.pica</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV041209117</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S1631-0705(17)30056-7</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">530</subfield><subfield code="a">520</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">520</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">510</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">690</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">52.56</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Muñoz-Rojas, David</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2017transfer abstract</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">10</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Materials properties are the keystone of functional devices for energy including energy conversion, harvesting or storage. But to market new energy materials, the development of suitable processing methods allowing affordable prices is needed. Recently, a new approach to atomic layer deposition (ALD) has gained much momentum. This alternative approach is based on separating the precursors in space rather than in time, and has therefore been called Spatial ALD (SALD). With SALD, the purge steps typical of ALD are not needed and thus deposition rates a hundred times faster are achievable. Additionally, SALD can be easily performed at ambient atmosphere, thus it is easier and cheaper to scale up than conventional ALD. This opens the door to widespread industrial application of ALD for the deposition of energy materials for applications including solar energy, energy storage, or smart windows. SALD is presented here and examples of application to photovoltaics and transparent conductive materials are given. We show that SALD is capable of producing high-quality films fully suited for device integration.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Thin films</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Energy applications</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Conformal coating</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Transparent conductive materials</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Spatial Atomic Layer Deposition</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nguyen, Viet Huong</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Masse de la Huerta, César</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Aghazadehchors, Sara</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jiménez, Carmen</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bellet, Daniel</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="n">Elsevier Science</subfield><subfield code="a">Benner, Peter ELSEVIER</subfield><subfield code="t">On the solution of large-scale algebraic Riccati equations by using low-dimensional invariant subspaces</subfield><subfield code="d">2016transfer abstract</subfield><subfield code="g">Amsterdam [u.a.]</subfield><subfield code="w">(DE-627)ELV024880523</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:18</subfield><subfield code="g">year:2017</subfield><subfield code="g">number:7</subfield><subfield code="g">pages:391-400</subfield><subfield code="g">extent:10</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/j.crhy.2017.09.004</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_26</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_90</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_110</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_120</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_640</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2001</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2005</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2008</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2009</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2026</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2035</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2055</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2063</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2206</subfield></datafield><datafield tag="936" ind1="b" ind2="k"><subfield code="a">52.56</subfield><subfield code="j">Regenerative Energieformen</subfield><subfield code="j">alternative Energieformen</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">18</subfield><subfield code="j">2017</subfield><subfield code="e">7</subfield><subfield code="h">391-400</subfield><subfield code="g">10</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">530</subfield></datafield></record></collection>
|
| score |
7.3995905 |