Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target
Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositio...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Baránková, H. [verfasserIn] |
|---|
| Format: |
E-Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
2018 |
|---|
| Schlagwörter: |
Hollow cathode enhanced target |
|---|
| Umfang: |
5 |
|---|
| Übergeordnetes Werk: |
Enthalten in: Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium - 2013transfer abstract, surface engineering, surface instrumentation & vacuum technology, Amsterdam [u.a.] |
|---|---|
| Übergeordnetes Werk: |
volume:152 ; year:2018 ; pages:123-127 ; extent:5 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.vacuum.2018.03.010 |
|---|
| Katalog-ID: |
ELV042707102 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | ELV042707102 | ||
| 003 | DE-627 | ||
| 005 | 20230624100743.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 180726s2018 xx |||||o 00| ||eng c | ||
| 024 | 7 | |a 10.1016/j.vacuum.2018.03.010 |2 doi | |
| 028 | 5 | 2 | |a GBV00000000000246A.pica |
| 035 | |a (DE-627)ELV042707102 | ||
| 035 | |a (ELSEVIER)S0042-207X(18)30138-6 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | |a 530 | |
| 082 | 0 | 4 | |a 530 |q DE-600 |
| 082 | 0 | 4 | |a 333.7 |q VZ |
| 082 | 0 | 4 | |a 610 |q VZ |
| 082 | 0 | 4 | |a 630 |a 640 |a 610 |q VZ |
| 100 | 1 | |a Baránková, H. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
| 264 | 1 | |c 2018 | |
| 300 | |a 5 | ||
| 336 | |a nicht spezifiziert |b zzz |2 rdacontent | ||
| 337 | |a nicht spezifiziert |b z |2 rdamedia | ||
| 338 | |a nicht spezifiziert |b zu |2 rdacarrier | ||
| 520 | |a Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. | ||
| 650 | 7 | |a Magnetized hollow cathode |2 Elsevier | |
| 650 | 7 | |a Ionized magnetron |2 Elsevier | |
| 650 | 7 | |a Hollow cathode enhanced target |2 Elsevier | |
| 650 | 7 | |a Hollow cathode activated magnetron |2 Elsevier | |
| 650 | 7 | |a Reactive deposition in ionized magnetron |2 Elsevier | |
| 700 | 1 | |a Bardos, L. |4 oth | |
| 700 | 1 | |a Silins, K. |4 oth | |
| 700 | 1 | |a Bardos, A. |4 oth | |
| 773 | 0 | 8 | |i Enthalten in |n Elsevier Science |t Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium |d 2013transfer abstract |d surface engineering, surface instrumentation & vacuum technology |g Amsterdam [u.a.] |w (DE-627)ELV011955074 |
| 773 | 1 | 8 | |g volume:152 |g year:2018 |g pages:123-127 |g extent:5 |
| 856 | 4 | 0 | |u https://doi.org/10.1016/j.vacuum.2018.03.010 |3 Volltext |
| 912 | |a GBV_USEFLAG_U | ||
| 912 | |a GBV_ELV | ||
| 912 | |a SYSFLAG_U | ||
| 912 | |a SSG-OLC-PHA | ||
| 912 | |a GBV_ILN_22 | ||
| 912 | |a GBV_ILN_40 | ||
| 951 | |a AR | ||
| 952 | |d 152 |j 2018 |h 123-127 |g 5 | ||
| 953 | |2 045F |a 530 | ||
| author_variant |
h b hb |
|---|---|
| matchkey_str |
barnkovhbardoslsilinskbardosa:2018----:ecieeoiinfiflsyantowtmgeiehloc |
| hierarchy_sort_str |
2018 |
| publishDate |
2018 |
| allfields |
10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
| spelling |
10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
| allfields_unstemmed |
10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
| allfieldsGer |
10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
| allfieldsSound |
10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
| language |
English |
| source |
Enthalten in Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium Amsterdam [u.a.] volume:152 year:2018 pages:123-127 extent:5 |
| sourceStr |
Enthalten in Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium Amsterdam [u.a.] volume:152 year:2018 pages:123-127 extent:5 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
Magnetized hollow cathode Ionized magnetron Hollow cathode enhanced target Hollow cathode activated magnetron Reactive deposition in ionized magnetron |
| dewey-raw |
530 |
| isfreeaccess_bool |
false |
| container_title |
Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium |
| authorswithroles_txt_mv |
Baránková, H. @@aut@@ Bardos, L. @@oth@@ Silins, K. @@oth@@ Bardos, A. @@oth@@ |
| publishDateDaySort_date |
2018-01-01T00:00:00Z |
| hierarchy_top_id |
ELV011955074 |
| dewey-sort |
3530 |
| id |
ELV042707102 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV042707102</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230624100743.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">180726s2018 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.vacuum.2018.03.010</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">GBV00000000000246A.pica</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV042707102</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S0042-207X(18)30138-6</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">530</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">333.7</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">610</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">630</subfield><subfield code="a">640</subfield><subfield code="a">610</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Baránková, H.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2018</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Magnetized hollow cathode</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ionized magnetron</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Hollow cathode enhanced target</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Hollow cathode activated magnetron</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Reactive deposition in ionized magnetron</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bardos, L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Silins, K.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bardos, A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="n">Elsevier Science</subfield><subfield code="t">Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium</subfield><subfield code="d">2013transfer abstract</subfield><subfield code="d">surface engineering, surface instrumentation & vacuum technology</subfield><subfield code="g">Amsterdam [u.a.]</subfield><subfield code="w">(DE-627)ELV011955074</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:152</subfield><subfield code="g">year:2018</subfield><subfield code="g">pages:123-127</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/j.vacuum.2018.03.010</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHA</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">152</subfield><subfield code="j">2018</subfield><subfield code="h">123-127</subfield><subfield code="g">5</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">530</subfield></datafield></record></collection>
|
| author |
Baránková, H. |
| spellingShingle |
Baránková, H. ddc 530 ddc 333.7 ddc 610 ddc 630 Elsevier Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
| authorStr |
Baránková, H. |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)ELV011955074 |
| format |
electronic Article |
| dewey-ones |
530 - Physics 333 - Economics of land & energy 610 - Medicine & health 630 - Agriculture & related technologies 640 - Home & family management |
| delete_txt_mv |
keep |
| author_role |
aut |
| collection |
elsevier |
| remote_str |
true |
| illustrated |
Not Illustrated |
| topic_title |
530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier |
| topic |
ddc 530 ddc 333.7 ddc 610 ddc 630 Elsevier Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron |
| topic_unstemmed |
ddc 530 ddc 333.7 ddc 610 ddc 630 Elsevier Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron |
| topic_browse |
ddc 530 ddc 333.7 ddc 610 ddc 630 Elsevier Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron |
| format_facet |
Elektronische Aufsätze Aufsätze Elektronische Ressource |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
zu |
| author2_variant |
l b lb k s ks a b ab |
| hierarchy_parent_title |
Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium |
| hierarchy_parent_id |
ELV011955074 |
| dewey-tens |
530 - Physics 330 - Economics 610 - Medicine & health 630 - Agriculture 640 - Home & family management |
| hierarchy_top_title |
Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)ELV011955074 |
| title |
Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
| ctrlnum |
(DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 |
| title_full |
Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
| author_sort |
Baránková, H. |
| journal |
Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium |
| journalStr |
Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
500 - Science 300 - Social sciences 600 - Technology |
| recordtype |
marc |
| publishDateSort |
2018 |
| contenttype_str_mv |
zzz |
| container_start_page |
123 |
| author_browse |
Baránková, H. |
| container_volume |
152 |
| physical |
5 |
| class |
530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ |
| format_se |
Elektronische Aufsätze |
| author-letter |
Baránková, H. |
| doi_str_mv |
10.1016/j.vacuum.2018.03.010 |
| dewey-full |
530 333.7 610 630 640 |
| title_sort |
reactive deposition of tin films by magnetron with magnetized hollow cathode enhanced target |
| title_auth |
Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
| abstract |
Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. |
| abstractGer |
Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. |
| abstract_unstemmed |
Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. |
| collection_details |
GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 |
| title_short |
Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
| url |
https://doi.org/10.1016/j.vacuum.2018.03.010 |
| remote_bool |
true |
| author2 |
Bardos, L. Silins, K. Bardos, A. |
| author2Str |
Bardos, L. Silins, K. Bardos, A. |
| ppnlink |
ELV011955074 |
| mediatype_str_mv |
z |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| author2_role |
oth oth oth |
| doi_str |
10.1016/j.vacuum.2018.03.010 |
| up_date |
2024-07-06T16:53:13.901Z |
| _version_ |
1803849348049534976 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV042707102</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230624100743.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">180726s2018 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.vacuum.2018.03.010</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">GBV00000000000246A.pica</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV042707102</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S0042-207X(18)30138-6</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">530</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">DE-600</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">333.7</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">610</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">630</subfield><subfield code="a">640</subfield><subfield code="a">610</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Baránková, H.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2018</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Magnetized hollow cathode</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ionized magnetron</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Hollow cathode enhanced target</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Hollow cathode activated magnetron</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Reactive deposition in ionized magnetron</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bardos, L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Silins, K.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bardos, A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="n">Elsevier Science</subfield><subfield code="t">Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium</subfield><subfield code="d">2013transfer abstract</subfield><subfield code="d">surface engineering, surface instrumentation & vacuum technology</subfield><subfield code="g">Amsterdam [u.a.]</subfield><subfield code="w">(DE-627)ELV011955074</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:152</subfield><subfield code="g">year:2018</subfield><subfield code="g">pages:123-127</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/j.vacuum.2018.03.010</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHA</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">152</subfield><subfield code="j">2018</subfield><subfield code="h">123-127</subfield><subfield code="g">5</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">530</subfield></datafield></record></collection>
|
| score |
7.400485 |