Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target
Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositio...
Ausführliche Beschreibung
Autor*in: |
Baránková, H. [verfasserIn] |
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Format: |
E-Artikel |
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Sprache: |
Englisch |
Erschienen: |
2018 |
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Schlagwörter: |
Hollow cathode enhanced target |
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Umfang: |
5 |
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Übergeordnetes Werk: |
Enthalten in: Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium - 2013transfer abstract, surface engineering, surface instrumentation & vacuum technology, Amsterdam [u.a.] |
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Übergeordnetes Werk: |
volume:152 ; year:2018 ; pages:123-127 ; extent:5 |
Links: |
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DOI / URN: |
10.1016/j.vacuum.2018.03.010 |
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Katalog-ID: |
ELV042707102 |
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520 | |a Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. | ||
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10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
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10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
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10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
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10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
allfieldsSound |
10.1016/j.vacuum.2018.03.010 doi GBV00000000000246A.pica (DE-627)ELV042707102 (ELSEVIER)S0042-207X(18)30138-6 DE-627 ger DE-627 rakwb eng 530 530 DE-600 333.7 VZ 610 VZ 630 640 610 VZ Baránková, H. verfasserin aut Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target 2018 5 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. Magnetized hollow cathode Elsevier Ionized magnetron Elsevier Hollow cathode enhanced target Elsevier Hollow cathode activated magnetron Elsevier Reactive deposition in ionized magnetron Elsevier Bardos, L. oth Silins, K. oth Bardos, A. oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:152 year:2018 pages:123-127 extent:5 https://doi.org/10.1016/j.vacuum.2018.03.010 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 152 2018 123-127 5 045F 530 |
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Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
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Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. |
abstractGer |
Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. |
abstract_unstemmed |
Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen. |
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Reactive deposition of TiN films by magnetron with magnetized hollow cathode enhanced target |
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