Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path
Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and un...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Kwon, Kui-Kam [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2021transfer abstract |
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| Schlagwörter: |
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| Übergeordnetes Werk: |
Enthalten in: DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS - Munnur, Ravi Kiran ELSEVIER, 2016, Amsterdam [u.a.] |
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| Übergeordnetes Werk: |
volume:291 ; year:2021 ; pages:0 |
| Links: |
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| DOI / URN: |
10.1016/j.jmatprotec.2021.117046 |
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ELV053000390 |
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| 520 | |a Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. | ||
| 520 | |a Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. | ||
| 650 | 7 | |a Laser-induced backside wet etching (LIBWE) |2 Elsevier | |
| 650 | 7 | |a Glass microstructuring |2 Elsevier | |
| 650 | 7 | |a Laser scan path planning |2 Elsevier | |
| 700 | 1 | |a Song, Ki Young |4 oth | |
| 700 | 1 | |a Seo, Jae Min |4 oth | |
| 700 | 1 | |a Chu, Chong Nam |4 oth | |
| 700 | 1 | |a Ahn, Sung-Hoon |4 oth | |
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10.1016/j.jmatprotec.2021.117046 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001299.pica (DE-627)ELV053000390 (ELSEVIER)S0924-0136(21)00006-6 DE-627 ger DE-627 rakwb eng 610 VZ 600 690 VZ 51.00 bkl 51.32 bkl Kwon, Kui-Kam verfasserin aut Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path 2021transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser-induced backside wet etching (LIBWE) Elsevier Glass microstructuring Elsevier Laser scan path planning Elsevier Song, Ki Young oth Seo, Jae Min oth Chu, Chong Nam oth Ahn, Sung-Hoon oth Enthalten in Elsevier Munnur, Ravi Kiran ELSEVIER DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS 2016 Amsterdam [u.a.] (DE-627)ELV014190494 volume:291 year:2021 pages:0 https://doi.org/10.1016/j.jmatprotec.2021.117046 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_21 GBV_ILN_40 GBV_ILN_2009 GBV_ILN_2010 51.00 Werkstoffkunde: Allgemeines VZ 51.32 Werkstoffmechanik VZ AR 291 2021 0 |
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10.1016/j.jmatprotec.2021.117046 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001299.pica (DE-627)ELV053000390 (ELSEVIER)S0924-0136(21)00006-6 DE-627 ger DE-627 rakwb eng 610 VZ 600 690 VZ 51.00 bkl 51.32 bkl Kwon, Kui-Kam verfasserin aut Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path 2021transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser-induced backside wet etching (LIBWE) Elsevier Glass microstructuring Elsevier Laser scan path planning Elsevier Song, Ki Young oth Seo, Jae Min oth Chu, Chong Nam oth Ahn, Sung-Hoon oth Enthalten in Elsevier Munnur, Ravi Kiran ELSEVIER DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS 2016 Amsterdam [u.a.] (DE-627)ELV014190494 volume:291 year:2021 pages:0 https://doi.org/10.1016/j.jmatprotec.2021.117046 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_21 GBV_ILN_40 GBV_ILN_2009 GBV_ILN_2010 51.00 Werkstoffkunde: Allgemeines VZ 51.32 Werkstoffmechanik VZ AR 291 2021 0 |
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10.1016/j.jmatprotec.2021.117046 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001299.pica (DE-627)ELV053000390 (ELSEVIER)S0924-0136(21)00006-6 DE-627 ger DE-627 rakwb eng 610 VZ 600 690 VZ 51.00 bkl 51.32 bkl Kwon, Kui-Kam verfasserin aut Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path 2021transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser-induced backside wet etching (LIBWE) Elsevier Glass microstructuring Elsevier Laser scan path planning Elsevier Song, Ki Young oth Seo, Jae Min oth Chu, Chong Nam oth Ahn, Sung-Hoon oth Enthalten in Elsevier Munnur, Ravi Kiran ELSEVIER DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS 2016 Amsterdam [u.a.] (DE-627)ELV014190494 volume:291 year:2021 pages:0 https://doi.org/10.1016/j.jmatprotec.2021.117046 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_21 GBV_ILN_40 GBV_ILN_2009 GBV_ILN_2010 51.00 Werkstoffkunde: Allgemeines VZ 51.32 Werkstoffmechanik VZ AR 291 2021 0 |
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10.1016/j.jmatprotec.2021.117046 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001299.pica (DE-627)ELV053000390 (ELSEVIER)S0924-0136(21)00006-6 DE-627 ger DE-627 rakwb eng 610 VZ 600 690 VZ 51.00 bkl 51.32 bkl Kwon, Kui-Kam verfasserin aut Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path 2021transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser-induced backside wet etching (LIBWE) Elsevier Glass microstructuring Elsevier Laser scan path planning Elsevier Song, Ki Young oth Seo, Jae Min oth Chu, Chong Nam oth Ahn, Sung-Hoon oth Enthalten in Elsevier Munnur, Ravi Kiran ELSEVIER DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS 2016 Amsterdam [u.a.] (DE-627)ELV014190494 volume:291 year:2021 pages:0 https://doi.org/10.1016/j.jmatprotec.2021.117046 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_21 GBV_ILN_40 GBV_ILN_2009 GBV_ILN_2010 51.00 Werkstoffkunde: Allgemeines VZ 51.32 Werkstoffmechanik VZ AR 291 2021 0 |
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10.1016/j.jmatprotec.2021.117046 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001299.pica (DE-627)ELV053000390 (ELSEVIER)S0924-0136(21)00006-6 DE-627 ger DE-627 rakwb eng 610 VZ 600 690 VZ 51.00 bkl 51.32 bkl Kwon, Kui-Kam verfasserin aut Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path 2021transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. Laser-induced backside wet etching (LIBWE) Elsevier Glass microstructuring Elsevier Laser scan path planning Elsevier Song, Ki Young oth Seo, Jae Min oth Chu, Chong Nam oth Ahn, Sung-Hoon oth Enthalten in Elsevier Munnur, Ravi Kiran ELSEVIER DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS 2016 Amsterdam [u.a.] (DE-627)ELV014190494 volume:291 year:2021 pages:0 https://doi.org/10.1016/j.jmatprotec.2021.117046 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_21 GBV_ILN_40 GBV_ILN_2009 GBV_ILN_2010 51.00 Werkstoffkunde: Allgemeines VZ 51.32 Werkstoffmechanik VZ AR 291 2021 0 |
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Enthalten in DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS Amsterdam [u.a.] volume:291 year:2021 pages:0 |
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Enthalten in DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS Amsterdam [u.a.] volume:291 year:2021 pages:0 |
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DIAGNOSTIC ACCURACY OF ASLA SCORE (A NOVEL CT ANGIOGRAPHIC INDEX) AND AGGREGATE PLAQUE VOLUME IN THE ASSESSMENT OF FUNCTIONAL SIGNIFICANCE OF CORONARY STENOSIS |
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Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path |
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Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. |
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Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. |
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Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified. |
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