Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma
A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S state...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Lee, Wonwook [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2022transfer abstract |
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| Schlagwörter: |
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| Umfang: |
6 |
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| Übergeordnetes Werk: |
Enthalten in: Can digital technologies improve health? - The Lancet ELSEVIER, 2021, physics, chemistry and materials science, Amsterdam [u.a.] |
|---|---|
| Übergeordnetes Werk: |
volume:36 ; year:2022 ; pages:137-142 ; extent:6 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.cap.2022.02.003 |
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| Katalog-ID: |
ELV056881177 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | ELV056881177 | ||
| 003 | DE-627 | ||
| 005 | 20230626044123.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 220808s2022 xx |||||o 00| ||eng c | ||
| 024 | 7 | |a 10.1016/j.cap.2022.02.003 |2 doi | |
| 028 | 5 | 2 | |a /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica |
| 035 | |a (DE-627)ELV056881177 | ||
| 035 | |a (ELSEVIER)S1567-1739(22)00035-9 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 100 | 1 | |a Lee, Wonwook |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma |
| 264 | 1 | |c 2022transfer abstract | |
| 300 | |a 6 | ||
| 336 | |a nicht spezifiziert |b zzz |2 rdacontent | ||
| 337 | |a nicht spezifiziert |b z |2 rdamedia | ||
| 338 | |a nicht spezifiziert |b zu |2 rdacarrier | ||
| 520 | |a A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. | ||
| 520 | |a A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. | ||
| 650 | 7 | |a Inductively coupled plasma |2 Elsevier | |
| 650 | 7 | |a Helium |2 Elsevier | |
| 650 | 7 | |a Mode transition |2 Elsevier | |
| 700 | 1 | |a Shim, Sungyong |4 oth | |
| 700 | 1 | |a Oh, Cha-Hwan |4 oth | |
| 773 | 0 | 8 | |i Enthalten in |n Elsevier Science |a The Lancet ELSEVIER |t Can digital technologies improve health? |d 2021 |d physics, chemistry and materials science |g Amsterdam [u.a.] |w (DE-627)ELV006885837 |
| 773 | 1 | 8 | |g volume:36 |g year:2022 |g pages:137-142 |g extent:6 |
| 856 | 4 | 0 | |u https://doi.org/10.1016/j.cap.2022.02.003 |3 Volltext |
| 912 | |a GBV_USEFLAG_U | ||
| 912 | |a GBV_ELV | ||
| 912 | |a SYSFLAG_U | ||
| 951 | |a AR | ||
| 952 | |d 36 |j 2022 |h 137-142 |g 6 | ||
| author_variant |
w l wl |
|---|---|
| matchkey_str |
leewonwookshimsungyongohchahwan:2022----:nlecohlumtsalsaeotehoerniinnnn |
| hierarchy_sort_str |
2022transfer abstract |
| publishDate |
2022 |
| allfields |
10.1016/j.cap.2022.02.003 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica (DE-627)ELV056881177 (ELSEVIER)S1567-1739(22)00035-9 DE-627 ger DE-627 rakwb eng Lee, Wonwook verfasserin aut Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma 2022transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. Inductively coupled plasma Elsevier Helium Elsevier Mode transition Elsevier Shim, Sungyong oth Oh, Cha-Hwan oth Enthalten in Elsevier Science The Lancet ELSEVIER Can digital technologies improve health? 2021 physics, chemistry and materials science Amsterdam [u.a.] (DE-627)ELV006885837 volume:36 year:2022 pages:137-142 extent:6 https://doi.org/10.1016/j.cap.2022.02.003 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U AR 36 2022 137-142 6 |
| spelling |
10.1016/j.cap.2022.02.003 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica (DE-627)ELV056881177 (ELSEVIER)S1567-1739(22)00035-9 DE-627 ger DE-627 rakwb eng Lee, Wonwook verfasserin aut Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma 2022transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. Inductively coupled plasma Elsevier Helium Elsevier Mode transition Elsevier Shim, Sungyong oth Oh, Cha-Hwan oth Enthalten in Elsevier Science The Lancet ELSEVIER Can digital technologies improve health? 2021 physics, chemistry and materials science Amsterdam [u.a.] (DE-627)ELV006885837 volume:36 year:2022 pages:137-142 extent:6 https://doi.org/10.1016/j.cap.2022.02.003 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U AR 36 2022 137-142 6 |
| allfields_unstemmed |
10.1016/j.cap.2022.02.003 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica (DE-627)ELV056881177 (ELSEVIER)S1567-1739(22)00035-9 DE-627 ger DE-627 rakwb eng Lee, Wonwook verfasserin aut Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma 2022transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. Inductively coupled plasma Elsevier Helium Elsevier Mode transition Elsevier Shim, Sungyong oth Oh, Cha-Hwan oth Enthalten in Elsevier Science The Lancet ELSEVIER Can digital technologies improve health? 2021 physics, chemistry and materials science Amsterdam [u.a.] (DE-627)ELV006885837 volume:36 year:2022 pages:137-142 extent:6 https://doi.org/10.1016/j.cap.2022.02.003 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U AR 36 2022 137-142 6 |
| allfieldsGer |
10.1016/j.cap.2022.02.003 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica (DE-627)ELV056881177 (ELSEVIER)S1567-1739(22)00035-9 DE-627 ger DE-627 rakwb eng Lee, Wonwook verfasserin aut Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma 2022transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. Inductively coupled plasma Elsevier Helium Elsevier Mode transition Elsevier Shim, Sungyong oth Oh, Cha-Hwan oth Enthalten in Elsevier Science The Lancet ELSEVIER Can digital technologies improve health? 2021 physics, chemistry and materials science Amsterdam [u.a.] (DE-627)ELV006885837 volume:36 year:2022 pages:137-142 extent:6 https://doi.org/10.1016/j.cap.2022.02.003 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U AR 36 2022 137-142 6 |
| allfieldsSound |
10.1016/j.cap.2022.02.003 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica (DE-627)ELV056881177 (ELSEVIER)S1567-1739(22)00035-9 DE-627 ger DE-627 rakwb eng Lee, Wonwook verfasserin aut Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma 2022transfer abstract 6 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. Inductively coupled plasma Elsevier Helium Elsevier Mode transition Elsevier Shim, Sungyong oth Oh, Cha-Hwan oth Enthalten in Elsevier Science The Lancet ELSEVIER Can digital technologies improve health? 2021 physics, chemistry and materials science Amsterdam [u.a.] (DE-627)ELV006885837 volume:36 year:2022 pages:137-142 extent:6 https://doi.org/10.1016/j.cap.2022.02.003 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U AR 36 2022 137-142 6 |
| language |
English |
| source |
Enthalten in Can digital technologies improve health? Amsterdam [u.a.] volume:36 year:2022 pages:137-142 extent:6 |
| sourceStr |
Enthalten in Can digital technologies improve health? Amsterdam [u.a.] volume:36 year:2022 pages:137-142 extent:6 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
Inductively coupled plasma Helium Mode transition |
| isfreeaccess_bool |
false |
| container_title |
Can digital technologies improve health? |
| authorswithroles_txt_mv |
Lee, Wonwook @@aut@@ Shim, Sungyong @@oth@@ Oh, Cha-Hwan @@oth@@ |
| publishDateDaySort_date |
2022-01-01T00:00:00Z |
| hierarchy_top_id |
ELV006885837 |
| id |
ELV056881177 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV056881177</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230626044123.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">220808s2022 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.cap.2022.02.003</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">/cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV056881177</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S1567-1739(22)00035-9</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Lee, Wonwook</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022transfer abstract</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">6</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Inductively coupled plasma</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Helium</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Mode transition</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shim, Sungyong</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Oh, Cha-Hwan</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="n">Elsevier Science</subfield><subfield code="a">The Lancet ELSEVIER</subfield><subfield code="t">Can digital technologies improve health?</subfield><subfield code="d">2021</subfield><subfield code="d">physics, chemistry and materials science</subfield><subfield code="g">Amsterdam [u.a.]</subfield><subfield code="w">(DE-627)ELV006885837</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:36</subfield><subfield code="g">year:2022</subfield><subfield code="g">pages:137-142</subfield><subfield code="g">extent:6</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/j.cap.2022.02.003</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">36</subfield><subfield code="j">2022</subfield><subfield code="h">137-142</subfield><subfield code="g">6</subfield></datafield></record></collection>
|
| author |
Lee, Wonwook |
| spellingShingle |
Lee, Wonwook Elsevier Inductively coupled plasma Elsevier Helium Elsevier Mode transition Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma |
| authorStr |
Lee, Wonwook |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)ELV006885837 |
| format |
electronic Article |
| delete_txt_mv |
keep |
| author_role |
aut |
| collection |
elsevier |
| remote_str |
true |
| illustrated |
Not Illustrated |
| topic_title |
Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma Inductively coupled plasma Elsevier Helium Elsevier Mode transition Elsevier |
| topic |
Elsevier Inductively coupled plasma Elsevier Helium Elsevier Mode transition |
| topic_unstemmed |
Elsevier Inductively coupled plasma Elsevier Helium Elsevier Mode transition |
| topic_browse |
Elsevier Inductively coupled plasma Elsevier Helium Elsevier Mode transition |
| format_facet |
Elektronische Aufsätze Aufsätze Elektronische Ressource |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
zu |
| author2_variant |
s s ss c h o cho |
| hierarchy_parent_title |
Can digital technologies improve health? |
| hierarchy_parent_id |
ELV006885837 |
| hierarchy_top_title |
Can digital technologies improve health? |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)ELV006885837 |
| title |
Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma |
| ctrlnum |
(DE-627)ELV056881177 (ELSEVIER)S1567-1739(22)00035-9 |
| title_full |
Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma |
| author_sort |
Lee, Wonwook |
| journal |
Can digital technologies improve health? |
| journalStr |
Can digital technologies improve health? |
| lang_code |
eng |
| isOA_bool |
false |
| recordtype |
marc |
| publishDateSort |
2022 |
| contenttype_str_mv |
zzz |
| container_start_page |
137 |
| author_browse |
Lee, Wonwook |
| container_volume |
36 |
| physical |
6 |
| format_se |
Elektronische Aufsätze |
| author-letter |
Lee, Wonwook |
| doi_str_mv |
10.1016/j.cap.2022.02.003 |
| title_sort |
influence of helium metastable states on the e-h mode transition in an inductively coupled plasma |
| title_auth |
Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma |
| abstract |
A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. |
| abstractGer |
A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. |
| abstract_unstemmed |
A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition. |
| collection_details |
GBV_USEFLAG_U GBV_ELV SYSFLAG_U |
| title_short |
Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma |
| url |
https://doi.org/10.1016/j.cap.2022.02.003 |
| remote_bool |
true |
| author2 |
Shim, Sungyong Oh, Cha-Hwan |
| author2Str |
Shim, Sungyong Oh, Cha-Hwan |
| ppnlink |
ELV006885837 |
| mediatype_str_mv |
z |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| author2_role |
oth oth |
| doi_str |
10.1016/j.cap.2022.02.003 |
| up_date |
2024-07-06T21:39:42.276Z |
| _version_ |
1803867371368087552 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">ELV056881177</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230626044123.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">220808s2022 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/j.cap.2022.02.003</subfield><subfield code="2">doi</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">/cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001683.pica</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)ELV056881177</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)S1567-1739(22)00035-9</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Lee, Wonwook</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022transfer abstract</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">6</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (21S–41P) and 1082.9 nm (23S–23P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 21S and 23S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 23S metastable state to the 21S metastable state as well as the line intensity ratio (LIR) of the 33D-23S transition to the 31P–21S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 23S metastable state plays a key role in the E-H mode transition.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Inductively coupled plasma</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Helium</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Mode transition</subfield><subfield code="2">Elsevier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shim, Sungyong</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Oh, Cha-Hwan</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="n">Elsevier Science</subfield><subfield code="a">The Lancet ELSEVIER</subfield><subfield code="t">Can digital technologies improve health?</subfield><subfield code="d">2021</subfield><subfield code="d">physics, chemistry and materials science</subfield><subfield code="g">Amsterdam [u.a.]</subfield><subfield code="w">(DE-627)ELV006885837</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:36</subfield><subfield code="g">year:2022</subfield><subfield code="g">pages:137-142</subfield><subfield code="g">extent:6</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/j.cap.2022.02.003</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_U</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ELV</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_U</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">36</subfield><subfield code="j">2022</subfield><subfield code="h">137-142</subfield><subfield code="g">6</subfield></datafield></record></collection>
|
| score |
7.3982067 |