Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection
The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing...
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Gespeichert in:
| Autor*in: |
Tian, Xin [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2023transfer abstract |
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| Schlagwörter: |
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| Übergeordnetes Werk: |
Enthalten in: Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium - 2013transfer abstract, surface engineering, surface instrumentation & vacuum technology, Amsterdam [u.a.] |
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| Übergeordnetes Werk: |
volume:207 ; year:2023 ; pages:0 |
| Links: |
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| DOI / URN: |
10.1016/j.vacuum.2022.111620 |
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| 520 | |a The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. | ||
| 520 | |a The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. | ||
| 650 | 7 | |a TiO2/SnO2 sensing film |2 Elsevier | |
| 650 | 7 | |a Ethanol |2 Elsevier | |
| 650 | 7 | |a High sensitivity |2 Elsevier | |
| 650 | 7 | |a Gas sensor |2 Elsevier | |
| 650 | 7 | |a Sputtering |2 Elsevier | |
| 650 | 7 | |a Multi-layer heterojunctions |2 Elsevier | |
| 700 | 1 | |a Hu, Zonxin |4 oth | |
| 700 | 1 | |a Wang, Tian |4 oth | |
| 700 | 1 | |a Wang, Hairong |4 oth | |
| 700 | 1 | |a Zhang, Qunming |4 oth | |
| 700 | 1 | |a Wei, Xueyong |4 oth | |
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10.1016/j.vacuum.2022.111620 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001981.pica (DE-627)ELV059720840 (ELSEVIER)S0042-207X(22)00742-4 DE-627 ger DE-627 rakwb eng 333.7 VZ 610 VZ 630 640 610 VZ Tian, Xin verfasserin aut Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection 2023transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. TiO2/SnO2 sensing film Elsevier Ethanol Elsevier High sensitivity Elsevier Gas sensor Elsevier Sputtering Elsevier Multi-layer heterojunctions Elsevier Hu, Zonxin oth Wang, Tian oth Wang, Hairong oth Zhang, Qunming oth Wei, Xueyong oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:207 year:2023 pages:0 https://doi.org/10.1016/j.vacuum.2022.111620 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 207 2023 0 |
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10.1016/j.vacuum.2022.111620 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001981.pica (DE-627)ELV059720840 (ELSEVIER)S0042-207X(22)00742-4 DE-627 ger DE-627 rakwb eng 333.7 VZ 610 VZ 630 640 610 VZ Tian, Xin verfasserin aut Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection 2023transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. TiO2/SnO2 sensing film Elsevier Ethanol Elsevier High sensitivity Elsevier Gas sensor Elsevier Sputtering Elsevier Multi-layer heterojunctions Elsevier Hu, Zonxin oth Wang, Tian oth Wang, Hairong oth Zhang, Qunming oth Wei, Xueyong oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:207 year:2023 pages:0 https://doi.org/10.1016/j.vacuum.2022.111620 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 207 2023 0 |
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10.1016/j.vacuum.2022.111620 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001981.pica (DE-627)ELV059720840 (ELSEVIER)S0042-207X(22)00742-4 DE-627 ger DE-627 rakwb eng 333.7 VZ 610 VZ 630 640 610 VZ Tian, Xin verfasserin aut Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection 2023transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. TiO2/SnO2 sensing film Elsevier Ethanol Elsevier High sensitivity Elsevier Gas sensor Elsevier Sputtering Elsevier Multi-layer heterojunctions Elsevier Hu, Zonxin oth Wang, Tian oth Wang, Hairong oth Zhang, Qunming oth Wei, Xueyong oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:207 year:2023 pages:0 https://doi.org/10.1016/j.vacuum.2022.111620 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 207 2023 0 |
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10.1016/j.vacuum.2022.111620 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001981.pica (DE-627)ELV059720840 (ELSEVIER)S0042-207X(22)00742-4 DE-627 ger DE-627 rakwb eng 333.7 VZ 610 VZ 630 640 610 VZ Tian, Xin verfasserin aut Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection 2023transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. TiO2/SnO2 sensing film Elsevier Ethanol Elsevier High sensitivity Elsevier Gas sensor Elsevier Sputtering Elsevier Multi-layer heterojunctions Elsevier Hu, Zonxin oth Wang, Tian oth Wang, Hairong oth Zhang, Qunming oth Wei, Xueyong oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:207 year:2023 pages:0 https://doi.org/10.1016/j.vacuum.2022.111620 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 207 2023 0 |
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10.1016/j.vacuum.2022.111620 doi /cbs_pica/cbs_olc/import_discovery/elsevier/einzuspielen/GBV00000000001981.pica (DE-627)ELV059720840 (ELSEVIER)S0042-207X(22)00742-4 DE-627 ger DE-627 rakwb eng 333.7 VZ 610 VZ 630 640 610 VZ Tian, Xin verfasserin aut Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection 2023transfer abstract nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. TiO2/SnO2 sensing film Elsevier Ethanol Elsevier High sensitivity Elsevier Gas sensor Elsevier Sputtering Elsevier Multi-layer heterojunctions Elsevier Hu, Zonxin oth Wang, Tian oth Wang, Hairong oth Zhang, Qunming oth Wei, Xueyong oth Enthalten in Elsevier Science Reconstructing historical atmospheric mercury deposition in Western Europe using: Misten peat bog cores, Belgium 2013transfer abstract surface engineering, surface instrumentation & vacuum technology Amsterdam [u.a.] (DE-627)ELV011955074 volume:207 year:2023 pages:0 https://doi.org/10.1016/j.vacuum.2022.111620 Volltext GBV_USEFLAG_U GBV_ELV SYSFLAG_U SSG-OLC-PHA GBV_ILN_22 GBV_ILN_40 AR 207 2023 0 |
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influence of multi-layer tio2/sno2 heterojunctions on fast and sensitive ethanol detection |
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Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection |
| abstract |
The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. |
| abstractGer |
The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. |
| abstract_unstemmed |
The fabrication of MEMS gas sensors based on SMO sensing materials has become popular in commercials. However, due to the dense surface, the MEMS gas sensor based on sputtered sensing film always shows low sensitivity and slow response. Herein, we report multi-layer TiO2/SnO2 heterojunctions sensing film deposited by sputtering techniques. SnO2 and TiO2 thin film have an approximate thickness of 265.34 nm and 66.28 nm, respectively. The effects of different-layer TiO2/SnO2 heterojunctions and annealing temperatures to sensing film on gas sensing properties were investigated. The different samples with the same surface and annealed temperature exhibit different gas sensing properties, which indicates that more layer heterojunctions may decrease the positive effects of heterojunctions and oxygen adsorptions on the gas sensing properties. The two-layer TiO2/SnO2 heterojunctions sensing film with an annealed temperature of 400 °C in air obtain the best gas sensing properties, which has a response value of 7.54 and response/recovery time of 33/298 s to 50 ppm ethanol at 260 °C. Furthermore, the MEMS gas sensor based on two-layer TiO2/SnO2 heterojunctions sensing film can detect ethanol ranging from 1 ppm to 1000 ppm with excellent linearity. |
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Influence of multi-layer TiO2/SnO2 heterojunctions on fast and sensitive ethanol detection |
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