High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry

A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effec...
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Autor*in:	Liao, Fang-Jie [verfasserIn] Wu, Kai-Hang [verfasserIn] Liu, Su-Ming [verfasserIn] Zhang, Jing-Yi [verfasserIn] Ming, Min [verfasserIn] Liu, Qi [verfasserIn] Duan, Hui-Zong [verfasserIn] Yeh, Hsien-Chi [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2023

Schlagwörter:	Heterodyne interferometry Phase shifting interferometry Angular measurement

Übergeordnetes Werk:	Enthalten in: Optics communications - Amsterdam, 1969, 555
Übergeordnetes Werk:	volume:555

DOI / URN:	10.1016/j.optcom.2023.130209

Katalog-ID:	ELV066568447

Internformat


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024	7		\|a 10.1016/j.optcom.2023.130209 \|2 doi
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245	1	0	\|a High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry
264		1	\|c 2023
336			\|a nicht spezifiziert \|b zzz \|2 rdacontent
337			\|a Computermedien \|b c \|2 rdamedia
338			\|a Online-Ressource \|b cr \|2 rdacarrier
520			\|a A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology.
650		4	\|a Heterodyne interferometry
650		4	\|a Phase shifting interferometry
650		4	\|a Angular measurement
700	1		\|a Wu, Kai-Hang \|e verfasserin \|4 aut
700	1		\|a Liu, Su-Ming \|e verfasserin \|0 (orcid)0009-0008-9185-9860 \|4 aut
700	1		\|a Zhang, Jing-Yi \|e verfasserin \|4 aut
700	1		\|a Ming, Min \|e verfasserin \|4 aut
700	1		\|a Liu, Qi \|e verfasserin \|4 aut
700	1		\|a Duan, Hui-Zong \|e verfasserin \|4 aut
700	1		\|a Yeh, Hsien-Chi \|e verfasserin \|4 aut
773	0	8	\|i Enthalten in \|t Optics communications \|d Amsterdam, 1969 \|g 555 \|h Online-Ressource \|w (DE-627)266889247 \|w (DE-600)1468811-6 \|w (DE-576)07596239X \|x 1873-0310 \|7 nnns
773	1	8	\|g volume:555
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912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_60
912			\|a GBV_ILN_62
912			\|a GBV_ILN_65
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_73
912			\|a GBV_ILN_74
912			\|a GBV_ILN_90
912			\|a GBV_ILN_95
912			\|a GBV_ILN_100
912			\|a GBV_ILN_101
912			\|a GBV_ILN_105
912			\|a GBV_ILN_110
912			\|a GBV_ILN_150
912			\|a GBV_ILN_151
912			\|a GBV_ILN_187
912			\|a GBV_ILN_213
912			\|a GBV_ILN_224
912			\|a GBV_ILN_230
912			\|a GBV_ILN_370
912			\|a GBV_ILN_602
912			\|a GBV_ILN_702
912			\|a GBV_ILN_2001
912			\|a GBV_ILN_2003
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2005
912			\|a GBV_ILN_2007
912			\|a GBV_ILN_2008
912			\|a GBV_ILN_2009
912			\|a GBV_ILN_2010
912			\|a GBV_ILN_2011
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2015
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_2025
912			\|a GBV_ILN_2026
912			\|a GBV_ILN_2027
912			\|a GBV_ILN_2034
912			\|a GBV_ILN_2044
912			\|a GBV_ILN_2048
912			\|a GBV_ILN_2049
912			\|a GBV_ILN_2050
912			\|a GBV_ILN_2055
912			\|a GBV_ILN_2056
912			\|a GBV_ILN_2059
912			\|a GBV_ILN_2061
912			\|a GBV_ILN_2064
912			\|a GBV_ILN_2088
912			\|a GBV_ILN_2106
912			\|a GBV_ILN_2110
912			\|a GBV_ILN_2111
912			\|a GBV_ILN_2112
912			\|a GBV_ILN_2122
912			\|a GBV_ILN_2129
912			\|a GBV_ILN_2143
912			\|a GBV_ILN_2152
912			\|a GBV_ILN_2153
912			\|a GBV_ILN_2190
912			\|a GBV_ILN_2232
912			\|a GBV_ILN_2336
912			\|a GBV_ILN_2470
912			\|a GBV_ILN_2507
912			\|a GBV_ILN_4035
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4112
912			\|a GBV_ILN_4125
912			\|a GBV_ILN_4242
912			\|a GBV_ILN_4249
912			\|a GBV_ILN_4251
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4322
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4324
912			\|a GBV_ILN_4325
912			\|a GBV_ILN_4326
912			\|a GBV_ILN_4333
912			\|a GBV_ILN_4334
912			\|a GBV_ILN_4338
912			\|a GBV_ILN_4393
912			\|a GBV_ILN_4700
936	b	k	\|a 33.18 \|j Optik \|q VZ
936	b	k	\|a 33.38 \|j Quantenoptik \|j nichtlineare Optik \|q VZ
936	b	k	\|a 50.37 \|j Technische Optik \|q VZ
951			\|a AR
952			\|d 555

Indexfelder

author_variant	f j l fjl k h w khw s m l sml j y z jyz m m mm q l ql h z d hzd h c y hcy
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hierarchy_sort_str	2023
bklnumber	33.18 33.38 50.37
publishDate	2023
allfields	10.1016/j.optcom.2023.130209 doi (DE-627)ELV066568447 (ELSEVIER)S0030-4018(23)00957-4 DE-627 ger DE-627 rda eng 530 VZ 33.18 bkl 33.38 bkl 50.37 bkl Liao, Fang-Jie verfasserin aut High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry 2023 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology. Heterodyne interferometry Phase shifting interferometry Angular measurement Wu, Kai-Hang verfasserin aut Liu, Su-Ming verfasserin (orcid)0009-0008-9185-9860 aut Zhang, Jing-Yi verfasserin aut Ming, Min verfasserin aut Liu, Qi verfasserin aut Duan, Hui-Zong verfasserin aut Yeh, Hsien-Chi verfasserin aut Enthalten in Optics communications Amsterdam, 1969 555 Online-Ressource (DE-627)266889247 (DE-600)1468811-6 (DE-576)07596239X 1873-0310 nnns volume:555 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ 50.37 Technische Optik VZ AR 555
spelling	10.1016/j.optcom.2023.130209 doi (DE-627)ELV066568447 (ELSEVIER)S0030-4018(23)00957-4 DE-627 ger DE-627 rda eng 530 VZ 33.18 bkl 33.38 bkl 50.37 bkl Liao, Fang-Jie verfasserin aut High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry 2023 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology. Heterodyne interferometry Phase shifting interferometry Angular measurement Wu, Kai-Hang verfasserin aut Liu, Su-Ming verfasserin (orcid)0009-0008-9185-9860 aut Zhang, Jing-Yi verfasserin aut Ming, Min verfasserin aut Liu, Qi verfasserin aut Duan, Hui-Zong verfasserin aut Yeh, Hsien-Chi verfasserin aut Enthalten in Optics communications Amsterdam, 1969 555 Online-Ressource (DE-627)266889247 (DE-600)1468811-6 (DE-576)07596239X 1873-0310 nnns volume:555 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ 50.37 Technische Optik VZ AR 555
allfields_unstemmed	10.1016/j.optcom.2023.130209 doi (DE-627)ELV066568447 (ELSEVIER)S0030-4018(23)00957-4 DE-627 ger DE-627 rda eng 530 VZ 33.18 bkl 33.38 bkl 50.37 bkl Liao, Fang-Jie verfasserin aut High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry 2023 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology. Heterodyne interferometry Phase shifting interferometry Angular measurement Wu, Kai-Hang verfasserin aut Liu, Su-Ming verfasserin (orcid)0009-0008-9185-9860 aut Zhang, Jing-Yi verfasserin aut Ming, Min verfasserin aut Liu, Qi verfasserin aut Duan, Hui-Zong verfasserin aut Yeh, Hsien-Chi verfasserin aut Enthalten in Optics communications Amsterdam, 1969 555 Online-Ressource (DE-627)266889247 (DE-600)1468811-6 (DE-576)07596239X 1873-0310 nnns volume:555 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ 50.37 Technische Optik VZ AR 555
allfieldsGer	10.1016/j.optcom.2023.130209 doi (DE-627)ELV066568447 (ELSEVIER)S0030-4018(23)00957-4 DE-627 ger DE-627 rda eng 530 VZ 33.18 bkl 33.38 bkl 50.37 bkl Liao, Fang-Jie verfasserin aut High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry 2023 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology. Heterodyne interferometry Phase shifting interferometry Angular measurement Wu, Kai-Hang verfasserin aut Liu, Su-Ming verfasserin (orcid)0009-0008-9185-9860 aut Zhang, Jing-Yi verfasserin aut Ming, Min verfasserin aut Liu, Qi verfasserin aut Duan, Hui-Zong verfasserin aut Yeh, Hsien-Chi verfasserin aut Enthalten in Optics communications Amsterdam, 1969 555 Online-Ressource (DE-627)266889247 (DE-600)1468811-6 (DE-576)07596239X 1873-0310 nnns volume:555 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ 50.37 Technische Optik VZ AR 555
allfieldsSound	10.1016/j.optcom.2023.130209 doi (DE-627)ELV066568447 (ELSEVIER)S0030-4018(23)00957-4 DE-627 ger DE-627 rda eng 530 VZ 33.18 bkl 33.38 bkl 50.37 bkl Liao, Fang-Jie verfasserin aut High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry 2023 nicht spezifiziert zzz rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology. Heterodyne interferometry Phase shifting interferometry Angular measurement Wu, Kai-Hang verfasserin aut Liu, Su-Ming verfasserin (orcid)0009-0008-9185-9860 aut Zhang, Jing-Yi verfasserin aut Ming, Min verfasserin aut Liu, Qi verfasserin aut Duan, Hui-Zong verfasserin aut Yeh, Hsien-Chi verfasserin aut Enthalten in Optics communications Amsterdam, 1969 555 Online-Ressource (DE-627)266889247 (DE-600)1468811-6 (DE-576)07596239X 1873-0310 nnns volume:555 GBV_USEFLAG_U GBV_ELV SYSFLAG_U GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_150 GBV_ILN_151 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_370 GBV_ILN_602 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2034 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2088 GBV_ILN_2106 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 Optik VZ 33.38 Quantenoptik nichtlineare Optik VZ 50.37 Technische Optik VZ AR 555
language	English
source	Enthalten in Optics communications 555 volume:555
sourceStr	Enthalten in Optics communications 555 volume:555
format_phy_str_mv	Article
bklname	Optik Quantenoptik nichtlineare Optik Technische Optik
institution	findex.gbv.de
topic_facet	Heterodyne interferometry Phase shifting interferometry Angular measurement
dewey-raw	530
isfreeaccess_bool	false
container_title	Optics communications
authorswithroles_txt_mv	Liao, Fang-Jie @@aut@@ Wu, Kai-Hang @@aut@@ Liu, Su-Ming @@aut@@ Zhang, Jing-Yi @@aut@@ Ming, Min @@aut@@ Liu, Qi @@aut@@ Duan, Hui-Zong @@aut@@ Yeh, Hsien-Chi @@aut@@
publishDateDaySort_date	2023-01-01T00:00:00Z
hierarchy_top_id	266889247
dewey-sort	3530
id	ELV066568447
language_de	englisch
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author	Liao, Fang-Jie
spellingShingle	Liao, Fang-Jie ddc 530 bkl 33.18 bkl 33.38 bkl 50.37 misc Heterodyne interferometry misc Phase shifting interferometry misc Angular measurement High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry
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topic_title	530 VZ 33.18 bkl 33.38 bkl 50.37 bkl High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry Heterodyne interferometry Phase shifting interferometry Angular measurement
topic	ddc 530 bkl 33.18 bkl 33.38 bkl 50.37 misc Heterodyne interferometry misc Phase shifting interferometry misc Angular measurement
topic_unstemmed	ddc 530 bkl 33.18 bkl 33.38 bkl 50.37 misc Heterodyne interferometry misc Phase shifting interferometry misc Angular measurement
topic_browse	ddc 530 bkl 33.18 bkl 33.38 bkl 50.37 misc Heterodyne interferometry misc Phase shifting interferometry misc Angular measurement
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title	High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry
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title_full	High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry
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title_sort	high-dynamical-range angular measurement based on heterodyne phase shifting interferometry
title_auth	High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry
abstract	A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology.
abstractGer	A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology.
abstract_unstemmed	A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz 1 / 2 . Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology.
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title_short	High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry
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author2	Wu, Kai-Hang Liu, Su-Ming Zhang, Jing-Yi Ming, Min Liu, Qi Duan, Hui-Zong Yeh, Hsien-Chi
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doi_str	10.1016/j.optcom.2023.130209
up_date	2024-07-06T18:13:14.228Z
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High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry

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