Structure, optical and electrical properties of silicon-rich silicon nitride films

Gespeichert in:

Autor*in:	Voskoboynikov, V.V. Gritsenko, V.A. Dikovskaya, N.D. Zaitsev, B.N. Mogilnicov, K.P. Osadchii, V.M. Sinitsa, S.P. Edelman, F.L.

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	1976

Reproduktion:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Übergeordnetes Werk:	in: Thin Solid Films - Amsterdam : Elsevier, 32(1976), 2, Seite 339-342
Übergeordnetes Werk:	volume:32 ; year:1976 ; number:2 ; pages:339-342

Links:	Link aufrufen

Katalog-ID:	NLEJ178606944

Internformat


LEADER	01000caa a22002652 4500
001	NLEJ178606944
003	DE-627
005	20210706081330.0
007	cr uuu---uuuuu
008	070505s1976 xx \|\|\|\|\|o 00\| \|\|eng c
035			\|a (DE-627)NLEJ178606944
035			\|a (DE-599)GBVNLZ178606944
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
041			\|a eng
245	1	0	\|a Structure, optical and electrical properties of silicon-rich silicon nitride films
264		1	\|c 1976
336			\|a nicht spezifiziert \|b zzz \|2 rdacontent
337			\|a nicht spezifiziert \|b z \|2 rdamedia
338			\|a nicht spezifiziert \|b zu \|2 rdacarrier
533			\|f Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
700	1		\|a Voskoboynikov, V.V. \|4 oth
700	1		\|a Gritsenko, V.A. \|4 oth
700	1		\|a Dikovskaya, N.D. \|4 oth
700	1		\|a Zaitsev, B.N. \|4 oth
700	1		\|a Mogilnicov, K.P. \|4 oth
700	1		\|a Osadchii, V.M. \|4 oth
700	1		\|a Sinitsa, S.P. \|4 oth
700	1		\|a Edelman, F.L. \|4 oth
773	0	8	\|i in \|t Thin Solid Films \|d Amsterdam : Elsevier \|g 32(1976), 2, Seite 339-342 \|w (DE-627)NLEJ177331380 \|w (DE-600)1482896-0 \|x 0040-6090 \|7 nnns
773	1	8	\|g volume:32 \|g year:1976 \|g number:2 \|g pages:339-342
856	4	0	\|u http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8
912			\|a GBV_USEFLAG_H
912			\|a ZDB-1-SDJ
912			\|a GBV_NL_ARTICLE
951			\|a AR
952			\|d 32 \|j 1976 \|e 2 \|h 339-342

Indexfelder

matchkey_str	article:00406090:1976----::tutrotclneetiapoeteoslcni
hierarchy_sort_str	1976
publishDate	1976
allfields	(DE-627)NLEJ178606944 (DE-599)GBVNLZ178606944 DE-627 ger DE-627 rakwb eng Structure, optical and electrical properties of silicon-rich silicon nitride films 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Voskoboynikov, V.V. oth Gritsenko, V.A. oth Dikovskaya, N.D. oth Zaitsev, B.N. oth Mogilnicov, K.P. oth Osadchii, V.M. oth Sinitsa, S.P. oth Edelman, F.L. oth in Thin Solid Films Amsterdam : Elsevier 32(1976), 2, Seite 339-342 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:32 year:1976 number:2 pages:339-342 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 32 1976 2 339-342
spelling	(DE-627)NLEJ178606944 (DE-599)GBVNLZ178606944 DE-627 ger DE-627 rakwb eng Structure, optical and electrical properties of silicon-rich silicon nitride films 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Voskoboynikov, V.V. oth Gritsenko, V.A. oth Dikovskaya, N.D. oth Zaitsev, B.N. oth Mogilnicov, K.P. oth Osadchii, V.M. oth Sinitsa, S.P. oth Edelman, F.L. oth in Thin Solid Films Amsterdam : Elsevier 32(1976), 2, Seite 339-342 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:32 year:1976 number:2 pages:339-342 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 32 1976 2 339-342
allfields_unstemmed	(DE-627)NLEJ178606944 (DE-599)GBVNLZ178606944 DE-627 ger DE-627 rakwb eng Structure, optical and electrical properties of silicon-rich silicon nitride films 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Voskoboynikov, V.V. oth Gritsenko, V.A. oth Dikovskaya, N.D. oth Zaitsev, B.N. oth Mogilnicov, K.P. oth Osadchii, V.M. oth Sinitsa, S.P. oth Edelman, F.L. oth in Thin Solid Films Amsterdam : Elsevier 32(1976), 2, Seite 339-342 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:32 year:1976 number:2 pages:339-342 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 32 1976 2 339-342
allfieldsGer	(DE-627)NLEJ178606944 (DE-599)GBVNLZ178606944 DE-627 ger DE-627 rakwb eng Structure, optical and electrical properties of silicon-rich silicon nitride films 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Voskoboynikov, V.V. oth Gritsenko, V.A. oth Dikovskaya, N.D. oth Zaitsev, B.N. oth Mogilnicov, K.P. oth Osadchii, V.M. oth Sinitsa, S.P. oth Edelman, F.L. oth in Thin Solid Films Amsterdam : Elsevier 32(1976), 2, Seite 339-342 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:32 year:1976 number:2 pages:339-342 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 32 1976 2 339-342
allfieldsSound	(DE-627)NLEJ178606944 (DE-599)GBVNLZ178606944 DE-627 ger DE-627 rakwb eng Structure, optical and electrical properties of silicon-rich silicon nitride films 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Voskoboynikov, V.V. oth Gritsenko, V.A. oth Dikovskaya, N.D. oth Zaitsev, B.N. oth Mogilnicov, K.P. oth Osadchii, V.M. oth Sinitsa, S.P. oth Edelman, F.L. oth in Thin Solid Films Amsterdam : Elsevier 32(1976), 2, Seite 339-342 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:32 year:1976 number:2 pages:339-342 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 32 1976 2 339-342
language	English
source	in Thin Solid Films 32(1976), 2, Seite 339-342 volume:32 year:1976 number:2 pages:339-342
sourceStr	in Thin Solid Films 32(1976), 2, Seite 339-342 volume:32 year:1976 number:2 pages:339-342
format_phy_str_mv	Article
institution	findex.gbv.de
isfreeaccess_bool	false
container_title	Thin Solid Films
authorswithroles_txt_mv	Voskoboynikov, V.V. @@oth@@ Gritsenko, V.A. @@oth@@ Dikovskaya, N.D. @@oth@@ Zaitsev, B.N. @@oth@@ Mogilnicov, K.P. @@oth@@ Osadchii, V.M. @@oth@@ Sinitsa, S.P. @@oth@@ Edelman, F.L. @@oth@@
publishDateDaySort_date	1976-01-01T00:00:00Z
hierarchy_top_id	NLEJ177331380
id	NLEJ178606944
language_de	englisch
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">NLEJ178606944</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20210706081330.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">070505s1976 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)NLEJ178606944</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVNLZ178606944</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Structure, optical and electrical properties of silicon-rich silicon nitride films</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1976</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="f">Elsevier Journal Backfiles on ScienceDirect 1907 - 2002</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Voskoboynikov, V.V.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gritsenko, V.A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dikovskaya, N.D.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zaitsev, B.N.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mogilnicov, K.P.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Osadchii, V.M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sinitsa, S.P.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Edelman, F.L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">in</subfield><subfield code="t">Thin Solid Films</subfield><subfield code="d">Amsterdam : Elsevier</subfield><subfield code="g">32(1976), 2, Seite 339-342</subfield><subfield code="w">(DE-627)NLEJ177331380</subfield><subfield code="w">(DE-600)1482896-0</subfield><subfield code="x">0040-6090</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:32</subfield><subfield code="g">year:1976</subfield><subfield code="g">number:2</subfield><subfield code="g">pages:339-342</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_H</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-1-SDJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_NL_ARTICLE</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">32</subfield><subfield code="j">1976</subfield><subfield code="e">2</subfield><subfield code="h">339-342</subfield></datafield></record></collection>
series2	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
ppnlink_with_tag_str_mv	@@773@@(DE-627)NLEJ177331380
format	electronic Article
delete_txt_mv	keep
collection	NL
remote_str	true
illustrated	Not Illustrated
issn	0040-6090
topic_title	Structure, optical and electrical properties of silicon-rich silicon nitride films
format_facet	Elektronische Aufsätze Aufsätze Elektronische Ressource
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	zu
author2_variant	v v vv v g vg n d nd b z bz k m km v o vo s s ss f e fe
hierarchy_parent_title	Thin Solid Films
hierarchy_parent_id	NLEJ177331380
hierarchy_top_title	Thin Solid Films
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)NLEJ177331380 (DE-600)1482896-0
title	Structure, optical and electrical properties of silicon-rich silicon nitride films
spellingShingle	Structure, optical and electrical properties of silicon-rich silicon nitride films
ctrlnum	(DE-627)NLEJ178606944 (DE-599)GBVNLZ178606944
title_full	Structure, optical and electrical properties of silicon-rich silicon nitride films
journal	Thin Solid Films
journalStr	Thin Solid Films
lang_code	eng
isOA_bool	false
recordtype	marc
publishDateSort	1976
contenttype_str_mv	zzz
container_start_page	339
container_volume	32
format_se	Elektronische Aufsätze
title_sort	structure, optical and electrical properties of silicon-rich silicon nitride films
title_auth	Structure, optical and electrical properties of silicon-rich silicon nitride films
collection_details	GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE
container_issue	2
title_short	Structure, optical and electrical properties of silicon-rich silicon nitride films
url	http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8
remote_bool	true
author2	Voskoboynikov, V.V. Gritsenko, V.A. Dikovskaya, N.D. Zaitsev, B.N. Mogilnicov, K.P. Osadchii, V.M. Sinitsa, S.P. Edelman, F.L.
author2Str	Voskoboynikov, V.V. Gritsenko, V.A. Dikovskaya, N.D. Zaitsev, B.N. Mogilnicov, K.P. Osadchii, V.M. Sinitsa, S.P. Edelman, F.L.
ppnlink	NLEJ177331380
mediatype_str_mv	z
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth oth oth oth oth oth oth
up_date	2024-07-05T22:25:26.894Z
_version_	1803779652343300096
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">NLEJ178606944</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20210706081330.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">070505s1976 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)NLEJ178606944</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVNLZ178606944</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Structure, optical and electrical properties of silicon-rich silicon nitride films</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1976</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="f">Elsevier Journal Backfiles on ScienceDirect 1907 - 2002</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Voskoboynikov, V.V.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gritsenko, V.A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Dikovskaya, N.D.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Zaitsev, B.N.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mogilnicov, K.P.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Osadchii, V.M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sinitsa, S.P.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Edelman, F.L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">in</subfield><subfield code="t">Thin Solid Films</subfield><subfield code="d">Amsterdam : Elsevier</subfield><subfield code="g">32(1976), 2, Seite 339-342</subfield><subfield code="w">(DE-627)NLEJ177331380</subfield><subfield code="w">(DE-600)1482896-0</subfield><subfield code="x">0040-6090</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:32</subfield><subfield code="g">year:1976</subfield><subfield code="g">number:2</subfield><subfield code="g">pages:339-342</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90327-8</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_H</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-1-SDJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_NL_ARTICLE</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">32</subfield><subfield code="j">1976</subfield><subfield code="e">2</subfield><subfield code="h">339-342</subfield></datafield></record></collection>
score	7.3985167

Nicht das Richtige dabei?

Schreiben Sie uns!

Structure, optical and electrical properties of silicon-rich silicon nitride films

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?