Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films
The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary c...
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
1994 |
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| Reproduktion: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 |
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| Übergeordnetes Werk: |
in: Thin Solid Films - Amsterdam : Elsevier, 251(1994), 1, Seite 67-71 |
| Übergeordnetes Werk: |
volume:251 ; year:1994 ; number:1 ; pages:67-71 |
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| 245 | 1 | 0 | |a Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films |
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| 520 | |a The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. | ||
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| 700 | 1 | |a Georgiev, J. |4 oth | |
| 700 | 1 | |a Mladenov, G. |4 oth | |
| 700 | 1 | |a Ivanov, D. |4 oth | |
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(DE-627)NLEJ178984000 (DE-599)GBVNLZ178984000 DE-627 ger DE-627 rakwb eng Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films 1994 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Georgiev, J. oth Mladenov, G. oth Ivanov, D. oth in Thin Solid Films Amsterdam : Elsevier 251(1994), 1, Seite 67-71 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:251 year:1994 number:1 pages:67-71 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(94)90842-7 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 251 1994 1 67-71 |
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(DE-627)NLEJ178984000 (DE-599)GBVNLZ178984000 DE-627 ger DE-627 rakwb eng Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films 1994 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Georgiev, J. oth Mladenov, G. oth Ivanov, D. oth in Thin Solid Films Amsterdam : Elsevier 251(1994), 1, Seite 67-71 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:251 year:1994 number:1 pages:67-71 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(94)90842-7 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 251 1994 1 67-71 |
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(DE-627)NLEJ178984000 (DE-599)GBVNLZ178984000 DE-627 ger DE-627 rakwb eng Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films 1994 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Georgiev, J. oth Mladenov, G. oth Ivanov, D. oth in Thin Solid Films Amsterdam : Elsevier 251(1994), 1, Seite 67-71 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:251 year:1994 number:1 pages:67-71 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(94)90842-7 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 251 1994 1 67-71 |
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(DE-627)NLEJ178984000 (DE-599)GBVNLZ178984000 DE-627 ger DE-627 rakwb eng Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films 1994 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Georgiev, J. oth Mladenov, G. oth Ivanov, D. oth in Thin Solid Films Amsterdam : Elsevier 251(1994), 1, Seite 67-71 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:251 year:1994 number:1 pages:67-71 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(94)90842-7 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 251 1994 1 67-71 |
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(DE-627)NLEJ178984000 (DE-599)GBVNLZ178984000 DE-627 ger DE-627 rakwb eng Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films 1994 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Georgiev, J. oth Mladenov, G. oth Ivanov, D. oth in Thin Solid Films Amsterdam : Elsevier 251(1994), 1, Seite 67-71 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:251 year:1994 number:1 pages:67-71 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(94)90842-7 GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 251 1994 1 67-71 |
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monte carlo simulation of electron-beam exposure distributions in the resist on structures with high-t"c superconducting thin films |
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Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-T"c superconducting thin films |
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The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. |
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The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. |
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The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa"2Cu"3O"7 high-T"c superconducting thin films deposited on different substrates were determined using a Monte Carlo simulation (MCS), which takes into account the exact boundary conditions on interfaces between different layers of the target. The ability of our Monte Carlo program to accurately simulate the radial exposure distributions was demonstrated. The effects of substrate material (SrTiO"3 and MgO), beam energy (40 and 80 x 10^-^1^6J) and high-temperature superconducting (HTS) film thickness (100 and 300 nm) on these distributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model. |
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