An analytical study of platinum silicide formation
Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscat...
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
1976 |
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| Reproduktion: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 |
|---|---|
| Übergeordnetes Werk: |
in: Thin Solid Films - Amsterdam : Elsevier, 37(1976), 3, Seite 441-452 |
| Übergeordnetes Werk: |
volume:37 ; year:1976 ; number:3 ; pages:441-452 |
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| 520 | |a Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. | ||
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(DE-627)NLEJ179241370 (DE-599)GBVNLZ179241370 DE-627 ger DE-627 rakwb eng An analytical study of platinum silicide formation 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Bindell, J.B. oth Colby, J.W. oth Wonsidler, D.R. oth Poate, J.M. oth Conley, D.K. oth Tisone, T.C. oth in Thin Solid Films Amsterdam : Elsevier 37(1976), 3, Seite 441-452 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:37 year:1976 number:3 pages:441-452 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90612-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 37 1976 3 441-452 |
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(DE-627)NLEJ179241370 (DE-599)GBVNLZ179241370 DE-627 ger DE-627 rakwb eng An analytical study of platinum silicide formation 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Bindell, J.B. oth Colby, J.W. oth Wonsidler, D.R. oth Poate, J.M. oth Conley, D.K. oth Tisone, T.C. oth in Thin Solid Films Amsterdam : Elsevier 37(1976), 3, Seite 441-452 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:37 year:1976 number:3 pages:441-452 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90612-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 37 1976 3 441-452 |
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(DE-627)NLEJ179241370 (DE-599)GBVNLZ179241370 DE-627 ger DE-627 rakwb eng An analytical study of platinum silicide formation 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Bindell, J.B. oth Colby, J.W. oth Wonsidler, D.R. oth Poate, J.M. oth Conley, D.K. oth Tisone, T.C. oth in Thin Solid Films Amsterdam : Elsevier 37(1976), 3, Seite 441-452 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:37 year:1976 number:3 pages:441-452 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90612-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 37 1976 3 441-452 |
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(DE-627)NLEJ179241370 (DE-599)GBVNLZ179241370 DE-627 ger DE-627 rakwb eng An analytical study of platinum silicide formation 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Bindell, J.B. oth Colby, J.W. oth Wonsidler, D.R. oth Poate, J.M. oth Conley, D.K. oth Tisone, T.C. oth in Thin Solid Films Amsterdam : Elsevier 37(1976), 3, Seite 441-452 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:37 year:1976 number:3 pages:441-452 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90612-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 37 1976 3 441-452 |
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(DE-627)NLEJ179241370 (DE-599)GBVNLZ179241370 DE-627 ger DE-627 rakwb eng An analytical study of platinum silicide formation 1976 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Bindell, J.B. oth Colby, J.W. oth Wonsidler, D.R. oth Poate, J.M. oth Conley, D.K. oth Tisone, T.C. oth in Thin Solid Films Amsterdam : Elsevier 37(1976), 3, Seite 441-452 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:37 year:1976 number:3 pages:441-452 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90612-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 37 1976 3 441-452 |
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Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. |
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Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. |
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Rutherford backscattering has been used in a previous investigation of the kinetics of platinum silicide formation. In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature. |
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In this earlier study, several interesting features were observed in the backscattering spectrum which corresponded to a scattering from the surface regions of the sample. The backscattering technique by itself was not sufficient for the interpretation of these features. In this paper, the same features were investigated by means of Auger electron spectroscopy, secondary ion mass spectroscopy and electron probe microanalysis. The same samples were used in both investigations. The Auger investigation was able to demonstrate that these surface effects were related to oxygen and aluminum contamination of the films. The contaminants were found to move with the platinum-platinum silicide phase boundary while the small amount of oxygen present in the annealing furnace caused the oxidation of the silicon on the surface by diffusion through the unreacted platinum. The electron microprobe results and the secondary ion mass spectroscopy results, while generally corroborating the backscattering and the Auger results, were less informative. The results from all four techniques are compared and found to be complementary in nature.</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="f">Elsevier Journal Backfiles on ScienceDirect 1907 - 2002</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bindell, J.B.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Colby, J.W.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wonsidler, D.R.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Poate, J.M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Conley, D.K.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tisone, T.C.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">in</subfield><subfield code="t">Thin Solid Films</subfield><subfield code="d">Amsterdam : Elsevier</subfield><subfield code="g">37(1976), 3, Seite 441-452</subfield><subfield code="w">(DE-627)NLEJ177331380</subfield><subfield code="w">(DE-600)1482896-0</subfield><subfield code="x">0040-6090</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:37</subfield><subfield code="g">year:1976</subfield><subfield code="g">number:3</subfield><subfield code="g">pages:441-452</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://linkinghub.elsevier.com/retrieve/pii/0040-6090(76)90612-X</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_H</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-1-SDJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_NL_ARTICLE</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">37</subfield><subfield code="j">1976</subfield><subfield code="e">3</subfield><subfield code="h">441-452</subfield></datafield></record></collection>
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