Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon
Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anis...
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| Autor*in: |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
1980 |
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| Reproduktion: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 |
|---|---|
| Übergeordnetes Werk: |
in: Thin Solid Films - Amsterdam : Elsevier, 72(1980), 1, Seite 195-200 |
| Übergeordnetes Werk: |
volume:72 ; year:1980 ; number:1 ; pages:195-200 |
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NLEJ179396846 |
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| 245 | 1 | 0 | |a Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon |
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| 520 | |a Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. | ||
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| 700 | 1 | |a Inspektor, A. |4 oth | |
| 700 | 1 | |a Hornik, Y. |4 oth | |
| 700 | 1 | |a Carmi, U. |4 oth | |
| 700 | 1 | |a Avni, R. |4 oth | |
| 700 | 1 | |a Wallura, E. |4 oth | |
| 700 | 1 | |a Hoven, H. |4 oth | |
| 700 | 1 | |a Koizlik, K. |4 oth | |
| 700 | 1 | |a Nickel, H. |4 oth | |
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(DE-627)NLEJ179396846 (DE-599)GBVNLZ179396846 DE-627 ger DE-627 rakwb eng Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon 1980 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Inspektor, A. oth Hornik, Y. oth Carmi, U. oth Avni, R. oth Wallura, E. oth Hoven, H. oth Koizlik, K. oth Nickel, H. oth in Thin Solid Films Amsterdam : Elsevier 72(1980), 1, Seite 195-200 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:72 year:1980 number:1 pages:195-200 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(80)90574-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 72 1980 1 195-200 |
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(DE-627)NLEJ179396846 (DE-599)GBVNLZ179396846 DE-627 ger DE-627 rakwb eng Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon 1980 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Inspektor, A. oth Hornik, Y. oth Carmi, U. oth Avni, R. oth Wallura, E. oth Hoven, H. oth Koizlik, K. oth Nickel, H. oth in Thin Solid Films Amsterdam : Elsevier 72(1980), 1, Seite 195-200 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:72 year:1980 number:1 pages:195-200 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(80)90574-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 72 1980 1 195-200 |
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(DE-627)NLEJ179396846 (DE-599)GBVNLZ179396846 DE-627 ger DE-627 rakwb eng Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon 1980 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Inspektor, A. oth Hornik, Y. oth Carmi, U. oth Avni, R. oth Wallura, E. oth Hoven, H. oth Koizlik, K. oth Nickel, H. oth in Thin Solid Films Amsterdam : Elsevier 72(1980), 1, Seite 195-200 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:72 year:1980 number:1 pages:195-200 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(80)90574-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 72 1980 1 195-200 |
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(DE-627)NLEJ179396846 (DE-599)GBVNLZ179396846 DE-627 ger DE-627 rakwb eng Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon 1980 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Inspektor, A. oth Hornik, Y. oth Carmi, U. oth Avni, R. oth Wallura, E. oth Hoven, H. oth Koizlik, K. oth Nickel, H. oth in Thin Solid Films Amsterdam : Elsevier 72(1980), 1, Seite 195-200 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:72 year:1980 number:1 pages:195-200 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(80)90574-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 72 1980 1 195-200 |
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(DE-627)NLEJ179396846 (DE-599)GBVNLZ179396846 DE-627 ger DE-627 rakwb eng Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon 1980 nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 Inspektor, A. oth Hornik, Y. oth Carmi, U. oth Avni, R. oth Wallura, E. oth Hoven, H. oth Koizlik, K. oth Nickel, H. oth in Thin Solid Films Amsterdam : Elsevier 72(1980), 1, Seite 195-200 (DE-627)NLEJ177331380 (DE-600)1482896-0 0040-6090 nnns volume:72 year:1980 number:1 pages:195-200 http://linkinghub.elsevier.com/retrieve/pii/0040-6090(80)90574-X GBV_USEFLAG_H ZDB-1-SDJ GBV_NL_ARTICLE AR 72 1980 1 195-200 |
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Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon |
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characterization of pyrolytic carbon deposited on graphite substrates in inductive r.f. plasmas of propylene and argon |
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Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon |
| abstract |
Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. |
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Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. |
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Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system. |
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Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon |
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<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">NLEJ179396846</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20210706100922.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">070505s1980 xx |||||o 00| ||eng c</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)NLEJ179396846</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVNLZ179396846</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1980</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zzz</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">z</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">nicht spezifiziert</subfield><subfield code="b">zu</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Coatings of pyrolytic carbon (PyC) on graphite substrates were obtained in an inductive r.f. plasma in mixtures of propylene and argon at pressures up to 10 Torr. The temperature of the graphite substrate in the inductive r.f. system was kept at 350 +/- 50^oC. The PyC coatings were analysed for anisotropy, for composition by small angle X-ray scattering and for density. The results obtained (varying the gas pressure and the propylene concentration in the r.f. plasma system) were partly compared with PyC coatings obtained in a chemical vapour deposition fluidized bed system.</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="f">Elsevier Journal Backfiles on ScienceDirect 1907 - 2002</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Inspektor, A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hornik, Y.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Carmi, U.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Avni, R.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wallura, E.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hoven, H.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Koizlik, K.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nickel, H.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">in</subfield><subfield code="t">Thin Solid Films</subfield><subfield code="d">Amsterdam : Elsevier</subfield><subfield code="g">72(1980), 1, Seite 195-200</subfield><subfield code="w">(DE-627)NLEJ177331380</subfield><subfield code="w">(DE-600)1482896-0</subfield><subfield code="x">0040-6090</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:72</subfield><subfield code="g">year:1980</subfield><subfield code="g">number:1</subfield><subfield code="g">pages:195-200</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://linkinghub.elsevier.com/retrieve/pii/0040-6090(80)90574-X</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_H</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-1-SDJ</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_NL_ARTICLE</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">72</subfield><subfield code="j">1980</subfield><subfield code="e">1</subfield><subfield code="h">195-200</subfield></datafield></record></collection>
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