Effects of Hydrogen Plasma on Dislocation Motion in Silicon

Gespeichert in:

Autor*in:	Yamashita, Y. [verfasserIn] Jyobe, F. Kamiura, Y. Maeda, Koji

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	s.l. Stafa-Zurich, Switzerland: 1997

Anmerkung:	https://getinfo.de/app/details?id=transtech:doi~10.4028%252Fwww.scientific.net%252FMSF.258-263.313
Umfang:	Online-Ressource (6 pages)

Reproduktion:	Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Übergeordnetes Werk:	In: Materials science forum - Uetikon : Trans Tech Publ., 1984, Vol. 258-263 (Dec. 1997), p. 313-318
Übergeordnetes Werk:	volume:258-263 ; year:1997 ; pages:313-318

Links:	Volltext Volltext

DOI / URN:	10.4028/www.scientific.net/MSF.258-263.313

Katalog-ID:	NLEJ237862816

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allfieldsGer	10.4028/www.scientific.net/MSF.258-263.313 doi (DE-627)NLEJ237862816 DE-627 ger DE-627 rakwb eng Yamashita, Y. verfasserin aut Effects of Hydrogen Plasma on Dislocation Motion in Silicon s.l. Stafa-Zurich, Switzerland 1997 Online-Ressource (6 pages) nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier https://getinfo.de/app/details?id=transtech:doi~10.4028%252Fwww.scientific.net%252FMSF.258-263.313 Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008 Jyobe, F. oth Kamiura, Y. oth Maeda, Koji oth In Materials science forum Uetikon : Trans Tech Publ., 1984 Vol. 258-263 (Dec. 1997), p. 313-318 Online-Ressource (DE-627)NLEJ237794969 (DE-600)2047372-2 1662-9752 nnns volume:258-263 year:1997 pages:313-318 https://www.tib.eu/de/openurl/search/?pid=doi:10.4028/www.scientific.net/MSF.258-263.313 text/html Deutschlandweit zugänglich Volltext https://doi.org//10.4028/www.scientific.net/MSF.258-263.313 text/html Deutschlandweit zugänglich Volltext GBV_USEFLAG_U ZDB-1-SNT GBV_NL_ARTICLE AR 258-263 1997 313-318 Vol. 258-263 (Dec. 1997), p. 313-318
allfieldsSound	10.4028/www.scientific.net/MSF.258-263.313 doi (DE-627)NLEJ237862816 DE-627 ger DE-627 rakwb eng Yamashita, Y. verfasserin aut Effects of Hydrogen Plasma on Dislocation Motion in Silicon s.l. Stafa-Zurich, Switzerland 1997 Online-Ressource (6 pages) nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier https://getinfo.de/app/details?id=transtech:doi~10.4028%252Fwww.scientific.net%252FMSF.258-263.313 Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008 Jyobe, F. oth Kamiura, Y. oth Maeda, Koji oth In Materials science forum Uetikon : Trans Tech Publ., 1984 Vol. 258-263 (Dec. 1997), p. 313-318 Online-Ressource (DE-627)NLEJ237794969 (DE-600)2047372-2 1662-9752 nnns volume:258-263 year:1997 pages:313-318 https://www.tib.eu/de/openurl/search/?pid=doi:10.4028/www.scientific.net/MSF.258-263.313 text/html Deutschlandweit zugänglich Volltext https://doi.org//10.4028/www.scientific.net/MSF.258-263.313 text/html Deutschlandweit zugänglich Volltext GBV_USEFLAG_U ZDB-1-SNT GBV_NL_ARTICLE AR 258-263 1997 313-318 Vol. 258-263 (Dec. 1997), p. 313-318
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title_sort	effects of hydrogen plasma on dislocation motion in silicon
title_auth	Effects of Hydrogen Plasma on Dislocation Motion in Silicon
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title_short	Effects of Hydrogen Plasma on Dislocation Motion in Silicon
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