Wet Metal Etching for Ti/Co Self-Aligned Silicides

Gespeichert in:

Autor*in:	O'Brien, S. [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	s.l. Stafa-Zurich, Switzerland: 1998

Anmerkung:	https://getinfo.de/app/details?id=transtech:doi~10.4028%252Fwww.scientific.net%252FSSP.65-66.131
Umfang:	Online-Ressource (4 pages)

Reproduktion:	Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Übergeordnetes Werk:	In: Solid state phenomena - Uetikon : Trans Tech Publ., 1988, Vol. 65-66 (Nov. 1998), p. 131-134
Übergeordnetes Werk:	volume:65-66 ; year:1998 ; pages:131-134

Links:	Volltext Volltext

DOI / URN:	10.4028/www.scientific.net/SSP.65-66.131

Katalog-ID:	NLEJ238342395

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allfields_unstemmed	10.4028/www.scientific.net/SSP.65-66.131 doi (DE-627)NLEJ238342395 DE-627 ger DE-627 rakwb eng O'Brien, S. verfasserin aut Wet Metal Etching for Ti/Co Self-Aligned Silicides s.l. Stafa-Zurich, Switzerland 1998 Online-Ressource (4 pages) nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier https://getinfo.de/app/details?id=transtech:doi~10.4028%252Fwww.scientific.net%252FSSP.65-66.131 Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008 In Solid state phenomena Uetikon : Trans Tech Publ., 1988 Vol. 65-66 (Nov. 1998), p. 131-134 Online-Ressource (DE-627)NLEJ237794926 (DE-600)2051138-3 1662-9779 nnns volume:65-66 year:1998 pages:131-134 https://www.tib.eu/de/openurl/search/?pid=doi:10.4028/www.scientific.net/SSP.65-66.131 text/html Deutschlandweit zugänglich Volltext https://doi.org//10.4028/www.scientific.net/SSP.65-66.131 text/html Deutschlandweit zugänglich Volltext GBV_USEFLAG_U ZDB-1-SNT GBV_NL_ARTICLE AR 65-66 1998 131-134 Vol. 65-66 (Nov. 1998), p. 131-134
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allfieldsSound	10.4028/www.scientific.net/SSP.65-66.131 doi (DE-627)NLEJ238342395 DE-627 ger DE-627 rakwb eng O'Brien, S. verfasserin aut Wet Metal Etching for Ti/Co Self-Aligned Silicides s.l. Stafa-Zurich, Switzerland 1998 Online-Ressource (4 pages) nicht spezifiziert zzz rdacontent nicht spezifiziert z rdamedia nicht spezifiziert zu rdacarrier https://getinfo.de/app/details?id=transtech:doi~10.4028%252Fwww.scientific.net%252FSSP.65-66.131 Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008 In Solid state phenomena Uetikon : Trans Tech Publ., 1988 Vol. 65-66 (Nov. 1998), p. 131-134 Online-Ressource (DE-627)NLEJ237794926 (DE-600)2051138-3 1662-9779 nnns volume:65-66 year:1998 pages:131-134 https://www.tib.eu/de/openurl/search/?pid=doi:10.4028/www.scientific.net/SSP.65-66.131 text/html Deutschlandweit zugänglich Volltext https://doi.org//10.4028/www.scientific.net/SSP.65-66.131 text/html Deutschlandweit zugänglich Volltext GBV_USEFLAG_U ZDB-1-SNT GBV_NL_ARTICLE AR 65-66 1998 131-134 Vol. 65-66 (Nov. 1998), p. 131-134
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title_auth	Wet Metal Etching for Ti/Co Self-Aligned Silicides
abstract	https://getinfo.de/app/details?id=transtech:doi~10.4028%252Fwww.scientific.net%252FSSP.65-66.131
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title_short	Wet Metal Etching for Ti/Co Self-Aligned Silicides
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