Rapid thermal annealing using the combustion of H2 with N 2)O

Gespeichert in:

Autor*in:	Sameshima, T. [verfasserIn] Sunaga, Y. Takashima, N. Tajima, A.

Format:	Artikel

Erschienen:	1996

Umfang:	3

Übergeordnetes Werk:	Enthalten in: Applied physics letters - Melville, NY : AIP, 1962, 69(1996), 9, Seite 1205-1207
Übergeordnetes Werk:	volume:69 ; year:1996 ; number:9 ; pages:1205-1207 ; extent:3

Katalog-ID:	OLC1503890333

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Rapid thermal annealing using the combustion of H2 with N 2)O

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