Radio frequency hollow cathodes for the plasma processing technology

Gespeichert in:

Autor*in:	Bardos, L. [verfasserIn]

Format:	Artikel

Erschienen:	1997

Umfang:	9

Übergeordnetes Werk:	Enthalten in: Surface & coatings technology - Lausanne : Elsevier Sequoia, 1986, 86(1997), 2, Seite 648-656
Übergeordnetes Werk:	volume:86 ; year:1997 ; supplement:2 ; pages:648-656 ; extent:9

Katalog-ID:	OLC1510690891

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