Characterization of damage in electron cyclotron resonance plasma etched compound semiconductors

Gespeichert in:

Autor*in:	Pearton, S.J. [verfasserIn]

Format:	Artikel

Erschienen:	1997

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Applied surface science - Amsterdam [u.a.] : Elsevier, 1985, 117(1997), Seite 597-604
Übergeordnetes Werk:	volume:117 ; year:1997 ; pages:597-604 ; extent:8

Katalog-ID:	OLC1519337256

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